FR1515661A - Improvements in semiconductor device manufacturing processes and products obtained - Google Patents

Improvements in semiconductor device manufacturing processes and products obtained

Info

Publication number
FR1515661A
FR1515661A FR100393A FR100393A FR1515661A FR 1515661 A FR1515661 A FR 1515661A FR 100393 A FR100393 A FR 100393A FR 100393 A FR100393 A FR 100393A FR 1515661 A FR1515661 A FR 1515661A
Authority
FR
France
Prior art keywords
semiconductor device
device manufacturing
manufacturing processes
products obtained
products
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR100393A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Associated Electrical Industries Ltd filed Critical Associated Electrical Industries Ltd
Application granted granted Critical
Publication of FR1515661A publication Critical patent/FR1515661A/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B25/00Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
    • C30B25/02Epitaxial-layer growth
    • C30B25/08Reaction chambers; Selection of materials therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
FR100393A 1966-03-28 1967-03-28 Improvements in semiconductor device manufacturing processes and products obtained Expired FR1515661A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1358366 1966-03-28

Publications (1)

Publication Number Publication Date
FR1515661A true FR1515661A (en) 1968-03-01

Family

ID=10025606

Family Applications (1)

Application Number Title Priority Date Filing Date
FR100393A Expired FR1515661A (en) 1966-03-28 1967-03-28 Improvements in semiconductor device manufacturing processes and products obtained

Country Status (1)

Country Link
FR (1) FR1515661A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2077621A1 (en) * 1970-01-26 1971-10-29 Gen Electric

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2077621A1 (en) * 1970-01-26 1971-10-29 Gen Electric

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