FR1471925A - Canon à faisceau d'électrons - Google Patents
Canon à faisceau d'électronsInfo
- Publication number
- FR1471925A FR1471925A FR54644A FR54644A FR1471925A FR 1471925 A FR1471925 A FR 1471925A FR 54644 A FR54644 A FR 54644A FR 54644 A FR54644 A FR 54644A FR 1471925 A FR1471925 A FR 1471925A
- Authority
- FR
- France
- Prior art keywords
- electron beam
- beam cannon
- cannon
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/065—Construction of guns or parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR54644A FR1471925A (fr) | 1965-03-25 | 1966-03-23 | Canon à faisceau d'électrons |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US442580A US3333136A (en) | 1965-03-25 | 1965-03-25 | Electron-beam gun with adjustable filament baffle |
| FR54644A FR1471925A (fr) | 1965-03-25 | 1966-03-23 | Canon à faisceau d'électrons |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR1471925A true FR1471925A (fr) | 1967-03-03 |
Family
ID=26169402
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR54644A Expired FR1471925A (fr) | 1965-03-25 | 1966-03-23 | Canon à faisceau d'électrons |
Country Status (1)
| Country | Link |
|---|---|
| FR (1) | FR1471925A (fr) |
-
1966
- 1966-03-23 FR FR54644A patent/FR1471925A/fr not_active Expired
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