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H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
H01J37/301—Arrangements enabling beams to pass between regions of different pressure
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FR27766A1964-08-081965-08-09Dispositif d'usinage de matériaux à l'aide d'un faisceau corpusculaire
ExpiredFR1442911A
(fr)