FR1251061A - Improved process for manufacturing semiconductor devices and product obtained by this process - Google Patents

Improved process for manufacturing semiconductor devices and product obtained by this process

Info

Publication number
FR1251061A
FR1251061A FR821140A FR821140A FR1251061A FR 1251061 A FR1251061 A FR 1251061A FR 821140 A FR821140 A FR 821140A FR 821140 A FR821140 A FR 821140A FR 1251061 A FR1251061 A FR 1251061A
Authority
FR
France
Prior art keywords
semiconductor devices
product obtained
manufacturing semiconductor
improved process
improved
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR821140A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US798648A external-priority patent/US3099588A/en
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Priority to FR821140A priority Critical patent/FR1251061A/en
Application granted granted Critical
Publication of FR1251061A publication Critical patent/FR1251061A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
FR821140A 1959-03-11 1960-03-11 Improved process for manufacturing semiconductor devices and product obtained by this process Expired FR1251061A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR821140A FR1251061A (en) 1959-03-11 1960-03-11 Improved process for manufacturing semiconductor devices and product obtained by this process

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US798648A US3099588A (en) 1959-03-11 1959-03-11 Formation of semiconductor transition regions by alloy vaporization and deposition
FR821140A FR1251061A (en) 1959-03-11 1960-03-11 Improved process for manufacturing semiconductor devices and product obtained by this process

Publications (1)

Publication Number Publication Date
FR1251061A true FR1251061A (en) 1961-01-13

Family

ID=26185274

Family Applications (1)

Application Number Title Priority Date Filing Date
FR821140A Expired FR1251061A (en) 1959-03-11 1960-03-11 Improved process for manufacturing semiconductor devices and product obtained by this process

Country Status (1)

Country Link
FR (1) FR1251061A (en)

Similar Documents

Publication Publication Date Title
FR1230860A (en) Process for manufacturing semiconductor devices
FR1359004A (en) Improved process for manufacturing semiconductor devices and products obtained
FR1221347A (en) Semiconductor device manufacturing process
FR1170559A (en) Semiconductor device manufacturing process
FR1129882A (en) Semiconductor device manufacturing process
CH387014A (en) Process for stabilizing mangnese ethylene bis-dithiocarbamate and product obtained by this process
FR1287279A (en) Semiconductor device manufacturing process
FR1197039A (en) Semiconductor device manufacturing process
FR1182331A (en) Semiconductor devices and their manufacturing process
BE591663A (en) Semiconductor device manufacturing process
FR1175846A (en) Process for manufacturing bags and bags obtained by this process
FR1251061A (en) Improved process for manufacturing semiconductor devices and product obtained by this process
FR1184331A (en) Semiconductor device manufacturing process
FR1399908A (en) Manufacturing process for tunnel diodes and product obtained by this process
FR1181195A (en) New manufacturing process for semiconductor devices
FR1179300A (en) Semiconductor device manufacturing process
FR1340318A (en) Manufacturing process of scrubbing devices and product obtained
FR1258408A (en) Process for manufacturing gelled resins and product obtained by this process
FR1289336A (en) Semiconductor device manufacturing process
FR1254365A (en) Continuous manufacturing process for semiconductor devices
FR1226703A (en) Manufacturing process for airtight containers
FR1294254A (en) Manufacturing process of dinitrobutylphenol and product obtained
FR1249631A (en) Semiconductor device manufacturing process
FR1251866A (en) Semiconductor device manufacturing process
FR75143E (en) Semiconductor device manufacturing process