FR1515867A - Method for the detection of small differences between a test object and a reference surface and apparatus for its implementation - Google Patents

Method for the detection of small differences between a test object and a reference surface and apparatus for its implementation

Info

Publication number
FR1515867A
FR1515867A FR69047413A FR69047413A FR1515867A FR 1515867 A FR1515867 A FR 1515867A FR 69047413 A FR69047413 A FR 69047413A FR 69047413 A FR69047413 A FR 69047413A FR 1515867 A FR1515867 A FR 1515867A
Authority
FR
France
Prior art keywords
implementation
detection
reference surface
test object
small differences
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR69047413A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Research Development Corp UK
Original Assignee
National Research Development Corp UK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Development Corp UK filed Critical National Research Development Corp UK
Application granted granted Critical
Publication of FR1515867A publication Critical patent/FR1515867A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/021—Interferometers using holographic techniques

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Holo Graphy (AREA)
FR69047413A 1965-06-15 1966-06-15 Method for the detection of small differences between a test object and a reference surface and apparatus for its implementation Expired FR1515867A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB2526965A GB1142702A (en) 1965-06-15 1965-06-15 Interferometric examination of objects and materials

Publications (1)

Publication Number Publication Date
FR1515867A true FR1515867A (en) 1968-03-08

Family

ID=10224972

Family Applications (1)

Application Number Title Priority Date Filing Date
FR69047413A Expired FR1515867A (en) 1965-06-15 1966-06-15 Method for the detection of small differences between a test object and a reference surface and apparatus for its implementation

Country Status (3)

Country Link
DE (1) DE1548284C3 (en)
FR (1) FR1515867A (en)
GB (1) GB1142702A (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2946493A1 (en) 1979-11-17 1981-05-21 Wolfgang Prof. Dipl.-Phys. Dr. Dreybrodt Automatic contactless optical evaluation of reflecting surface quality - using photoelectric transducers and point or laser illumination source
GB8619006D0 (en) * 1986-08-04 1986-09-17 Hugle W B Positional detection of objects
GB2194353B (en) * 1986-08-04 1990-02-21 Hugle William Bell The method of and apparatus for the holographic positional detection of objects
US5793488A (en) * 1995-07-31 1998-08-11 Tropel Corporation Interferometer with compound optics for measuring cylindrical objects at oblique incidence

Also Published As

Publication number Publication date
DE1548284B2 (en) 1974-06-27
DE1548284A1 (en) 1970-05-06
GB1142702A (en) 1969-02-12
DE1548284C3 (en) 1975-02-13

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