GB1093133A - Improvements in or relating to cold cathode glow discharge devices - Google Patents

Improvements in or relating to cold cathode glow discharge devices

Info

Publication number
GB1093133A
GB1093133A GB30434/65A GB3043465A GB1093133A GB 1093133 A GB1093133 A GB 1093133A GB 30434/65 A GB30434/65 A GB 30434/65A GB 3043465 A GB3043465 A GB 3043465A GB 1093133 A GB1093133 A GB 1093133A
Authority
GB
United Kingdom
Prior art keywords
cathode
shielding electrode
centre
july
glow discharge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB30434/65A
Inventor
Ronald Arthur Dugdale
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Atomic Energy Authority
Original Assignee
UK Atomic Energy Authority
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Atomic Energy Authority filed Critical UK Atomic Energy Authority
Priority to GB30434/65A priority Critical patent/GB1093133A/en
Priority to US563826A priority patent/US3406307A/en
Priority to FR69632A priority patent/FR1486872A/en
Publication of GB1093133A publication Critical patent/GB1093133A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/38—Cold-cathode tubes
    • H01J17/40—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/38—Cold-cathode tubes
    • H01J17/40—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes
    • H01J17/44—Cold-cathode tubes with one cathode and one anode, e.g. glow tubes, tuning-indicator glow tubes, voltage-stabiliser tubes, voltage-indicator tubes having one or more control electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32018—Glow discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0067—Electrode assembly without control electrodes, e.g. including a screen
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2893/00—Discharge tubes and lamps
    • H01J2893/0064—Tubes with cold main electrodes (including cold cathodes)
    • H01J2893/0065—Electrode systems
    • H01J2893/0068—Electrode systems electrode assembly with control electrodes, e.g. including a screen

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Discharge Heating (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

1,093,133. Electron beam apparatus. UNITED KINGDOM ATOMIC ENERGY AUTHORITY. July 7, 1966 [July 16, 1965], No. 30434/65. Heading H1D. A cold cathode glow discharge device includes a hollow cathode 4 having a portion in the form of a hollow sphere truncated by two parallel planes symmetrically disposed with respect to the centre of the sphere, and a perforated shielding electrode 5 of a similar shape to, and surrounding, the cathode; in operation, the shielding electrode is held at anode potential, and the shielding electrode/cathode spacing is such that substantially no discharge occurs therebetween, but streams of electrons converge on the geometrical centre of the cathode. As shown, the anode is constituted by aluminium end plates 2, 3; the shielding electrode 5 is of stainless steel wire mesh; and a filling of hydrogen at 0À5 torr is maintained by adjustment of the valve 13 and the pump 10; and the cathode may be preheated to about 200‹ C. by focused radiant heat or by an attached resistance heater, to avoid a glow to arc transition during the initial stages of operation. The device may be employed for heat treatment, welding, melting, or zone refinement of refractory material positioned at the centre of the cathode, e.g. a tungsten rod may be zone refined by being passed longitudinally through the cathode by means of a holder operable from outside the envelope. If preheating or gradual cooling of the material is required, cylindrical or conical extensions to the top or bottom of the cathode and the shielding electrode may be provided.
GB30434/65A 1965-07-16 1965-07-16 Improvements in or relating to cold cathode glow discharge devices Expired GB1093133A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB30434/65A GB1093133A (en) 1965-07-16 1965-07-16 Improvements in or relating to cold cathode glow discharge devices
US563826A US3406307A (en) 1965-07-16 1966-07-08 Nonthermionic hollow cathode discharge devices
FR69632A FR1486872A (en) 1965-07-16 1966-07-15 Glow discharge devices, cold cathode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB30434/65A GB1093133A (en) 1965-07-16 1965-07-16 Improvements in or relating to cold cathode glow discharge devices

Publications (1)

Publication Number Publication Date
GB1093133A true GB1093133A (en) 1967-11-29

Family

ID=10307623

Family Applications (1)

Application Number Title Priority Date Filing Date
GB30434/65A Expired GB1093133A (en) 1965-07-16 1965-07-16 Improvements in or relating to cold cathode glow discharge devices

Country Status (2)

Country Link
US (1) US3406307A (en)
GB (1) GB1093133A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3492525A (en) * 1968-03-11 1970-01-27 United Aircraft Corp Sectional hollow cathode discharge apparatus
US4647818A (en) * 1984-04-16 1987-03-03 Sfe Technologies Nonthermionic hollow anode gas discharge electron beam source

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3262003A (en) * 1962-05-25 1966-07-19 Martin Marietta Corp Perforated hollow cathode discharge device
US3320475A (en) * 1963-04-30 1967-05-16 Gen Electric Nonthermionic hollow cathode electron beam apparatus

Also Published As

Publication number Publication date
US3406307A (en) 1968-10-15

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