FR1486872A - Glow discharge devices, cold cathode - Google Patents

Glow discharge devices, cold cathode

Info

Publication number
FR1486872A
FR1486872A FR69632A FR69632A FR1486872A FR 1486872 A FR1486872 A FR 1486872A FR 69632 A FR69632 A FR 69632A FR 69632 A FR69632 A FR 69632A FR 1486872 A FR1486872 A FR 1486872A
Authority
FR
France
Prior art keywords
cold cathode
glow discharge
discharge devices
devices
glow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR69632A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB30434/65A external-priority patent/GB1093133A/en
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Priority to FR69632A priority Critical patent/FR1486872A/en
Application granted granted Critical
Publication of FR1486872A publication Critical patent/FR1486872A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/38—Cold-cathode tubes
    • H01J17/40—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/38—Cold-cathode tubes
    • H01J17/40—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes
    • H01J17/44—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes having one or more control electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0067—Electrode assembly without control electrodes, e.g. including a screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0068—Electrode systems electrode assembly with control electrodes, e.g. including a screen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
FR69632A 1965-07-16 1966-07-15 Glow discharge devices, cold cathode Expired FR1486872A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR69632A FR1486872A (en) 1965-07-16 1966-07-15 Glow discharge devices, cold cathode

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB30434/65A GB1093133A (en) 1965-07-16 1965-07-16 Improvements in or relating to cold cathode glow discharge devices
FR69632A FR1486872A (en) 1965-07-16 1966-07-15 Glow discharge devices, cold cathode

Publications (1)

Publication Number Publication Date
FR1486872A true FR1486872A (en) 1967-06-30

Family

ID=26172015

Family Applications (1)

Application Number Title Priority Date Filing Date
FR69632A Expired FR1486872A (en) 1965-07-16 1966-07-15 Glow discharge devices, cold cathode

Country Status (1)

Country Link
FR (1) FR1486872A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2416439A1 (en) * 1978-01-31 1979-08-31 Blinov Viktor Electric furnace using glow discharge - for chemical treatment and hardening of workpieces, esp. nitriding and/or carburising

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2416439A1 (en) * 1978-01-31 1979-08-31 Blinov Viktor Electric furnace using glow discharge - for chemical treatment and hardening of workpieces, esp. nitriding and/or carburising

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