FR1504491A - Procédé et moyens de fabrication de couches minces de composés semi-conducteurs - Google Patents

Procédé et moyens de fabrication de couches minces de composés semi-conducteurs

Info

Publication number
FR1504491A
FR1504491A FR62170A FR62170A FR1504491A FR 1504491 A FR1504491 A FR 1504491A FR 62170 A FR62170 A FR 62170A FR 62170 A FR62170 A FR 62170A FR 1504491 A FR1504491 A FR 1504491A
Authority
FR
France
Prior art keywords
thin films
manufacturing thin
semiconductor compounds
compounds
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR62170A
Other languages
English (en)
Inventor
Claude Piaget
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RADIOTECHNIQUE COPRIM RTC
Original Assignee
RADIOTECHNIQUE COPRIM RTC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RADIOTECHNIQUE COPRIM RTC filed Critical RADIOTECHNIQUE COPRIM RTC
Priority to FR62170A priority Critical patent/FR1504491A/fr
Application granted granted Critical
Publication of FR1504491A publication Critical patent/FR1504491A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02612—Formation types
    • H01L21/02617—Deposition types
    • H01L21/02631—Physical deposition at reduced pressure, e.g. MBE, sputtering, evaporation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02551—Group 12/16 materials
    • H01L21/02562—Tellurides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/0257—Doping during depositing
    • H01L21/02573—Conductivity type

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
FR62170A 1966-05-18 1966-05-18 Procédé et moyens de fabrication de couches minces de composés semi-conducteurs Expired FR1504491A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR62170A FR1504491A (fr) 1966-05-18 1966-05-18 Procédé et moyens de fabrication de couches minces de composés semi-conducteurs

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR62170A FR1504491A (fr) 1966-05-18 1966-05-18 Procédé et moyens de fabrication de couches minces de composés semi-conducteurs

Publications (1)

Publication Number Publication Date
FR1504491A true FR1504491A (fr) 1967-12-08

Family

ID=8608985

Family Applications (1)

Application Number Title Priority Date Filing Date
FR62170A Expired FR1504491A (fr) 1966-05-18 1966-05-18 Procédé et moyens de fabrication de couches minces de composés semi-conducteurs

Country Status (1)

Country Link
FR (1) FR1504491A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2738111A1 (de) * 1977-08-24 1979-03-01 Licentia Gmbh Verfahren zum epitaktischen abscheiden von silizium

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2738111A1 (de) * 1977-08-24 1979-03-01 Licentia Gmbh Verfahren zum epitaktischen abscheiden von silizium

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