FR1516152A - Perfectionnements aux bancs photographiques répétiteurs - Google Patents

Perfectionnements aux bancs photographiques répétiteurs

Info

Publication number
FR1516152A
FR1516152A FR92388A FR92388A FR1516152A FR 1516152 A FR1516152 A FR 1516152A FR 92388 A FR92388 A FR 92388A FR 92388 A FR92388 A FR 92388A FR 1516152 A FR1516152 A FR 1516152A
Authority
FR
France
Prior art keywords
benches
repeater
photographic
repeater photographic
photographic benches
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR92388A
Other languages
English (en)
Inventor
Georges Guillot
Mario Sollima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Compagnie Francaise Thomson Houston SA
Original Assignee
Compagnie Francaise Thomson Houston SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Compagnie Francaise Thomson Houston SA filed Critical Compagnie Francaise Thomson Houston SA
Priority to FR92388A priority Critical patent/FR1516152A/fr
Priority to US697899A priority patent/US3494695A/en
Priority to GB2231/68A priority patent/GB1197361A/en
Priority to NL6801031A priority patent/NL6801031A/xx
Application granted granted Critical
Publication of FR1516152A publication Critical patent/FR1516152A/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70425—Imaging strategies, e.g. for increasing throughput or resolution, printing product fields larger than the image field or compensating lithography- or non-lithography errors, e.g. proximity correction, mix-and-match, stitching or double patterning
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C7/00—Multicolour photographic processes or agents therefor; Regeneration of such processing agents; Photosensitive materials for multicolour processes
    • G03C7/22—Subtractive cinematographic processes; Materials therefor; Preparing or processing such materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Projection-Type Copiers In General (AREA)
FR92388A 1967-01-25 1967-01-25 Perfectionnements aux bancs photographiques répétiteurs Expired FR1516152A (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR92388A FR1516152A (fr) 1967-01-25 1967-01-25 Perfectionnements aux bancs photographiques répétiteurs
US697899A US3494695A (en) 1967-01-25 1968-01-15 Microphotographic reproducing system
GB2231/68A GB1197361A (en) 1967-01-25 1968-01-15 Replicating Microphotographic Apparatus
NL6801031A NL6801031A (fr) 1967-01-25 1968-01-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR92388A FR1516152A (fr) 1967-01-25 1967-01-25 Perfectionnements aux bancs photographiques répétiteurs

Publications (1)

Publication Number Publication Date
FR1516152A true FR1516152A (fr) 1968-03-08

Family

ID=8624328

Family Applications (1)

Application Number Title Priority Date Filing Date
FR92388A Expired FR1516152A (fr) 1967-01-25 1967-01-25 Perfectionnements aux bancs photographiques répétiteurs

Country Status (4)

Country Link
US (1) US3494695A (fr)
FR (1) FR1516152A (fr)
GB (1) GB1197361A (fr)
NL (1) NL6801031A (fr)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3630613A (en) * 1968-09-30 1971-12-28 Burroughs Corp Apparatus for forming discrete areas of coating material on a substrate
US3610750A (en) * 1968-11-25 1971-10-05 Teledyne Inc Methods and apparatus for photo-optical manufacture of semiconductor products
FR2030468A5 (fr) * 1969-01-29 1970-11-13 Thomson Brandt Csf
US3639059A (en) * 1969-02-10 1972-02-01 Matrographics Inc Graphic-processing apparatus
US3704946A (en) * 1969-02-20 1972-12-05 Opt Omechanisms Inc Microcircuit art generating means
US3837742A (en) * 1972-09-12 1974-09-24 Filminiature Syst Inc Photoreproduction apparatus
US3907425A (en) * 1974-06-11 1975-09-23 Itoi Isamu Automatic register mark printing control device in an engraving machine
JPS54131403A (en) * 1978-03-31 1979-10-12 Dainippon Screen Mfg Automatic masking device for original holder of plate making machine
DE2845603C2 (de) * 1978-10-19 1982-12-09 Censor Patent- und Versuchs-Anstalt, 9490 Vaduz Verfahren und Einrichtung zum Projektionskopieren
US4346987A (en) * 1980-07-18 1982-08-31 Xerox Corporation Printed circuit board projection imaging system
US4443096A (en) * 1981-05-18 1984-04-17 Optimetrix Corporation On machine reticle inspection device
US4431304A (en) * 1981-11-25 1984-02-14 Mayer Herbert E Apparatus for the projection copying of mask patterns on a workpiece
US4629313A (en) * 1982-10-22 1986-12-16 Nippon Kogaku K.K. Exposure apparatus
US4620785A (en) * 1982-12-01 1986-11-04 Canon Kabushiki Kaisha Sheet-like member having alignment marks and an alignment apparatus for the same
US5171965A (en) * 1984-02-01 1992-12-15 Canon Kabushiki Kaisha Exposure method and apparatus
US5091744A (en) * 1984-02-13 1992-02-25 Canon Kabushiki Kaisha Illumination optical system
JPH03212925A (ja) * 1990-01-18 1991-09-18 Matsushita Electric Ind Co Ltd 露光装置
FR2663130B1 (fr) * 1990-06-08 1994-12-09 Nippon Seiko Kk Dispositif d'exposition par projection.
JP2862385B2 (ja) * 1991-03-13 1999-03-03 キヤノン株式会社 露光装置
US5530516A (en) * 1994-10-04 1996-06-25 Tamarack Scientific Co., Inc. Large-area projection exposure system
US5638154A (en) * 1994-11-29 1997-06-10 Napp Systems, Inc. Printing plate mounting device
US5666188A (en) * 1994-11-29 1997-09-09 Napp Systems, Inc. Printing plate mounting device
KR100399813B1 (ko) 1994-12-14 2004-06-09 가부시키가이샤 니콘 노광장치

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3185026A (en) * 1961-05-22 1965-05-25 Ncr Co Method and apparatus employing metachromatic material for forming a plurality of individual micro-images
FR1415466A (fr) * 1964-12-04 1965-10-22 Philips Nv Dispositif grâce auquel un organe déplaçable dans un plan peut être réglé de façon répétée d'une manière reproductible en une multiplicité de points à paires de coordonnées prédéterminées

Also Published As

Publication number Publication date
NL6801031A (fr) 1968-07-26
US3494695A (en) 1970-02-10
GB1197361A (en) 1970-07-01

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