BE677401A - - Google Patents
Info
- Publication number
- BE677401A BE677401A BE677401DA BE677401A BE 677401 A BE677401 A BE 677401A BE 677401D A BE677401D A BE 677401DA BE 677401 A BE677401 A BE 677401A
- Authority
- BE
- Belgium
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Vaporization, Distillation, Condensation, Sublimation, And Cold Traps (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL6502897A NL6502897A (xx) | 1965-03-06 | 1965-03-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE677401A true BE677401A (xx) | 1966-09-05 |
Family
ID=19792591
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE677401D BE677401A (xx) | 1965-03-06 | 1966-03-04 |
Country Status (4)
| Country | Link |
|---|---|
| BE (1) | BE677401A (xx) |
| FR (1) | FR1470661A (xx) |
| GB (1) | GB1098289A (xx) |
| NL (1) | NL6502897A (xx) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58210161A (ja) * | 1982-05-24 | 1983-12-07 | バリアン・アソシエイツ・インコ−ポレイテツド | 高真空処理のための高速排気システム |
-
1965
- 1965-03-06 NL NL6502897A patent/NL6502897A/xx unknown
-
1966
- 1966-03-03 GB GB933166A patent/GB1098289A/en not_active Expired
- 1966-03-04 BE BE677401D patent/BE677401A/xx unknown
- 1966-03-04 FR FR52015A patent/FR1470661A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1098289A (en) | 1968-01-10 |
| FR1470661A (fr) | 1967-02-24 |
| NL6502897A (xx) | 1966-09-07 |