FR1436048A - Improvements in manufacturing processes for thin-film photovoltaic devices - Google Patents

Improvements in manufacturing processes for thin-film photovoltaic devices

Info

Publication number
FR1436048A
FR1436048A FR8861A FR8861A FR1436048A FR 1436048 A FR1436048 A FR 1436048A FR 8861 A FR8861 A FR 8861A FR 8861 A FR8861 A FR 8861A FR 1436048 A FR1436048 A FR 1436048A
Authority
FR
France
Prior art keywords
thin
manufacturing processes
photovoltaic devices
film photovoltaic
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8861A
Other languages
French (fr)
Inventor
Albert Bobenrieth
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
EUROP DES SEMICONDUCTEURS SOC
Original Assignee
EUROP DES SEMICONDUCTEURS SOC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by EUROP DES SEMICONDUCTEURS SOC filed Critical EUROP DES SEMICONDUCTEURS SOC
Priority to FR8861A priority Critical patent/FR1436048A/en
Application granted granted Critical
Publication of FR1436048A publication Critical patent/FR1436048A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Electromagnetism (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Manufacturing & Machinery (AREA)
FR8861A 1965-03-11 1965-03-11 Improvements in manufacturing processes for thin-film photovoltaic devices Expired FR1436048A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8861A FR1436048A (en) 1965-03-11 1965-03-11 Improvements in manufacturing processes for thin-film photovoltaic devices

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8861A FR1436048A (en) 1965-03-11 1965-03-11 Improvements in manufacturing processes for thin-film photovoltaic devices

Publications (1)

Publication Number Publication Date
FR1436048A true FR1436048A (en) 1966-04-22

Family

ID=8573639

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8861A Expired FR1436048A (en) 1965-03-11 1965-03-11 Improvements in manufacturing processes for thin-film photovoltaic devices

Country Status (1)

Country Link
FR (1) FR1436048A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0087479A1 (en) * 1981-09-11 1983-09-07 Konica Corporation Method and device producing amorphous silicon solar battery
WO2001006030A1 (en) * 1999-07-19 2001-01-25 Young Park High throughput thin film deposition for optical disk processing
WO2014190362A1 (en) * 2013-05-21 2014-11-27 First Solar Malaysia Sdn.Bhd. Photovoltaic devices and methods for making the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0087479A1 (en) * 1981-09-11 1983-09-07 Konica Corporation Method and device producing amorphous silicon solar battery
EP0087479A4 (en) * 1981-09-11 1985-04-24 Konishiroku Photo Ind Method and device producing amorphous silicon solar battery.
WO2001006030A1 (en) * 1999-07-19 2001-01-25 Young Park High throughput thin film deposition for optical disk processing
WO2014190362A1 (en) * 2013-05-21 2014-11-27 First Solar Malaysia Sdn.Bhd. Photovoltaic devices and methods for making the same

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