FR1533755A - Device for adjusting the point of treatment in an apparatus with an electric beam or the like - Google Patents

Device for adjusting the point of treatment in an apparatus with an electric beam or the like

Info

Publication number
FR1533755A
FR1533755A FR117128A FR117128A FR1533755A FR 1533755 A FR1533755 A FR 1533755A FR 117128 A FR117128 A FR 117128A FR 117128 A FR117128 A FR 117128A FR 1533755 A FR1533755 A FR 1533755A
Authority
FR
France
Prior art keywords
adjusting
treatment
point
electric beam
electric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR117128A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2827267A external-priority patent/JPS5127917B1/ja
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Application granted granted Critical
Publication of FR1533755A publication Critical patent/FR1533755A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration
FR117128A 1966-08-16 1967-08-07 Device for adjusting the point of treatment in an apparatus with an electric beam or the like Expired FR1533755A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP5382666 1966-08-16
JP2827267A JPS5127917B1 (en) 1967-05-02 1967-05-02

Publications (1)

Publication Number Publication Date
FR1533755A true FR1533755A (en) 1968-07-19

Family

ID=26366331

Family Applications (1)

Application Number Title Priority Date Filing Date
FR117128A Expired FR1533755A (en) 1966-08-16 1967-08-07 Device for adjusting the point of treatment in an apparatus with an electric beam or the like

Country Status (4)

Country Link
US (1) US3513285A (en)
DE (1) DE1690626C3 (en)
FR (1) FR1533755A (en)
GB (1) GB1201383A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2016815A1 (en) * 1968-07-23 1970-05-15 Ibm
DE2056620A1 (en) * 1969-12-15 1971-06-16 Ibm Device for exposure of semiconductor elements
EP0003038A2 (en) * 1978-01-16 1979-07-25 International Business Machines Corporation Method for overlay measurement using an electronic beam system as a measuring tool

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5552675A (en) * 1959-04-08 1996-09-03 Lemelson; Jerome H. High temperature reaction apparatus
US3789185A (en) * 1969-12-15 1974-01-29 Ibm Electron beam deflection control apparatus
FR2087114A5 (en) * 1970-05-05 1971-12-31 Cit Alcatel
US3783228A (en) * 1970-12-28 1974-01-01 Agency Ind Science Techn Method of manufacturing integrated circuits
US3775581A (en) * 1971-06-23 1973-11-27 Welding Research Inc Seam tracking method
CA946480A (en) * 1971-07-26 1974-04-30 Sciaky Intertechnique S.A. Hole center locator
US3873802A (en) * 1971-07-26 1975-03-25 Welding Research Inc Elector beam welding apparatus chicorporating a hole center locating means
US3849659A (en) * 1973-09-10 1974-11-19 Westinghouse Electric Corp Alignment of a patterned electron beam with a member by electron backscatter
US4158122A (en) * 1973-12-21 1979-06-12 Obolonsky Alexei P Method of measuring and stabilizing the diameter of heating point on workpiece in electron beam welding machine and on automatic device for realization thereof
JPS5283177A (en) * 1975-12-31 1977-07-11 Fujitsu Ltd Electron beam exposure device
DE2719801C3 (en) * 1977-04-28 1981-11-19 Siemens AG, 1000 Berlin und 8000 München Corpuscular beam optical device for irradiating a specimen with a device for adjusting the same
US4179316A (en) * 1977-10-17 1979-12-18 Sciaky Bros., Inc. Method and apparatus for heat treating
JPS5731134A (en) * 1980-08-01 1982-02-19 Hitachi Ltd Drawing device by electron beam
JPS57183034A (en) * 1981-05-07 1982-11-11 Toshiba Corp Electron bean transfer device
JPS5946026A (en) * 1982-09-09 1984-03-15 Toshiba Corp Measuring method for position of sample
DE3243033A1 (en) * 1982-11-22 1984-05-24 Institut für Kerntechnik und Energiewandlung e.V., 7000 Stuttgart METHOD AND ARRANGEMENT FOR MACHINING A WORKPIECE BY MEANS OF A FOCUSED ELECTRON BEAM
DE3810391A1 (en) * 1988-03-26 1989-10-05 Leybold Ag DEVICE AND METHOD FOR CONTROLLING AND MONITORING A DEFLECTABLE ELECTRON BEAM FOR METAL WORKING
DE4024084A1 (en) * 1989-11-29 1991-06-06 Daimler Benz Ag METHOD FOR PRODUCING HOLLOW GAS EXCHANGE VALVES FOR LIFTING PISTON MACHINES
US5483036A (en) * 1993-10-28 1996-01-09 Sandia Corporation Method of automatic measurement and focus of an electron beam and apparatus therefor
EP2575159B1 (en) * 2011-09-30 2016-04-20 Carl Zeiss Microscopy GmbH Particle beam system and method for operating the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3284618A (en) * 1962-03-16 1966-11-08 Licentia Gmbh Nominal value position control system
GB1065060A (en) * 1963-04-19 1967-04-12 United Aircraft Corp Improvements in and relating to apparatus for working articles with energised beams
US3326176A (en) * 1964-10-27 1967-06-20 Nat Res Corp Work-registration device including ionic beam probe

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2016815A1 (en) * 1968-07-23 1970-05-15 Ibm
DE2056620A1 (en) * 1969-12-15 1971-06-16 Ibm Device for exposure of semiconductor elements
EP0003038A2 (en) * 1978-01-16 1979-07-25 International Business Machines Corporation Method for overlay measurement using an electronic beam system as a measuring tool
EP0003038A3 (en) * 1978-01-16 1979-08-08 International Business Machines Corporation Method for overlay measurement using an electronic beam system as a measuring tool

Also Published As

Publication number Publication date
DE1690626A1 (en) 1971-04-08
GB1201383A (en) 1970-08-05
DE1690626C3 (en) 1979-02-08
DE1690626B2 (en) 1973-09-13
US3513285A (en) 1970-05-19

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