FR1349083A - Perfectionnements aux appareillages pour faisceau d'électrons - Google Patents

Perfectionnements aux appareillages pour faisceau d'électrons

Info

Publication number
FR1349083A
FR1349083A FR18180A FR59018180A FR1349083A FR 1349083 A FR1349083 A FR 1349083A FR 18180 A FR18180 A FR 18180A FR 59018180 A FR59018180 A FR 59018180A FR 1349083 A FR1349083 A FR 1349083A
Authority
FR
France
Prior art keywords
electron beam
beam equipment
equipment
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR18180A
Other languages
English (en)
French (fr)
Inventor
William Charles Nixon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ELECTRON PHYSICAL INSTR Ltd
Original Assignee
ELECTRON PHYSICAL INSTR Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ELECTRON PHYSICAL INSTR Ltd filed Critical ELECTRON PHYSICAL INSTR Ltd
Application granted granted Critical
Publication of FR1349083A publication Critical patent/FR1349083A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/82—Mounting, supporting, spacing, or insulating electron-optical or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/16—Vessels; Containers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/3002—Details
    • H01J37/3005—Observing the objects or the point of impact on the object

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
FR18180A 1962-03-08 1963-03-07 Perfectionnements aux appareillages pour faisceau d'électrons Expired FR1349083A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB8940/62A GB1009601A (en) 1962-03-08 1962-03-08 Improvements in electron beam equipment

Publications (1)

Publication Number Publication Date
FR1349083A true FR1349083A (fr) 1964-01-10

Family

ID=9862258

Family Applications (1)

Application Number Title Priority Date Filing Date
FR18180A Expired FR1349083A (fr) 1962-03-08 1963-03-07 Perfectionnements aux appareillages pour faisceau d'électrons

Country Status (5)

Country Link
US (1) US3248542A (de)
DE (1) DE1253836B (de)
FR (1) FR1349083A (de)
GB (1) GB1009601A (de)
NL (1) NL289910A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2378348A1 (fr) * 1977-01-19 1978-08-18 Siemens Ag Lentille magnetique de grande distance focale pour former, au moyen d'un systeme optique a faisceau corpusculaire, l'image d'un objet de surface etendue

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3327114A (en) * 1964-06-23 1967-06-20 Alfred F Diorio Low-angle x-ray diffraction camera comprising releasably connected sections and adjustable beam apertures and stops
US3514596A (en) * 1967-10-17 1970-05-26 Picker Corp Spot filmer for x-ray radiographing which minimizes patient-to-film distance
US3814356A (en) * 1970-10-02 1974-06-04 J Coleman Electron microscope
US3809899A (en) * 1972-08-17 1974-05-07 Tektronix Inc Electron-beam tube including a thermionic-field emission cathode for a scanning electron microscope
US3872305A (en) * 1972-12-06 1975-03-18 Jeol Ltd Convertible scanning electron microscope
US5412211A (en) * 1993-07-30 1995-05-02 Electroscan Corporation Environmental scanning electron microscope
US5362964A (en) * 1993-07-30 1994-11-08 Electroscan Corporation Environmental scanning electron microscope
US20180182605A1 (en) * 2016-12-22 2018-06-28 Thermo Finnigan Llc Aligning ion optics by aperture sighting

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2319061A (en) * 1941-01-31 1943-05-11 Rca Corp Demountable electron gun
DE892491C (de) * 1941-03-18 1953-10-08 Aeg Zerlegbares mehrstufiges, aus mehreren Teilen bestehendes UEbermikroskop
US2405306A (en) * 1944-01-31 1946-08-06 Rca Corp Electronic microanalyzer monitoring
NL300306A (de) * 1955-06-14
US3080481A (en) * 1959-04-17 1963-03-05 Sprague Electric Co Method of making transistors

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2378348A1 (fr) * 1977-01-19 1978-08-18 Siemens Ag Lentille magnetique de grande distance focale pour former, au moyen d'un systeme optique a faisceau corpusculaire, l'image d'un objet de surface etendue

Also Published As

Publication number Publication date
GB1009601A (en) 1965-11-10
NL289910A (de)
DE1253836B (de) 1967-11-09
US3248542A (en) 1966-04-26

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