FR1196755A - Method and apparatus for metallization - Google Patents
Method and apparatus for metallizationInfo
- Publication number
- FR1196755A FR1196755A FR1196755DA FR1196755A FR 1196755 A FR1196755 A FR 1196755A FR 1196755D A FR1196755D A FR 1196755DA FR 1196755 A FR1196755 A FR 1196755A
- Authority
- FR
- France
- Prior art keywords
- metallization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
- C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds
- C23C16/20—Deposition of aluminium only
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1196755T | 1958-06-07 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1196755A true FR1196755A (en) | 1959-11-26 |
Family
ID=9669379
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1196755D Expired FR1196755A (en) | 1958-06-07 | 1958-06-07 | Method and apparatus for metallization |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR1196755A (en) |
-
1958
- 1958-06-07 FR FR1196755D patent/FR1196755A/en not_active Expired
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