FR1236327A - Procédé de purification du silane - Google Patents

Procédé de purification du silane

Info

Publication number
FR1236327A
FR1236327A FR805654A FR805654A FR1236327A FR 1236327 A FR1236327 A FR 1236327A FR 805654 A FR805654 A FR 805654A FR 805654 A FR805654 A FR 805654A FR 1236327 A FR1236327 A FR 1236327A
Authority
FR
France
Prior art keywords
purification process
silane purification
silane
purification
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR805654A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Union Carbide Corp
Original Assignee
Union Carbide Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Union Carbide Corp filed Critical Union Carbide Corp
Application granted granted Critical
Publication of FR1236327A publication Critical patent/FR1236327A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G1/00—X-ray apparatus involving X-ray tubes; Circuits therefor
    • H05G1/08—Electrical details
    • H05G1/26—Measuring, controlling or protecting
    • H05G1/30—Controlling
    • H05G1/32—Supply voltage of the X-ray apparatus or tube
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/04—Hydrides of silicon
    • C01B33/046—Purification
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Silicates, Zeolites, And Molecular Sieves (AREA)
  • Solid-Sorbent Or Filter-Aiding Compositions (AREA)
  • Silicon Compounds (AREA)
FR805654A 1958-09-24 1959-09-21 Procédé de purification du silane Expired FR1236327A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US762925A US3232702A (en) 1958-09-24 1958-09-24 Selective removal of boron compounds from silane

Publications (1)

Publication Number Publication Date
FR1236327A true FR1236327A (fr) 1960-07-15

Family

ID=25066417

Family Applications (1)

Application Number Title Priority Date Filing Date
FR805654A Expired FR1236327A (fr) 1958-09-24 1959-09-21 Procédé de purification du silane

Country Status (7)

Country Link
US (1) US3232702A (fr)
BE (1) BE582889A (fr)
CH (1) CH388277A (fr)
DE (1) DE1092893B (fr)
FR (1) FR1236327A (fr)
GB (1) GB899381A (fr)
NL (1) NL243675A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4099936A (en) * 1976-12-16 1978-07-11 Union Carbide Corporation Process for the purification of silane

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AT22307B (de) * 1905-04-04 1905-12-11 Kemna Fa J Zuführungsvorrichtung für Häckselmaschinen.
US2812235A (en) * 1955-09-16 1957-11-05 Bell Telephone Labor Inc Method of purifying volatile compounds of germanium and silicon
US2881234A (en) * 1955-10-07 1959-04-07 Standard Oil Co Catalytic process
US2931709A (en) * 1956-09-17 1960-04-05 Robert S Aries Decarburizing silicon tetrachloride

Also Published As

Publication number Publication date
NL243675A (fr)
DE1092893B (de) 1960-11-17
CH388277A (fr) 1965-02-28
US3232702A (en) 1966-02-01
BE582889A (fr)
GB899381A (en) 1962-06-20

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