FR1221434A - Pompe ionique à vaporisation - Google Patents

Pompe ionique à vaporisation

Info

Publication number
FR1221434A
FR1221434A FR790577A FR790577A FR1221434A FR 1221434 A FR1221434 A FR 1221434A FR 790577 A FR790577 A FR 790577A FR 790577 A FR790577 A FR 790577A FR 1221434 A FR1221434 A FR 1221434A
Authority
FR
France
Prior art keywords
ionic
vaporization pump
vaporization
pump
ionic vaporization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR790577A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WC Heraus GmbH and Co KG
Original Assignee
WC Heraus GmbH and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WC Heraus GmbH and Co KG filed Critical WC Heraus GmbH and Co KG
Application granted granted Critical
Publication of FR1221434A publication Critical patent/FR1221434A/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
    • H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
    • H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
FR790577A 1958-05-30 1959-03-27 Pompe ionique à vaporisation Expired FR1221434A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEH33442A DE1083485B (de) 1958-05-30 1958-05-30 Verdampfer-Ionenpumpe

Publications (1)

Publication Number Publication Date
FR1221434A true FR1221434A (fr) 1960-06-01

Family

ID=7152149

Family Applications (1)

Application Number Title Priority Date Filing Date
FR790577A Expired FR1221434A (fr) 1958-05-30 1959-03-27 Pompe ionique à vaporisation

Country Status (5)

Country Link
US (1) US3074621A (de)
CH (1) CH371212A (de)
DE (1) DE1083485B (de)
FR (1) FR1221434A (de)
GB (1) GB901468A (de)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3181775A (en) * 1962-03-20 1965-05-04 Wisconsin Alumni Res Found Pumping apparatus
US3251536A (en) * 1963-10-08 1966-05-17 Cons Vacuum Corp Getter-ion pumps
US3313474A (en) * 1964-08-04 1967-04-11 Cons Vacuum Corp Vaporized material source
US3352482A (en) * 1965-09-13 1967-11-14 Electro Optical Systems Inc Ion sputter pumping collector
US3377499A (en) * 1966-05-16 1968-04-09 Varian Associates Relatively large consumable pelletized getter source element for sublimation type getter vacuum pumps
US3383032A (en) * 1967-01-31 1968-05-14 Atomic Energy Commission Usa Vacuum pumping method and apparatus

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2727167A (en) * 1952-04-18 1955-12-13 Westinghouse Electric Corp Ion pump
US2796555A (en) * 1954-06-29 1957-06-18 High Voltage Engineering Corp High-vacuum pump
GB795551A (en) * 1955-09-27 1958-05-28 Ass Elect Ind Improvements relating to electron vacuum pumping systems
US2850225A (en) * 1955-11-10 1958-09-02 Wisconsin Alumni Res Found Pump

Also Published As

Publication number Publication date
GB901468A (en) 1962-07-18
CH371212A (de) 1963-08-15
DE1083485B (de) 1960-06-15
US3074621A (en) 1963-01-22

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