FR1399130A - Advanced Semiconductor Doping Materials and Semiconductor Device Manufacturing - Google Patents

Advanced Semiconductor Doping Materials and Semiconductor Device Manufacturing

Info

Publication number
FR1399130A
FR1399130A FR978681A FR978681A FR1399130A FR 1399130 A FR1399130 A FR 1399130A FR 978681 A FR978681 A FR 978681A FR 978681 A FR978681 A FR 978681A FR 1399130 A FR1399130 A FR 1399130A
Authority
FR
France
Prior art keywords
device manufacturing
doping materials
semiconductor
semiconductor device
advanced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR978681A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Associated Electrical Industries Ltd
Original Assignee
Associated Electrical Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Associated Electrical Industries Ltd filed Critical Associated Electrical Industries Ltd
Priority to FR978681A priority Critical patent/FR1399130A/en
Application granted granted Critical
Publication of FR1399130A publication Critical patent/FR1399130A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/08—Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone
    • C30B13/10—Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone with addition of doping materials
    • C30B13/12—Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone with addition of doping materials in the gaseous or vapour state
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
FR978681A 1963-06-19 1964-06-17 Advanced Semiconductor Doping Materials and Semiconductor Device Manufacturing Expired FR1399130A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR978681A FR1399130A (en) 1963-06-19 1964-06-17 Advanced Semiconductor Doping Materials and Semiconductor Device Manufacturing

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB2447563 1963-06-19
FR978681A FR1399130A (en) 1963-06-19 1964-06-17 Advanced Semiconductor Doping Materials and Semiconductor Device Manufacturing

Publications (1)

Publication Number Publication Date
FR1399130A true FR1399130A (en) 1965-05-14

Family

ID=26208388

Family Applications (1)

Application Number Title Priority Date Filing Date
FR978681A Expired FR1399130A (en) 1963-06-19 1964-06-17 Advanced Semiconductor Doping Materials and Semiconductor Device Manufacturing

Country Status (1)

Country Link
FR (1) FR1399130A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0745704A2 (en) * 1995-06-01 1996-12-04 Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft Process for preparing an epitaxially coated semiconducting wafer

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0745704A2 (en) * 1995-06-01 1996-12-04 Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft Process for preparing an epitaxially coated semiconducting wafer
EP0745704A3 (en) * 1995-06-01 1996-12-18 Wacker Siltronic Gesellschaft für Halbleitermaterialien Aktiengesellschaft Process for preparing an epitaxially coated semiconducting wafer
US5897705A (en) * 1995-06-01 1999-04-27 Wacker Siltronic Gesellschaft Fur Halbeitermaterialien Mbh Process for the production of an epitaxially coated semiconductor wafer

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