FR1496859A - Procédé de fabrication de résistances à couche, étroitement appariées - Google Patents

Procédé de fabrication de résistances à couche, étroitement appariées

Info

Publication number
FR1496859A
FR1496859A FR47806A FR69047806A FR1496859A FR 1496859 A FR1496859 A FR 1496859A FR 47806 A FR47806 A FR 47806A FR 69047806 A FR69047806 A FR 69047806A FR 1496859 A FR1496859 A FR 1496859A
Authority
FR
France
Prior art keywords
film resistors
tightly matched
matched film
manufacturing
manufacturing tightly
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR47806A
Other languages
English (en)
Inventor
Ronald Lee Koepp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Monsanto Co
Original Assignee
Monsanto Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Monsanto Co filed Critical Monsanto Co
Application granted granted Critical
Publication of FR1496859A publication Critical patent/FR1496859A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/22—Elongated resistive element being bent or curved, e.g. sinusoidal, helical
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by vapour deposition
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C7/00—Non-adjustable resistors formed as one or more layers or coatings; Non-adjustable resistors made from powdered conducting material or powdered semi-conducting material with or without insulating material
    • H01C7/006—Thin film resistors

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Physical Vapour Deposition (AREA)
FR47806A 1965-10-13 1966-10-07 Procédé de fabrication de résistances à couche, étroitement appariées Expired FR1496859A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US49552065A 1965-10-13 1965-10-13

Publications (1)

Publication Number Publication Date
FR1496859A true FR1496859A (fr) 1967-10-06

Family

ID=23968949

Family Applications (1)

Application Number Title Priority Date Filing Date
FR47806A Expired FR1496859A (fr) 1965-10-13 1966-10-07 Procédé de fabrication de résistances à couche, étroitement appariées

Country Status (3)

Country Link
US (1) US3506481A (fr)
FR (1) FR1496859A (fr)
GB (1) GB1113877A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6646509B2 (en) * 2002-01-23 2003-11-11 Broadcom Corporation Layout technique for matched resistors on an integrated circuit substrate

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1093968A (en) * 1913-10-25 1914-04-21 Richard Stuart Bicknell Electric furnace.
US2849583A (en) * 1952-07-19 1958-08-26 Pritikin Nathan Electrical resistor and method and apparatus for producing resistors
US2994848A (en) * 1958-08-20 1961-08-01 Illinois Tool Works Resistor device
US2993815A (en) * 1959-05-25 1961-07-25 Bell Telephone Labor Inc Metallizing refractory substrates
US3205855A (en) * 1961-08-28 1965-09-14 Clifford M Ault Coating apparatus for producing electrical components
NL285523A (fr) * 1961-11-24

Also Published As

Publication number Publication date
US3506481A (en) 1970-04-14
GB1113877A (en) 1968-05-15

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