FR1354784A - Canon à électrons - Google Patents

Canon à électrons

Info

Publication number
FR1354784A
FR1354784A FR899323A FR899323A FR1354784A FR 1354784 A FR1354784 A FR 1354784A FR 899323 A FR899323 A FR 899323A FR 899323 A FR899323 A FR 899323A FR 1354784 A FR1354784 A FR 1354784A
Authority
FR
France
Prior art keywords
electron gun
gun
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR899323A
Other languages
English (en)
French (fr)
Inventor
P Thome
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to BE633078D priority Critical patent/BE633078A/xx
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR899323A priority patent/FR1354784A/fr
Priority to LU43749D priority patent/LU43749A1/xx
Priority to DE1963C0010512 priority patent/DE1876616U/de
Priority to GB2039963A priority patent/GB1020725A/en
Application granted granted Critical
Publication of FR1354784A publication Critical patent/FR1354784A/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00Electron-beam welding or cutting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/065Construction of guns or parts thereof
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06Electron sources; Electron guns
    • H01J37/075Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/18Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electron Sources, Ion Sources (AREA)
FR899323A 1962-05-30 1962-05-30 Canon à électrons Expired FR1354784A (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
BE633078D BE633078A (en, 2012) 1962-05-30
FR899323A FR1354784A (fr) 1962-05-30 1962-05-30 Canon à électrons
LU43749D LU43749A1 (en, 2012) 1962-05-30 1963-05-15
DE1963C0010512 DE1876616U (de) 1962-05-30 1963-05-17 Elektronen-kanone.
GB2039963A GB1020725A (en) 1962-05-30 1963-05-22 Apparatus for welding by electronic bombardment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR899323A FR1354784A (fr) 1962-05-30 1962-05-30 Canon à électrons

Publications (1)

Publication Number Publication Date
FR1354784A true FR1354784A (fr) 1964-03-13

Family

ID=8780121

Family Applications (1)

Application Number Title Priority Date Filing Date
FR899323A Expired FR1354784A (fr) 1962-05-30 1962-05-30 Canon à électrons

Country Status (5)

Country Link
BE (1) BE633078A (en, 2012)
DE (1) DE1876616U (en, 2012)
FR (1) FR1354784A (en, 2012)
GB (1) GB1020725A (en, 2012)
LU (1) LU43749A1 (en, 2012)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0473216A3 (en) * 1990-08-10 1992-03-11 Koninklijke Philips Electronics N.V. Charged particle beam device
EP0523699A1 (en) * 1991-07-18 1993-01-20 Hitachi, Ltd. Charged particle beam apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0473216A3 (en) * 1990-08-10 1992-03-11 Koninklijke Philips Electronics N.V. Charged particle beam device
EP0689225A1 (en) * 1990-08-10 1995-12-27 Koninklijke Philips Electronics N.V. Charged particle beam device
EP0523699A1 (en) * 1991-07-18 1993-01-20 Hitachi, Ltd. Charged particle beam apparatus
US5324950A (en) * 1991-07-18 1994-06-28 Hitachi, Ltd. Charged particle beam apparatus

Also Published As

Publication number Publication date
LU43749A1 (en, 2012) 1963-07-15
BE633078A (en, 2012)
GB1020725A (en) 1966-02-23
DE1876616U (de) 1963-08-01

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