AU4462697A - Electrically adjustable optical filter - Google Patents

Electrically adjustable optical filter

Info

Publication number
AU4462697A
AU4462697A AU44626/97A AU4462697A AU4462697A AU 4462697 A AU4462697 A AU 4462697A AU 44626/97 A AU44626/97 A AU 44626/97A AU 4462697 A AU4462697 A AU 4462697A AU 4462697 A AU4462697 A AU 4462697A
Authority
AU
Australia
Prior art keywords
optical filter
adjustable optical
electrically adjustable
electrically
filter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU44626/97A
Inventor
Martti Blomberg
Ari Lehto
Altti Torkkeli
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Valtion Teknillinen Tutkimuskeskus
Vaisala Oy
Original Assignee
Valtion Teknillinen Tutkimuskeskus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FI963976A priority Critical patent/FI108581B/en
Priority to FI963976 priority
Application filed by Valtion Teknillinen Tutkimuskeskus filed Critical Valtion Teknillinen Tutkimuskeskus
Priority to PCT/FI1997/000600 priority patent/WO1998014804A1/en
Publication of AU4462697A publication Critical patent/AU4462697A/en
Application status is Abandoned legal-status Critical

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • G02B26/001Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating based on interference in an adjustable optical cavity
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B26/00Optical devices or arrangements using movable or deformable optical elements for controlling the intensity, colour, phase, polarisation or direction of light, e.g. switching, gating, modulating
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/28Interference filters
    • G02B5/284Interference filters of etalon type comprising a resonant cavity other than a thin solid film, e.g. gas, air, solid plates
AU44626/97A 1996-10-03 1997-10-03 Electrically adjustable optical filter Abandoned AU4462697A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FI963976A FI108581B (en) 1996-10-03 1996-10-03 The electrically adjustable optical filter
FI963976 1996-10-03
PCT/FI1997/000600 WO1998014804A1 (en) 1996-10-03 1997-10-03 Electrically adjustable optical filter

Publications (1)

Publication Number Publication Date
AU4462697A true AU4462697A (en) 1998-04-24

Family

ID=8546805

Family Applications (1)

Application Number Title Priority Date Filing Date
AU44626/97A Abandoned AU4462697A (en) 1996-10-03 1997-10-03 Electrically adjustable optical filter

Country Status (5)

Country Link
EP (1) EP0929830A1 (en)
JP (1) JP2001525075A (en)
AU (1) AU4462697A (en)
FI (1) FI108581B (en)
WO (1) WO1998014804A1 (en)

Families Citing this family (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999052006A2 (en) 1998-04-08 1999-10-14 Etalon, Inc. Interferometric modulation of radiation
US8928967B2 (en) 1998-04-08 2015-01-06 Qualcomm Mems Technologies, Inc. Method and device for modulating light
ES2119712B1 (en) * 1996-12-17 1999-05-16 Consejo Superior Investigacion Procedure and optical microfabricated device for detection of absorption bands / emission in infrared.
FI981456A0 (en) * 1998-06-24 1998-06-24 Valtion Teknillinen Method for electrically adjusting the distance between the electrodes of micromechanical
FR2820513B1 (en) * 2001-02-05 2004-05-21 Centre Nat Rech Scient Optoelectronics device a wavelength filter by coupling cavities
JP4720022B2 (en) * 2001-05-30 2011-07-13 ソニー株式会社 Optical multilayer structure and a manufacturing method thereof, an optical switching device, and image display device
WO2003001251A1 (en) 2001-06-25 2003-01-03 Massachusetts Institute Of Technology Air gaps for optical applications
JP4736282B2 (en) * 2001-09-05 2011-07-27 ソニー株式会社 Thin film optical device
WO2003056367A1 (en) * 2001-12-21 2003-07-10 Nokia Corporation Reflective flat panel display
US7944599B2 (en) 2004-09-27 2011-05-17 Qualcomm Mems Technologies, Inc. Electromechanical device with optical function separated from mechanical and electrical function
US7583429B2 (en) 2004-09-27 2009-09-01 Idc, Llc Ornamental display device
US7372613B2 (en) 2004-09-27 2008-05-13 Idc, Llc Method and device for multistate interferometric light modulation
US7420725B2 (en) 2004-09-27 2008-09-02 Idc, Llc Device having a conductive light absorbing mask and method for fabricating same
US7289259B2 (en) 2004-09-27 2007-10-30 Idc, Llc Conductive bus structure for interferometric modulator array
NO322368B1 (en) 2005-04-15 2006-09-25 Sinvent As Infrared detection of gas - diffractive.
EP2495212A3 (en) * 2005-07-22 2012-10-31 QUALCOMM MEMS Technologies, Inc. Mems devices having support structures and methods of fabricating the same
KR101375337B1 (en) 2005-07-22 2014-03-18 퀄컴 엠이엠에스 테크놀로지스, 인크. Electomechanical devices having support structures and methods of fabricating the same
US7916980B2 (en) 2006-01-13 2011-03-29 Qualcomm Mems Technologies, Inc. Interconnect structure for MEMS device
US7527998B2 (en) 2006-06-30 2009-05-05 Qualcomm Mems Technologies, Inc. Method of manufacturing MEMS devices providing air gap control
JP5224218B2 (en) 2007-07-23 2013-07-03 カール・ツァイス・エスエムティー・ゲーエムベーハー The optical system of a microlithographic projection exposure apparatus
US8941631B2 (en) 2007-11-16 2015-01-27 Qualcomm Mems Technologies, Inc. Simultaneous light collection and illumination on an active display
US7944604B2 (en) 2008-03-07 2011-05-17 Qualcomm Mems Technologies, Inc. Interferometric modulator in transmission mode
DE102008045504B4 (en) 2008-09-03 2011-05-05 Gottfried Wilhelm Leibniz Universität Hannover Optical sensor with a photoelectric image scanning sensor and method for scanning image excerpts
EP2435868A1 (en) 2009-05-29 2012-04-04 Qualcomm Mems Technologies, Inc. Illumination devices and methods of fabrication thereof
JP5625614B2 (en) 2010-08-20 2014-11-19 セイコーエプソン株式会社 Light filters, optical filter module, the spectrometer and the optical device
US9057872B2 (en) 2010-08-31 2015-06-16 Qualcomm Mems Technologies, Inc. Dielectric enhanced mirror for IMOD display
US9134527B2 (en) 2011-04-04 2015-09-15 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8963159B2 (en) 2011-04-04 2015-02-24 Qualcomm Mems Technologies, Inc. Pixel via and methods of forming the same
US8736939B2 (en) 2011-11-04 2014-05-27 Qualcomm Mems Technologies, Inc. Matching layer thin-films for an electromechanical systems reflective display device
US8995043B2 (en) 2011-11-29 2015-03-31 Qualcomm Mems Technologies, Inc. Interferometric modulator with dual absorbing layers
US9041751B2 (en) 2012-11-01 2015-05-26 Qualcomm Mems Technologies, Inc. Electromechanical systems display device including a movable absorber and a movable reflector assembly
JP6390090B2 (en) * 2013-11-19 2018-09-19 セイコーエプソン株式会社 Optical filter device, an optical module, and an electronic apparatus
CN107240647B (en) * 2017-06-05 2018-10-23 京东方科技集团股份有限公司 An organic light emitting diode device, lamp

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5345328A (en) * 1992-08-12 1994-09-06 Sandia Corporation Tandem resonator reflectance modulator
FI94804C (en) * 1994-02-17 1995-10-25 Vaisala Oy The electrically adjustable surface micromechanical Fabry-Perot interferometer for use in optical material analysis

Also Published As

Publication number Publication date
WO1998014804A1 (en) 1998-04-09
FI963976A0 (en) 1996-10-03
EP0929830A1 (en) 1999-07-21
FI963976D0 (en)
FI108581B1 (en)
FI963976A (en) 1998-04-04
FI108581B (en) 2002-02-15
JP2001525075A (en) 2001-12-04

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