FI963976A - Electrically adjustable optical filter - Google Patents

Electrically adjustable optical filter Download PDF

Info

Publication number
FI963976A
FI963976A FI963976A FI963976A FI963976A FI 963976 A FI963976 A FI 963976A FI 963976 A FI963976 A FI 963976A FI 963976 A FI963976 A FI 963976A FI 963976 A FI963976 A FI 963976A
Authority
FI
Finland
Prior art keywords
optical filter
adjustable optical
electrically adjustable
electrically
filter
Prior art date
Application number
FI963976A
Other languages
Finnish (fi)
Swedish (sv)
Other versions
FI108581B (en
FI963976A0 (en
Inventor
Ari Lehto
Martti Bolmberg
Altti Torkkeli
Original Assignee
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valtion Teknillinen filed Critical Valtion Teknillinen
Priority to FI963976A priority Critical patent/FI108581B/en
Publication of FI963976A0 publication Critical patent/FI963976A0/en
Priority to EP97942986A priority patent/EP0929830A1/en
Priority to JP51626898A priority patent/JP2001525075A/en
Priority to AU44626/97A priority patent/AU4462697A/en
Priority to PCT/FI1997/000600 priority patent/WO1998014804A1/en
Publication of FI963976A publication Critical patent/FI963976A/en
Application granted granted Critical
Publication of FI108581B publication Critical patent/FI108581B/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/284—Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Spectrometry And Color Measurement (AREA)
FI963976A 1996-10-03 1996-10-03 Electrically adjustable optical filter FI108581B (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FI963976A FI108581B (en) 1996-10-03 1996-10-03 Electrically adjustable optical filter
EP97942986A EP0929830A1 (en) 1996-10-03 1997-10-03 Electrically adjustable optical filter
JP51626898A JP2001525075A (en) 1996-10-03 1997-10-03 Electrically adjustable optical filters
AU44626/97A AU4462697A (en) 1996-10-03 1997-10-03 Electrically adjustable optical filter
PCT/FI1997/000600 WO1998014804A1 (en) 1996-10-03 1997-10-03 Electrically adjustable optical filter

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI963976 1996-10-03
FI963976A FI108581B (en) 1996-10-03 1996-10-03 Electrically adjustable optical filter

Publications (3)

Publication Number Publication Date
FI963976A0 FI963976A0 (en) 1996-10-03
FI963976A true FI963976A (en) 1998-04-04
FI108581B FI108581B (en) 2002-02-15

Family

ID=8546805

Family Applications (1)

Application Number Title Priority Date Filing Date
FI963976A FI108581B (en) 1996-10-03 1996-10-03 Electrically adjustable optical filter

Country Status (5)

Country Link
EP (1) EP0929830A1 (en)
JP (1) JP2001525075A (en)
AU (1) AU4462697A (en)
FI (1) FI108581B (en)
WO (1) WO1998014804A1 (en)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ES2119712B1 (en) * 1996-12-17 1999-05-16 Consejo Superior Investigacion MICROFABRICATED OPTICAL DEVICE AND PROCEDURE FOR THE DETECTION OF ABSORPTION / EMISSION BANDS IN THE INFRARED.
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
WO1999052006A2 (en) 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
FI981456A0 (en) 1998-06-24 1998-06-24 Valtion Teknillinen Method for electrically controlling the distance between micromechanical electrodes
FR2820513B1 (en) * 2001-02-05 2004-05-21 Centre Nat Rech Scient OPTOELECTRONIC DEVICE WITH WAVELENGTH FILTERING BY CAVITY COUPLING
JP4720022B2 (en) * 2001-05-30 2011-07-13 ソニー株式会社 OPTICAL MULTILAYER STRUCTURE, ITS MANUFACTURING METHOD, OPTICAL SWITCHING DEVICE, AND IMAGE DISPLAY DEVICE
WO2003001251A1 (en) * 2001-06-25 2003-01-03 Massachusetts Institute Of Technology Air gaps for optical applications
JP4736282B2 (en) * 2001-09-05 2011-07-27 ソニー株式会社 Thin film optical device
AU2002225061A1 (en) * 2001-12-21 2003-07-15 Nokia Corporation Reflective flat panel display
US7370185B2 (en) * 2003-04-30 2008-05-06 Hewlett-Packard Development Company, L.P. Self-packaged optical interference display device having anti-stiction bumps, integral micro-lens, and reflection-absorbing layers
JP4383194B2 (en) * 2004-02-03 2009-12-16 古河電気工業株式会社 Dielectric multilayer filter having predetermined wavelength optical characteristics, design method thereof, design program thereof, and optical add / drop system using the dielectric multilayer filter
DE102004013851B4 (en) * 2004-03-20 2021-06-17 Robert Bosch Gmbh Process for the production of an interference filter from alternating air-semiconductor layer systems as well as an infrared filter produced with the process
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7372613B2 (en) * 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
NO20051850A (en) 2005-04-15 2006-09-25 Sinvent As Infrared detection of gas - diffractive.
EP2495212A3 (en) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
EP1910218A1 (en) 2005-07-22 2008-04-16 Qualcomm Mems Technologies, Inc. Mems devices having support structures and methods of fabricating the same
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
WO2009013230A1 (en) 2007-07-23 2009-01-29 Carl Zeiss Smt Ag Optical system of a microlithographic projection exposure apparatus
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
US7944604B2 (en) 2008-03-07 2011-05-17 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
DE102008045504B4 (en) 2008-09-03 2011-05-05 Gottfried Wilhelm Leibniz Universität Hannover Optical sensor with a photoelectric scanning sensor and method for scanning image sections
WO2010138765A1 (en) 2009-05-29 2010-12-02 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
JP5625614B2 (en) 2010-08-20 2014-11-19 セイコーエプソン株式会社 Optical filter, optical filter module, spectrophotometer and optical instrument
US9057872B2 (en) 2010-08-31 2015-06-16 Qualcomm Mems Technologies, Inc. Dielectric enhanced mirror for IMOD display
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8736939B2 (en) 2011-11-04 2014-05-27 Qualcomm Mems Technologies, Inc. Matching layer thin-films for an electromechanical systems reflective display device
US8995043B2 (en) 2011-11-29 2015-03-31 Qualcomm Mems Technologies, Inc. Interferometric modulator with dual absorbing layers
US9041751B2 (en) 2012-11-01 2015-05-26 Qualcomm Mems Technologies, Inc. Electromechanical systems display device including a movable absorber and a movable reflector assembly
JP6390090B2 (en) 2013-11-19 2018-09-19 セイコーエプソン株式会社 Optical filter device, optical module, and electronic apparatus
CN107240647B (en) * 2017-06-05 2018-10-23 京东方科技集团股份有限公司 A kind of organic light emitting diode device, lamps and lanterns
JP7200658B2 (en) * 2018-09-27 2023-01-10 セイコーエプソン株式会社 optical devices and electronic devices

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345328A (en) * 1992-08-12 1994-09-06 Sandia Corporation Tandem resonator reflectance modulator
FI94804C (en) * 1994-02-17 1995-10-25 Vaisala Oy Electrically adjustable surface micromechanical Fabry-Perot interferometer for optical material analysis

Also Published As

Publication number Publication date
WO1998014804A1 (en) 1998-04-09
EP0929830A1 (en) 1999-07-21
AU4462697A (en) 1998-04-24
JP2001525075A (en) 2001-12-04
FI108581B (en) 2002-02-15
FI963976A0 (en) 1996-10-03

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