FR1470661A - Process for treating objects under high vacuum, and installation for implementing this process - Google Patents

Process for treating objects under high vacuum, and installation for implementing this process

Info

Publication number
FR1470661A
FR1470661A FR52015A FR52015A FR1470661A FR 1470661 A FR1470661 A FR 1470661A FR 52015 A FR52015 A FR 52015A FR 52015 A FR52015 A FR 52015A FR 1470661 A FR1470661 A FR 1470661A
Authority
FR
France
Prior art keywords
implementing
installation
under high
high vacuum
objects under
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR52015A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Application granted granted Critical
Publication of FR1470661A publication Critical patent/FR1470661A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
FR52015A 1965-03-06 1966-03-04 Process for treating objects under high vacuum, and installation for implementing this process Expired FR1470661A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL6502897A NL6502897A (en) 1965-03-06 1965-03-06

Publications (1)

Publication Number Publication Date
FR1470661A true FR1470661A (en) 1967-02-24

Family

ID=19792591

Family Applications (1)

Application Number Title Priority Date Filing Date
FR52015A Expired FR1470661A (en) 1965-03-06 1966-03-04 Process for treating objects under high vacuum, and installation for implementing this process

Country Status (4)

Country Link
BE (1) BE677401A (en)
FR (1) FR1470661A (en)
GB (1) GB1098289A (en)
NL (1) NL6502897A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58210161A (en) * 1982-05-24 1983-12-07 バリアン・アソシエイツ・インコ−ポレイテツド High speed gas exhausting system for high vacuum treatment

Also Published As

Publication number Publication date
GB1098289A (en) 1968-01-10
BE677401A (en) 1966-09-05
NL6502897A (en) 1966-09-07

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