FI982832A - Piimikromekaaninen vaaka - Google Patents
Piimikromekaaninen vaaka Download PDFInfo
- Publication number
- FI982832A FI982832A FI982832A FI982832A FI982832A FI 982832 A FI982832 A FI 982832A FI 982832 A FI982832 A FI 982832A FI 982832 A FI982832 A FI 982832A FI 982832 A FI982832 A FI 982832A
- Authority
- FI
- Finland
- Prior art keywords
- wave
- silicon micromechanical
- micromechanical
- silicon
- micromechanical wave
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G3/00—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances
- G01G3/12—Weighing apparatus characterised by the use of elastically-deformable members, e.g. spring balances wherein the weighing element is in the form of a solid body stressed by pressure or tension during weighing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01G—WEIGHING
- G01G7/00—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups
- G01G7/06—Weighing apparatus wherein the balancing is effected by magnetic, electromagnetic, or electrostatic action, or by means not provided for in the preceding groups by electrostatic action
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Pressure Sensors (AREA)
- Gyroscopes (AREA)
- Micromachines (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI982832A FI105237B (fi) | 1998-06-24 | 1998-12-30 | Piimikromekaaninen vaaka |
PCT/FI1999/000538 WO1999067605A1 (en) | 1998-06-24 | 1999-06-18 | Micromechanical precision silicon scale |
US09/720,112 US6513388B1 (en) | 1998-06-24 | 1999-06-18 | Micromechanical precision silicon scale |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI981458A FI981458A0 (fi) | 1998-06-24 | 1998-06-24 | Piimikromekaaninen vaaka |
FI981458 | 1998-06-24 | ||
FI982832 | 1998-12-30 | ||
FI982832A FI105237B (fi) | 1998-06-24 | 1998-12-30 | Piimikromekaaninen vaaka |
Publications (3)
Publication Number | Publication Date |
---|---|
FI982832A0 FI982832A0 (fi) | 1998-12-30 |
FI982832A true FI982832A (fi) | 1999-12-25 |
FI105237B FI105237B (fi) | 2000-06-30 |
Family
ID=26160609
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI982832A FI105237B (fi) | 1998-06-24 | 1998-12-30 | Piimikromekaaninen vaaka |
Country Status (3)
Country | Link |
---|---|
US (1) | US6513388B1 (fi) |
FI (1) | FI105237B (fi) |
WO (1) | WO1999067605A1 (fi) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101199050A (zh) * | 2004-09-29 | 2008-06-11 | 北极星传感器公司 | 通过电容技术感测间隙变化 |
US20090120198A1 (en) * | 2005-09-28 | 2009-05-14 | Dallenbach William D | Gap-change sensing through capacitive techniques |
US7343814B2 (en) * | 2006-04-03 | 2008-03-18 | Loadstar Sensors, Inc. | Multi-zone capacitive force sensing device and methods |
ITBO20080516A1 (it) * | 2008-08-07 | 2010-02-08 | Sortron S R L | Dispositivo per misurare il peso di un oggetto |
CN103207004B (zh) * | 2013-04-12 | 2015-11-25 | 昆山禾信质谱技术有限公司 | 基于微振荡法测量颗粒物质量的装置 |
US9645029B2 (en) * | 2014-04-07 | 2017-05-09 | Infineon Technology Ag | Force feedback loop for pressure sensors |
CN106500652B (zh) * | 2016-11-14 | 2019-08-06 | 河海大学 | 一种随动多点接触式环向应变测量装置 |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CH662181A5 (de) * | 1983-09-16 | 1987-09-15 | Mettler Instrumente Ag | Kraftmesser. |
NL8500139A (nl) * | 1985-01-21 | 1986-08-18 | Advanced Micro Electronic | Capacitief weegtoestel. |
US4738324A (en) * | 1987-02-24 | 1988-04-19 | Borchard John S | Self-adjusting weighing system |
US4960177A (en) | 1988-06-03 | 1990-10-02 | University Of Hawaii | Silicon membrane micro-scale |
US5473945A (en) * | 1990-02-14 | 1995-12-12 | The Charles Stark Draper Laboratory, Inc. | Micromechanical angular accelerometer with auxiliary linear accelerometer |
US5291534A (en) * | 1991-06-22 | 1994-03-01 | Toyoda Koki Kabushiki Kaisha | Capacitive sensing device |
FI93579C (fi) * | 1993-08-20 | 1995-04-25 | Vaisala Oy | Sähköstaattisen voiman avulla takaisinkytketty kapasitiivinen anturi ja menetelmä sen aktiivisen elementin muodon ohjaamiseksi |
FI93580C (fi) * | 1993-10-08 | 1995-04-25 | Vaisala Oy | Menetelmä ja laitteisto epäsymmetrisen paine-eroanturin takaisinkytkemiseksi |
US5684276A (en) | 1995-12-12 | 1997-11-04 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Micromechanical oscillating mass balance |
EP0967468A1 (en) * | 1998-06-26 | 1999-12-29 | Bossard AG | Capacitive force sensor |
-
1998
- 1998-12-30 FI FI982832A patent/FI105237B/fi not_active IP Right Cessation
-
1999
- 1999-06-18 WO PCT/FI1999/000538 patent/WO1999067605A1/en active Application Filing
- 1999-06-18 US US09/720,112 patent/US6513388B1/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
US6513388B1 (en) | 2003-02-04 |
WO1999067605A1 (en) | 1999-12-29 |
FI105237B (fi) | 2000-06-30 |
FI982832A0 (fi) | 1998-12-30 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE69720663D1 (de) | Mikromechanische Geräte | |
DE69508160D1 (de) | Verbesserte mikromechanische Geräte | |
DE69524816D1 (de) | Verbesserte mikromechanische Geräte | |
DK0973012T3 (da) | Transducer | |
DE59805809D1 (de) | Feder-massen-schwingkraftkoppler | |
DE69918109D1 (de) | Haarwaschmittel | |
NO20004921D0 (no) | Akustisk innretning | |
DE69835071D1 (de) | Selbstanordnende mikromechanische Einrichtung | |
DE69918733D1 (de) | Zentrifugalverdampfer | |
DE69932507D1 (de) | Akustisches gerät | |
DE69835748D1 (de) | Akustisches pyrometer | |
NO994500D0 (no) | Transducer | |
DE60041741D1 (de) | Temperaturkompensierte mikroelektromechanische strukturen | |
DE69901430D1 (de) | Zentriereinrichtung | |
DE69911167D1 (de) | Befestigungsvorrichtung | |
ID24221A (id) | Tempat patrum | |
FI103747B1 (fi) | Värähtelymuunninyksikkö | |
DE19983670T1 (de) | Vibratoranordnung | |
DK0969233T3 (da) | Strömningsbegrænser | |
ID28032A (id) | TRISIKLIK PIPERIDIN-Δ3-SEBAGAI ANTAGONIS-α2 | |
FI982832A (fi) | Piimikromekaaninen vaaka | |
DE59912793D1 (de) | Schwingungsdämpfer | |
DE69917374D1 (de) | Wegaufnehmer | |
DE59904420D1 (de) | Zentrifugaldüngerstreuer | |
DE59915259D1 (de) | Zentrifugaldüngerstreuer |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MA | Patent expired |