FR1374245A - Super sources of electrons and ions under high voltage according to the duoplasmatron principle - Google Patents

Super sources of electrons and ions under high voltage according to the duoplasmatron principle

Info

Publication number
FR1374245A
FR1374245A FR954126A FR954126A FR1374245A FR 1374245 A FR1374245 A FR 1374245A FR 954126 A FR954126 A FR 954126A FR 954126 A FR954126 A FR 954126A FR 1374245 A FR1374245 A FR 1374245A
Authority
FR
France
Prior art keywords
duoplasmatron
electrons
super
sources
principle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR954126A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Schuckertwerke AG
Siemens AG
Original Assignee
Siemens Schuckertwerke AG
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DES82505A external-priority patent/DE1208420B/en
Application filed by Siemens Schuckertwerke AG, Siemens AG filed Critical Siemens Schuckertwerke AG
Priority to FR954126A priority Critical patent/FR1374245A/en
Application granted granted Critical
Publication of FR1374245A publication Critical patent/FR1374245A/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/077Electron guns using discharge in gases or vapours as electron sources
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns
    • H01J27/08Ion sources; Ion guns using arc discharge
    • H01J27/10Duoplasmatrons ; Duopigatrons

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
FR954126A 1962-11-20 1963-11-18 Super sources of electrons and ions under high voltage according to the duoplasmatron principle Expired FR1374245A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR954126A FR1374245A (en) 1962-11-20 1963-11-18 Super sources of electrons and ions under high voltage according to the duoplasmatron principle

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DES82505A DE1208420B (en) 1962-11-20 1962-11-20 Device for generating a beam of ions or electrons in which at least two similar ion or electron sources are arranged one behind the other
FR954126A FR1374245A (en) 1962-11-20 1963-11-18 Super sources of electrons and ions under high voltage according to the duoplasmatron principle

Publications (1)

Publication Number Publication Date
FR1374245A true FR1374245A (en) 1964-10-02

Family

ID=25997056

Family Applications (1)

Application Number Title Priority Date Filing Date
FR954126A Expired FR1374245A (en) 1962-11-20 1963-11-18 Super sources of electrons and ions under high voltage according to the duoplasmatron principle

Country Status (1)

Country Link
FR (1) FR1374245A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITBO20120320A1 (en) * 2012-06-11 2013-12-12 Libuse Skocdopolova AN APPARATUS AND A METHOD FOR THE GRENERATION OF ELECTRON AND PLASMA FROM A GAS JET

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITBO20120320A1 (en) * 2012-06-11 2013-12-12 Libuse Skocdopolova AN APPARATUS AND A METHOD FOR THE GRENERATION OF ELECTRON AND PLASMA FROM A GAS JET
WO2013186697A3 (en) * 2012-06-11 2014-02-27 Noivion S.R.L. Device for generating plasma and directing an electron beam towards a target
CN104364873A (en) * 2012-06-11 2015-02-18 诺伊维翁有限责任公司 Device for generating plasma and directing an electron beam towards a target
CN104364873B (en) * 2012-06-11 2017-06-13 诺伊维翁有限责任公司 Equipment for generating plasma and make electron beam sensing target

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