FR1326366A - Liquide décapant pour éléments semi-conducteurs - Google Patents
Liquide décapant pour éléments semi-conducteursInfo
- Publication number
- FR1326366A FR1326366A FR880042A FR880042A FR1326366A FR 1326366 A FR1326366 A FR 1326366A FR 880042 A FR880042 A FR 880042A FR 880042 A FR880042 A FR 880042A FR 1326366 A FR1326366 A FR 1326366A
- Authority
- FR
- France
- Prior art keywords
- semiconductor elements
- stripping liquid
- stripping
- liquid
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30604—Chemical etching
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR880042A FR1326366A (fr) | 1960-11-26 | 1961-11-24 | Liquide décapant pour éléments semi-conducteurs |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE1960S0071426 DE1246353B (de) | 1960-11-26 | 1960-11-26 | Verwendung eines die Viskositaet erhoehenden Mittels in einer AEtzfluessigkeit |
FR880042A FR1326366A (fr) | 1960-11-26 | 1961-11-24 | Liquide décapant pour éléments semi-conducteurs |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1326366A true FR1326366A (fr) | 1963-05-10 |
Family
ID=25996282
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR880042A Expired FR1326366A (fr) | 1960-11-26 | 1961-11-24 | Liquide décapant pour éléments semi-conducteurs |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1326366A (fr) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2527642A1 (fr) * | 1982-05-25 | 1983-12-02 | Cezus Co Europ Zirconium | Procede d'usinage chimique de metaux |
-
1961
- 1961-11-24 FR FR880042A patent/FR1326366A/fr not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2527642A1 (fr) * | 1982-05-25 | 1983-12-02 | Cezus Co Europ Zirconium | Procede d'usinage chimique de metaux |
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