FR1515661A - Improvements in semiconductor device manufacturing processes and products obtained - Google Patents
Improvements in semiconductor device manufacturing processes and products obtainedInfo
- Publication number
- FR1515661A FR1515661A FR100393A FR100393A FR1515661A FR 1515661 A FR1515661 A FR 1515661A FR 100393 A FR100393 A FR 100393A FR 100393 A FR100393 A FR 100393A FR 1515661 A FR1515661 A FR 1515661A
- Authority
- FR
- France
- Prior art keywords
- semiconductor device
- device manufacturing
- manufacturing processes
- products obtained
- products
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B25/00—Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth
- C30B25/02—Epitaxial-layer growth
- C30B25/08—Reaction chambers; Selection of materials therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1358366 | 1966-03-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1515661A true FR1515661A (en) | 1968-03-01 |
Family
ID=10025606
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR100393A Expired FR1515661A (en) | 1966-03-28 | 1967-03-28 | Improvements in semiconductor device manufacturing processes and products obtained |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1515661A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2077621A1 (en) * | 1970-01-26 | 1971-10-29 | Gen Electric |
-
1967
- 1967-03-28 FR FR100393A patent/FR1515661A/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2077621A1 (en) * | 1970-01-26 | 1971-10-29 | Gen Electric |
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