FR1420531A - Improvements to ion sources - Google Patents

Improvements to ion sources

Info

Publication number
FR1420531A
FR1420531A FR992992A FR992992A FR1420531A FR 1420531 A FR1420531 A FR 1420531A FR 992992 A FR992992 A FR 992992A FR 992992 A FR992992 A FR 992992A FR 1420531 A FR1420531 A FR 1420531A
Authority
FR
France
Prior art keywords
ion sources
sources
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR992992A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from GB43063/63A external-priority patent/GB1102462A/en
Application filed by Associated Electrical Industries Ltd filed Critical Associated Electrical Industries Ltd
Priority to FR992992A priority Critical patent/FR1420531A/en
Application granted granted Critical
Publication of FR1420531A publication Critical patent/FR1420531A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/022—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/20—Ion sources; Ion guns using particle beam bombardment, e.g. ionisers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
FR992992A 1963-10-31 1964-10-28 Improvements to ion sources Expired FR1420531A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR992992A FR1420531A (en) 1963-10-31 1964-10-28 Improvements to ion sources

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB43063/63A GB1102462A (en) 1963-10-31 1963-10-31 Improvements relating to mass spectrometer ion sources
FR992992A FR1420531A (en) 1963-10-31 1964-10-28 Improvements to ion sources

Publications (1)

Publication Number Publication Date
FR1420531A true FR1420531A (en) 1965-12-10

Family

ID=26210820

Family Applications (1)

Application Number Title Priority Date Filing Date
FR992992A Expired FR1420531A (en) 1963-10-31 1964-10-28 Improvements to ion sources

Country Status (1)

Country Link
FR (1) FR1420531A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0002406A1 (en) * 1977-11-28 1979-06-13 ANVAR Agence Nationale de Valorisation de la Recherche Ion source, in particular for an ion implantation device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0002406A1 (en) * 1977-11-28 1979-06-13 ANVAR Agence Nationale de Valorisation de la Recherche Ion source, in particular for an ion implantation device
FR2410360A1 (en) * 1977-11-28 1979-06-22 Anvar SOURCE OF ION, ESPECIALLY FOR ION IMPLANTER

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