DE69917374D1 - Wegaufnehmer - Google Patents

Wegaufnehmer

Info

Publication number
DE69917374D1
DE69917374D1 DE69917374T DE69917374T DE69917374D1 DE 69917374 D1 DE69917374 D1 DE 69917374D1 DE 69917374 T DE69917374 T DE 69917374T DE 69917374 T DE69917374 T DE 69917374T DE 69917374 D1 DE69917374 D1 DE 69917374D1
Authority
DE
Germany
Prior art keywords
transducer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69917374T
Other languages
English (en)
Other versions
DE69917374T2 (de
Inventor
Makato Takamiya
Hidejiro Kadowaki
Kou Ishizuka
Yasushi Kaneda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Application granted granted Critical
Publication of DE69917374D1 publication Critical patent/DE69917374D1/de
Publication of DE69917374T2 publication Critical patent/DE69917374T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/50—Systems of measurement based on relative movement of target
    • G01S17/58—Velocity or trajectory determination systems; Sense-of-movement determination systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P3/00—Measuring linear or angular speed; Measuring differences of linear or angular speeds
    • G01P3/36—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light
    • G01P3/366—Devices characterised by the use of optical means, e.g. using infrared, visible, or ultraviolet light by using diffraction of light

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Power Engineering (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Optical Transform (AREA)
DE69917374T 1998-06-16 1999-06-15 Wegaufnehmer Expired - Lifetime DE69917374T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP18567998A JP3937596B2 (ja) 1998-06-16 1998-06-16 変位情報測定装置
JP18567998 1998-06-16

Publications (2)

Publication Number Publication Date
DE69917374D1 true DE69917374D1 (de) 2004-06-24
DE69917374T2 DE69917374T2 (de) 2005-03-17

Family

ID=16174981

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69917374T Expired - Lifetime DE69917374T2 (de) 1998-06-16 1999-06-15 Wegaufnehmer

Country Status (4)

Country Link
US (1) US6259531B1 (de)
EP (1) EP0965843B1 (de)
JP (1) JP3937596B2 (de)
DE (1) DE69917374T2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1028309B1 (de) * 1999-02-04 2003-04-16 Dr. Johannes Heidenhain GmbH Optische Positionsmesseinrichtung
US7012691B2 (en) * 2002-08-06 2006-03-14 Sharp Kabushiki Kaisha Optical moving information measuring apparatus and carrier system incorporating the same
US7295315B2 (en) * 2003-06-30 2007-11-13 Kenneth C. Johnson Focus and alignment sensors and methods for use with scanning microlens-array printer
JP4789511B2 (ja) * 2004-06-04 2011-10-12 キヤノン株式会社 状況モニタリング装置及び状況モニタリングシステム
WO2008030681A2 (en) 2006-09-08 2008-03-13 Gsi Group Corporation Interferometric position encoder employing spatial filtering of diffraction orders
DE102014211004A1 (de) * 2014-06-10 2015-12-17 Dr. Johannes Heidenhain Gmbh Optische Positionsmesseinrichtung
CN111174680B (zh) * 2020-02-10 2021-08-03 覃高杰 一种传感器及传感器多点变形同步检测方法
KR20220152679A (ko) * 2021-05-10 2022-11-17 엘지이노텍 주식회사 거리 측정 카메라 모듈

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60243583A (ja) 1984-05-18 1985-12-03 Canon Inc レ−ザドツプラ速度計
JPS62154623A (ja) 1985-12-27 1987-07-09 Hitachi Ltd 半導体露光装置
JPH01232214A (ja) 1988-03-11 1989-09-18 Canon Inc エンコーダ
US5066130A (en) 1988-05-10 1991-11-19 Canon Kabushiki Kaisha Displacement measuring apparatus
JP2649390B2 (ja) 1988-10-12 1997-09-03 キヤノン株式会社 信号内挿回路
US5021649A (en) 1989-03-28 1991-06-04 Canon Kabushiki Kaisha Relief diffraction grating encoder
JP2962819B2 (ja) 1990-11-30 1999-10-12 キヤノン株式会社 変位測定装置
US5204516A (en) 1991-04-23 1993-04-20 U.S. Philips Corporation Planar optical scanning head having deficiency-correcting grating
BE1007513A3 (nl) 1993-09-13 1995-07-18 Philips Electronics Nv Meetinrichting voor het bepalen van de verplaatsing van een beweegbaar voorwerp.
JP3028716B2 (ja) * 1993-09-29 2000-04-04 キヤノン株式会社 光学式変位センサ

Also Published As

Publication number Publication date
JP3937596B2 (ja) 2007-06-27
EP0965843A1 (de) 1999-12-22
JP2000002510A (ja) 2000-01-07
DE69917374T2 (de) 2005-03-17
US6259531B1 (en) 2001-07-10
EP0965843B1 (de) 2004-05-19

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Legal Events

Date Code Title Description
8381 Inventor (new situation)

Inventor name: TAKAMIYA, MAKOTO, OHTA-KU, TOKYO, JP

Inventor name: KADOWAKI, HIDEJIRO, OHTA-KU, TOKYO, JP

Inventor name: ISHIZUKA, KOU, OHTA-KU, TOKYO, JP

Inventor name: KANEDA, YASUSHI, OHTA-KU, TOKYO, JP

8364 No opposition during term of opposition