FR1405264A - Procédé de fabrication d'enceintes sous vide - Google Patents

Procédé de fabrication d'enceintes sous vide

Info

Publication number
FR1405264A
FR1405264A FR974212A FR974212A FR1405264A FR 1405264 A FR1405264 A FR 1405264A FR 974212 A FR974212 A FR 974212A FR 974212 A FR974212 A FR 974212A FR 1405264 A FR1405264 A FR 1405264A
Authority
FR
France
Prior art keywords
manufacturing process
vacuum chambers
chambers
vacuum
manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR974212A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR974212A priority Critical patent/FR1405264A/fr
Priority to BE663311A priority patent/BE663311A/xx
Priority to CH619665A priority patent/CH436227A/fr
Priority to US459978A priority patent/US3343999A/en
Priority to GB19701/65A priority patent/GB1066134A/en
Priority to LU48575A priority patent/LU48575A1/xx
Priority to NL6506059A priority patent/NL6506059A/xx
Priority to ES312863A priority patent/ES312863A1/es
Priority to DE19651521702D priority patent/DE1521702B1/de
Application granted granted Critical
Publication of FR1405264A publication Critical patent/FR1405264A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/564—Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
    • B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/02—Pretreatment of the material to be coated
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/10—Oxidising
    • C23C8/12—Oxidising using elemental oxygen or ozone
    • C23C8/14—Oxidising of ferrous surfaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B5/00—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated
    • F27B5/04—Muffle furnaces; Retort furnaces; Other furnaces in which the charge is held completely isolated adapted for treating the charge in vacuum or special atmosphere

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • General Engineering & Computer Science (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
FR974212A 1964-05-12 1964-05-12 Procédé de fabrication d'enceintes sous vide Expired FR1405264A (fr)

Priority Applications (9)

Application Number Priority Date Filing Date Title
FR974212A FR1405264A (fr) 1964-05-12 1964-05-12 Procédé de fabrication d'enceintes sous vide
BE663311A BE663311A (fr) 1964-05-12 1965-04-30
CH619665A CH436227A (fr) 1964-05-12 1965-05-04 Procédé de fabrication d'enceintes sous vide
GB19701/65A GB1066134A (en) 1964-05-12 1965-05-10 Method for the manufacture of vacuum containers
US459978A US3343999A (en) 1964-05-12 1965-05-10 Method for the manufacture of vacuum containers
LU48575A LU48575A1 (fr) 1964-05-12 1965-05-11
NL6506059A NL6506059A (fr) 1964-05-12 1965-05-12
ES312863A ES312863A1 (es) 1964-05-12 1965-05-12 Procedimiento de fabricacion de recintos al vacio.
DE19651521702D DE1521702B1 (de) 1964-05-12 1965-05-12 Verfahren zur Herstellung von Vakuumbehaeltern aus Stahl

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR974212A FR1405264A (fr) 1964-05-12 1964-05-12 Procédé de fabrication d'enceintes sous vide

Publications (1)

Publication Number Publication Date
FR1405264A true FR1405264A (fr) 1965-07-09

Family

ID=8829855

Family Applications (1)

Application Number Title Priority Date Filing Date
FR974212A Expired FR1405264A (fr) 1964-05-12 1964-05-12 Procédé de fabrication d'enceintes sous vide

Country Status (9)

Country Link
US (1) US3343999A (fr)
BE (1) BE663311A (fr)
CH (1) CH436227A (fr)
DE (1) DE1521702B1 (fr)
ES (1) ES312863A1 (fr)
FR (1) FR1405264A (fr)
GB (1) GB1066134A (fr)
LU (1) LU48575A1 (fr)
NL (1) NL6506059A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2436625A1 (fr) * 1978-09-22 1980-04-18 Ulvac Corp Recipient a vide et autres pieces d'equipement a vide
WO2017191408A1 (fr) * 2016-05-04 2017-11-09 Institut D'optique Installation optique sous vide et procede d'obtention d'une installation optique sous vide

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4216033A (en) * 1978-12-26 1980-08-05 United States Steel Corporation Method of nitriding steel
GB2129117B (en) * 1982-08-25 1985-12-18 Zojirushi Vacuum Bottle Co Stainless steel vacuum bottle and its production
JPH02179867A (ja) * 1988-12-29 1990-07-12 Tadahiro Omi プロセスガス供給システム
US5906688A (en) * 1989-01-11 1999-05-25 Ohmi; Tadahiro Method of forming a passivation film
JP2730695B2 (ja) * 1989-04-10 1998-03-25 忠弘 大見 タングステン膜の成膜装置
WO2011017495A1 (fr) 2009-08-07 2011-02-10 Swagelok Company Carburation à basse température sous vide partiel
JP6257527B2 (ja) 2012-01-20 2018-01-10 スウエイジロク・カンパニー 低温浸炭における活性化ガスの同時流

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1144968A (fr) * 1955-03-31 1957-10-21 Procédé de traitement des tôles d'acier, en vue de produire une pellicule d'oxydesur leur surface

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2436625A1 (fr) * 1978-09-22 1980-04-18 Ulvac Corp Recipient a vide et autres pieces d'equipement a vide
WO2017191408A1 (fr) * 2016-05-04 2017-11-09 Institut D'optique Installation optique sous vide et procede d'obtention d'une installation optique sous vide
FR3051042A1 (fr) * 2016-05-04 2017-11-10 Inst D'optique Installation optique sous vide et procede d'obtention d'une installation optique sous vide

Also Published As

Publication number Publication date
ES312863A1 (es) 1969-08-16
GB1066134A (en) 1967-04-19
CH436227A (fr) 1967-05-31
LU48575A1 (fr) 1965-07-12
DE1521702B1 (de) 1970-03-12
BE663311A (fr) 1965-08-17
US3343999A (en) 1967-09-26
NL6506059A (fr) 1965-11-15

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