FR1385711A - Perfectionnements aux dispositifs à faisceaux électroniques - Google Patents

Perfectionnements aux dispositifs à faisceaux électroniques

Info

Publication number
FR1385711A
FR1385711A FR958678A FR958678A FR1385711A FR 1385711 A FR1385711 A FR 1385711A FR 958678 A FR958678 A FR 958678A FR 958678 A FR958678 A FR 958678A FR 1385711 A FR1385711 A FR 1385711A
Authority
FR
France
Prior art keywords
electronic beam
beam devices
devices
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR958678A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Compagnie Francaise Thomson Houston SA
Original Assignee
Compagnie Francaise Thomson Houston SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US247730A external-priority patent/US3218431A/en
Application filed by Compagnie Francaise Thomson Houston SA filed Critical Compagnie Francaise Thomson Houston SA
Priority to FR958678A priority Critical patent/FR1385711A/fr
Application granted granted Critical
Publication of FR1385711A publication Critical patent/FR1385711A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/077—Electron guns using discharge in gases or vapours as electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/301—Arrangements enabling beams to pass between regions of different pressure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR958678A 1962-12-27 1963-12-27 Perfectionnements aux dispositifs à faisceaux électroniques Expired FR1385711A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR958678A FR1385711A (fr) 1962-12-27 1963-12-27 Perfectionnements aux dispositifs à faisceaux électroniques

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US247730A US3218431A (en) 1962-12-27 1962-12-27 Self-focusing electron beam apparatus
FR958678A FR1385711A (fr) 1962-12-27 1963-12-27 Perfectionnements aux dispositifs à faisceaux électroniques

Publications (1)

Publication Number Publication Date
FR1385711A true FR1385711A (fr) 1965-01-15

Family

ID=26205085

Family Applications (1)

Application Number Title Priority Date Filing Date
FR958678A Expired FR1385711A (fr) 1962-12-27 1963-12-27 Perfectionnements aux dispositifs à faisceaux électroniques

Country Status (1)

Country Link
FR (1) FR1385711A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1539639B1 (de) * 1965-04-12 1969-10-02 Asea Ab Elektrodenanordnung zum Erzeugen eines Elektronenstrahlbuendels hoher Intensitaet

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1539639B1 (de) * 1965-04-12 1969-10-02 Asea Ab Elektrodenanordnung zum Erzeugen eines Elektronenstrahlbuendels hoher Intensitaet

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