FR1196755A - Method and apparatus for metallization - Google Patents

Method and apparatus for metallization

Info

Publication number
FR1196755A
FR1196755A FR1196755DA FR1196755A FR 1196755 A FR1196755 A FR 1196755A FR 1196755D A FR1196755D A FR 1196755DA FR 1196755 A FR1196755 A FR 1196755A
Authority
FR
France
Prior art keywords
metallization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
COMMONWEALT ENGINEERING CY
Original Assignee
COMMONWEALT ENGINEERING CY
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by COMMONWEALT ENGINEERING CY filed Critical COMMONWEALT ENGINEERING CY
Application granted granted Critical
Publication of FR1196755A publication Critical patent/FR1196755A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
    • C23C16/20—Deposition of aluminium only

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR1196755D 1958-06-07 1958-06-07 Method and apparatus for metallization Expired FR1196755A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1196755T 1958-06-07

Publications (1)

Publication Number Publication Date
FR1196755A true FR1196755A (en) 1959-11-26

Family

ID=9669379

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1196755D Expired FR1196755A (en) 1958-06-07 1958-06-07 Method and apparatus for metallization

Country Status (1)

Country Link
FR (1) FR1196755A (en)

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