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Metropolitan Vickers Electrical Co Ltd
Original Assignee
Metropolitan Vickers Electrical Co Ltd
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Filing date
Publication date
Application filed by Metropolitan Vickers Electrical Co LtdfiledCriticalMetropolitan Vickers Electrical Co Ltd
Application grantedgrantedCritical
Publication of FR1152968ApublicationCriticalpatent/FR1152968A/fr
H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
H01J37/3002—Details
H01J37/3007—Electron or ion-optical systems
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Chemical & Material Sciences
(AREA)
Analytical Chemistry
(AREA)
FR1152968D1955-06-081956-06-06Traitement de produits par bombardement électronique
ExpiredFR1152968A
(fr)