FR1374245A - Super sources of electrons and ions under high voltage according to the duoplasmatron principle - Google Patents
Super sources of electrons and ions under high voltage according to the duoplasmatron principleInfo
- Publication number
- FR1374245A FR1374245A FR954126A FR954126A FR1374245A FR 1374245 A FR1374245 A FR 1374245A FR 954126 A FR954126 A FR 954126A FR 954126 A FR954126 A FR 954126A FR 1374245 A FR1374245 A FR 1374245A
- Authority
- FR
- France
- Prior art keywords
- duoplasmatron
- electrons
- super
- sources
- principle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/06—Electron sources; Electron guns
- H01J37/077—Electron guns using discharge in gases or vapours as electron sources
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J27/00—Ion beam tubes
- H01J27/02—Ion sources; Ion guns
- H01J27/08—Ion sources; Ion guns using arc discharge
- H01J27/10—Duoplasmatrons ; Duopigatrons
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Combustion & Propulsion (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR954126A FR1374245A (en) | 1962-11-20 | 1963-11-18 | Super sources of electrons and ions under high voltage according to the duoplasmatron principle |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DES82505A DE1208420B (en) | 1962-11-20 | 1962-11-20 | Device for generating a beam of ions or electrons in which at least two similar ion or electron sources are arranged one behind the other |
FR954126A FR1374245A (en) | 1962-11-20 | 1963-11-18 | Super sources of electrons and ions under high voltage according to the duoplasmatron principle |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1374245A true FR1374245A (en) | 1964-10-02 |
Family
ID=25997056
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR954126A Expired FR1374245A (en) | 1962-11-20 | 1963-11-18 | Super sources of electrons and ions under high voltage according to the duoplasmatron principle |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1374245A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITBO20120320A1 (en) * | 2012-06-11 | 2013-12-12 | Libuse Skocdopolova | AN APPARATUS AND A METHOD FOR THE GRENERATION OF ELECTRON AND PLASMA FROM A GAS JET |
-
1963
- 1963-11-18 FR FR954126A patent/FR1374245A/en not_active Expired
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
ITBO20120320A1 (en) * | 2012-06-11 | 2013-12-12 | Libuse Skocdopolova | AN APPARATUS AND A METHOD FOR THE GRENERATION OF ELECTRON AND PLASMA FROM A GAS JET |
WO2013186697A3 (en) * | 2012-06-11 | 2014-02-27 | Noivion S.R.L. | Device for generating plasma and directing an electron beam towards a target |
CN104364873A (en) * | 2012-06-11 | 2015-02-18 | 诺伊维翁有限责任公司 | Device for generating plasma and directing an electron beam towards a target |
CN104364873B (en) * | 2012-06-11 | 2017-06-13 | 诺伊维翁有限责任公司 | Equipment for generating plasma and make electron beam sensing target |
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