FR1372738A - Appareil émetteur de faisceaux électroniques de grande puissance - Google Patents

Appareil émetteur de faisceaux électroniques de grande puissance

Info

Publication number
FR1372738A
FR1372738A FR946919A FR946919A FR1372738A FR 1372738 A FR1372738 A FR 1372738A FR 946919 A FR946919 A FR 946919A FR 946919 A FR946919 A FR 946919A FR 1372738 A FR1372738 A FR 1372738A
Authority
FR
France
Prior art keywords
high power
power electronic
transmitter device
electronic beam
beam transmitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR946919A
Other languages
English (en)
Inventor
Francois Gaydou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from AT717762A external-priority patent/AT238464B/de
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Priority to FR946919A priority Critical patent/FR1372738A/fr
Application granted granted Critical
Publication of FR1372738A publication Critical patent/FR1372738A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/301—Arrangements enabling beams to pass between regions of different pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
FR946919A 1962-09-08 1963-09-09 Appareil émetteur de faisceaux électroniques de grande puissance Expired FR1372738A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR946919A FR1372738A (fr) 1962-09-08 1963-09-09 Appareil émetteur de faisceaux électroniques de grande puissance

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT717762A AT238464B (de) 1962-09-08 1962-09-08 Elektronenstrahlgerät hoher Leistung zum Erhitzen von Materialien unter Vakuum
FR946919A FR1372738A (fr) 1962-09-08 1963-09-09 Appareil émetteur de faisceaux électroniques de grande puissance

Publications (1)

Publication Number Publication Date
FR1372738A true FR1372738A (fr) 1964-09-18

Family

ID=25603636

Family Applications (1)

Application Number Title Priority Date Filing Date
FR946919A Expired FR1372738A (fr) 1962-09-08 1963-09-09 Appareil émetteur de faisceaux électroniques de grande puissance

Country Status (1)

Country Link
FR (1) FR1372738A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2205743A1 (fr) * 1972-10-09 1974-05-31 Sokolov Boris

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2205743A1 (fr) * 1972-10-09 1974-05-31 Sokolov Boris

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