Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
  • H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
• • B—PERFORMING OPERATIONS; TRANSPORTING
  • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
  • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
  • B23Q35/00—Control systems or devices for copying directly from a pattern or a master model; Devices for use in copying manually
  • B23Q35/04—Control systems or devices for copying directly from a pattern or a master model; Devices for use in copying manually using a feeler or the like travelling along the outline of the pattern, model or drawing; Feelers, patterns, or models therefor
  • B23Q35/08—Means for transforming movement of the feeler or the like into feed movement of tool or work
  • B23Q35/12—Means for transforming movement of the feeler or the like into feed movement of tool or work involving electrical means
  • B23Q35/127—Means for transforming movement of the feeler or the like into feed movement of tool or work involving electrical means using non-mechanical sensing
  • B23Q35/128—Sensing by using optical means
• • G—PHYSICS
  • G01—MEASURING; TESTING
  • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
  • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
  • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
  • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
  • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L23/00—Details of semiconductor or other solid state devices
  • H01L23/544—Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L2223/00—Details relating to semiconductor or other solid state devices covered by the group H01L23/00
  • H01L2223/544—Marks applied to semiconductor devices or parts
  • H01L2223/54453—Marks applied to semiconductor devices or parts for use prior to dicing
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
  • H01L2924/0001—Technical content checked by a classifier
  • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

• Engineering & Computer Science (AREA)
• Power Engineering (AREA)
• General Physics & Mathematics (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• Manufacturing & Machinery (AREA)
• Automation & Control Theory (AREA)
• Mechanical Engineering (AREA)
• General Engineering & Computer Science (AREA)
• Testing Or Measuring Of Semiconductors Or The Like (AREA)
• Tests Of Electronic Circuits (AREA)
• Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)

Priority Applications (1)

Applications Claiming Priority (2)

Publications (1)

Family

ID=23667217

Family Applications (1)

Country Status (5)

Families Citing this family (7)

Family Cites Families (3)

• 1964
  • 1964-12-23 US US420626A patent/US3401589A/en not_active Expired - Lifetime
• 1965
  • 1965-11-29 JP JP72595265A patent/JPS4218932B1/ja active Pending
  • 1965-12-08 GB GB51987/65A patent/GB1104660A/en not_active Expired
  • 1965-12-10 FR FR41657A patent/FR1458855A/fr not_active Expired
  • 1965-12-18 DE DE19651466729 patent/DE1466729A1/de active Pending

Also Published As

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