FR1519847A - High flow rate cryogenic pump under high vacuum - Google Patents

High flow rate cryogenic pump under high vacuum

Info

Publication number
FR1519847A
FR1519847A FR96225A FR96225A FR1519847A FR 1519847 A FR1519847 A FR 1519847A FR 96225 A FR96225 A FR 96225A FR 96225 A FR96225 A FR 96225A FR 1519847 A FR1519847 A FR 1519847A
Authority
FR
France
Prior art keywords
flow rate
pump under
cryogenic pump
under high
high vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR96225A
Other languages
French (fr)
Inventor
Jacques Roussel
Jean-Jacques Thibault
Jean Mention
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Priority to FR96225A priority Critical patent/FR1519847A/en
Application granted granted Critical
Publication of FR1519847A publication Critical patent/FR1519847A/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
FR96225A 1967-02-23 1967-02-23 High flow rate cryogenic pump under high vacuum Expired FR1519847A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR96225A FR1519847A (en) 1967-02-23 1967-02-23 High flow rate cryogenic pump under high vacuum

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR96225A FR1519847A (en) 1967-02-23 1967-02-23 High flow rate cryogenic pump under high vacuum

Publications (1)

Publication Number Publication Date
FR1519847A true FR1519847A (en) 1968-04-05

Family

ID=8625818

Family Applications (1)

Application Number Title Priority Date Filing Date
FR96225A Expired FR1519847A (en) 1967-02-23 1967-02-23 High flow rate cryogenic pump under high vacuum

Country Status (1)

Country Link
FR (1) FR1519847A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0079960A1 (en) * 1981-05-22 1983-06-01 Helix Tech Corp Improved cryopump.

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0079960A1 (en) * 1981-05-22 1983-06-01 Helix Tech Corp Improved cryopump.
EP0079960A4 (en) * 1981-05-22 1983-09-20 Helix Tech Corp Improved cryopump.

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