AT238464B - Elektronenstrahlgerät hoher Leistung zum Erhitzen von Materialien unter Vakuum - Google Patents

Elektronenstrahlgerät hoher Leistung zum Erhitzen von Materialien unter Vakuum

Info

Publication number
AT238464B
AT238464B AT717762A AT717762A AT238464B AT 238464 B AT238464 B AT 238464B AT 717762 A AT717762 A AT 717762A AT 717762 A AT717762 A AT 717762A AT 238464 B AT238464 B AT 238464B
Authority
AT
Austria
Prior art keywords
electron beam
under vacuum
high power
beam device
materials under
Prior art date
Application number
AT717762A
Other languages
English (en)
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to AT717762A priority Critical patent/AT238464B/de
Priority to US302349A priority patent/US3308325A/en
Priority to CH1055663A priority patent/CH404018A/de
Priority to DEB73299A priority patent/DE1191054B/de
Priority to GB3437263A priority patent/GB982446A/en
Priority to FR946919A priority patent/FR1372738A/fr
Application granted granted Critical
Publication of AT238464B publication Critical patent/AT238464B/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/301—Arrangements enabling beams to pass between regions of different pressure

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
AT717762A 1962-09-08 1962-09-08 Elektronenstrahlgerät hoher Leistung zum Erhitzen von Materialien unter Vakuum AT238464B (de)

Priority Applications (6)

Application Number Priority Date Filing Date Title
AT717762A AT238464B (de) 1962-09-08 1962-09-08 Elektronenstrahlgerät hoher Leistung zum Erhitzen von Materialien unter Vakuum
US302349A US3308325A (en) 1962-09-08 1963-08-15 Electron beam tube with ion shield
CH1055663A CH404018A (de) 1962-09-08 1963-08-27 Elektronenstrahlgerät hoher Leistung
DEB73299A DE1191054B (de) 1962-09-08 1963-08-29 Elektronenstrahlgeraet hoher Leistung
GB3437263A GB982446A (en) 1962-09-08 1963-08-30 Improvements in and relating to high performance electron beam appliances
FR946919A FR1372738A (fr) 1962-09-08 1963-09-09 Appareil émetteur de faisceaux électroniques de grande puissance

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AT717762A AT238464B (de) 1962-09-08 1962-09-08 Elektronenstrahlgerät hoher Leistung zum Erhitzen von Materialien unter Vakuum

Publications (1)

Publication Number Publication Date
AT238464B true AT238464B (de) 1965-02-10

Family

ID=3593449

Family Applications (1)

Application Number Title Priority Date Filing Date
AT717762A AT238464B (de) 1962-09-08 1962-09-08 Elektronenstrahlgerät hoher Leistung zum Erhitzen von Materialien unter Vakuum

Country Status (3)

Country Link
AT (1) AT238464B (de)
CH (1) CH404018A (de)
GB (1) GB982446A (de)

Also Published As

Publication number Publication date
CH404018A (de) 1965-12-15
GB982446A (en) 1965-02-03

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