FR1287273A - Method and apparatus for determining and measuring the thickness and resistivity of a semiconductor - Google Patents

Method and apparatus for determining and measuring the thickness and resistivity of a semiconductor

Info

Publication number
FR1287273A
FR1287273A FR860114A FR860114A FR1287273A FR 1287273 A FR1287273 A FR 1287273A FR 860114 A FR860114 A FR 860114A FR 860114 A FR860114 A FR 860114A FR 1287273 A FR1287273 A FR 1287273A
Authority
FR
France
Prior art keywords
resistivity
semiconductor
measuring
determining
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR860114A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Priority to FR860114A priority Critical patent/FR1287273A/en
Application granted granted Critical
Publication of FR1287273A publication Critical patent/FR1287273A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2831—Testing of materials or semi-finished products, e.g. semiconductor wafers or substrates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
FR860114A 1961-04-27 1961-04-27 Method and apparatus for determining and measuring the thickness and resistivity of a semiconductor Expired FR1287273A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR860114A FR1287273A (en) 1961-04-27 1961-04-27 Method and apparatus for determining and measuring the thickness and resistivity of a semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR860114A FR1287273A (en) 1961-04-27 1961-04-27 Method and apparatus for determining and measuring the thickness and resistivity of a semiconductor

Publications (1)

Publication Number Publication Date
FR1287273A true FR1287273A (en) 1962-03-09

Family

ID=8754003

Family Applications (1)

Application Number Title Priority Date Filing Date
FR860114A Expired FR1287273A (en) 1961-04-27 1961-04-27 Method and apparatus for determining and measuring the thickness and resistivity of a semiconductor

Country Status (1)

Country Link
FR (1) FR1287273A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1281563B (en) * 1965-06-18 1968-10-31 Eltro G M B H & Co Ges Fuer St Device for determining electrical and / or magnetic parameters of an electrically non-conductive material by measuring resonance with microwaves

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1281563B (en) * 1965-06-18 1968-10-31 Eltro G M B H & Co Ges Fuer St Device for determining electrical and / or magnetic parameters of an electrically non-conductive material by measuring resonance with microwaves

Similar Documents

Publication Publication Date Title
OA00985A (en) A method and apparatus for adjusting the position of a floating structure.
FR1221112A (en) Method and apparatus for the extrusion of visco-elastic materials
BE607916A (en) Method and apparatus for the manufacture of adiponitrile
FR1411331A (en) Method and apparatus for controlling the thickness of a coating
BE603001A (en) Method and apparatus for the measurement of resistivity and thickness of semiconductor materials.
FR1320021A (en) Improved method and apparatus for determining the position of electrically conductive elements
CH397618A (en) Method and apparatus for the manufacture of diphenyl
FR1287273A (en) Method and apparatus for determining and measuring the thickness and resistivity of a semiconductor
FR1312164A (en) Method and apparatus for determining the profile of a surface
FR1447909A (en) Apparatus and method for measuring the electrical properties of a semiconductor
BE602074A (en) Method and apparatus for measuring a quantity
FR1174798A (en) Method and apparatus for winding metal wires and the like
FR1283953A (en) Method and apparatus for improving thermoplastic films
FR1296207A (en) Method and apparatus for measuring the elongation of strips and the like
FR1358240A (en) Method and apparatus for determining the thickness of a coating
FR1123104A (en) Method and device for the manufacture of slips
FR1511142A (en) Improved method and apparatus for determining the silicon content of a metallic sample
FR1311472A (en) Method and apparatus for the manufacture of organochlorosilanes
FR1269743A (en) Advanced measuring device, in particular, for measuring the thickness of the coating of a cable
FR1483386A (en) Method and apparatus for reducing the thickness of a strip
FR1253531A (en) Method and apparatus for measuring variations in thickness of continuous threads
FR1294975A (en) Method and apparatus for the manufacture of thermoplastic pipes
FR1231102A (en) Method and apparatus for determining the presence of oxidizing agents
FR1290692A (en) Method and apparatus for the continuous measurement of the concentration of radioactive aerosols
BE618063A (en) Method and apparatus for the manufacture of firbro-cement articles