FI910568L - Foerfarande foer undersoekning av fysikaliska egenskaper hos tunna skikt. - Google Patents

Foerfarande foer undersoekning av fysikaliska egenskaper hos tunna skikt. Download PDF

Info

Publication number
FI910568L
FI910568L FI910568A FI910568A FI910568L FI 910568 L FI910568 L FI 910568L FI 910568 A FI910568 A FI 910568A FI 910568 A FI910568 A FI 910568A FI 910568 L FI910568 L FI 910568L
Authority
FI
Finland
Prior art keywords
undersoekning
tunna
skikt
physical
foerfarande foer
Prior art date
Application number
FI910568A
Other languages
English (en)
Other versions
FI910568A0 (fi
FI910568A7 (fi
Inventor
Wolfgang Knoll
Harald Knobloch
Original Assignee
Basf Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Basf Ag filed Critical Basf Ag
Publication of FI910568A0 publication Critical patent/FI910568A0/fi
Publication of FI910568L publication Critical patent/FI910568L/fi
Publication of FI910568A7 publication Critical patent/FI910568A7/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering
    • G01N21/658—Raman scattering enhancement Raman, e.g. surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G01N21/552—Attenuated total reflection
    • G01N21/553—Attenuated total reflection and using surface plasmons
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method

Landscapes

  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
FI910568A 1990-02-10 1991-02-06 Menetelmä ohuiden kerrosten fysikaalisten ominaisuuksien tutkimiseksi FI910568A7 (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4004088A DE4004088A1 (de) 1990-02-10 1990-02-10 Verfahren zur untersuchung physikalischer eigenschaften duenner schichten

Publications (3)

Publication Number Publication Date
FI910568A0 FI910568A0 (fi) 1991-02-06
FI910568L true FI910568L (fi) 1991-08-11
FI910568A7 FI910568A7 (fi) 1991-08-11

Family

ID=6399864

Family Applications (1)

Application Number Title Priority Date Filing Date
FI910568A FI910568A7 (fi) 1990-02-10 1991-02-06 Menetelmä ohuiden kerrosten fysikaalisten ominaisuuksien tutkimiseksi

Country Status (8)

Country Link
US (1) US5116121A (fi)
EP (1) EP0445520A1 (fi)
JP (1) JPH0560692A (fi)
KR (1) KR910015849A (fi)
AU (1) AU636005B2 (fi)
CA (1) CA2035686A1 (fi)
DE (1) DE4004088A1 (fi)
FI (1) FI910568A7 (fi)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8916764D0 (en) * 1989-07-21 1989-09-06 Sambles John R Surface plasmon optical sensor
GB2248497B (en) * 1990-09-26 1994-05-25 Marconi Gec Ltd An optical sensor
DE19630538A1 (de) * 1996-07-29 1998-02-05 Rossendorf Forschzent Kompositmaterial zur Resonanzverstärkung optischer Signale und Verfahren zu dessen Herstellung
US5991488A (en) * 1996-11-08 1999-11-23 The Arizona Board Of Regents On Behalf Of The University Of Arizona Coupled plasmon-waveguide resonance spectroscopic device and method for measuring film properties
US6330387B1 (en) 1996-11-08 2001-12-11 The Arizona Board Of Regents On Behalf Of The University Of Arizona Coupled plasmon-waveguide resonance spectroscopic device and method for measuring film properties in the ultraviolet and infrared spectral ranges
US6124928A (en) * 1997-03-07 2000-09-26 Kaiser Optical Systems, Inc. Methods and apparatus for obtaining a selectively polarized induced emission
US6038525A (en) * 1997-04-30 2000-03-14 Southwest Research Institute Process control for pulsed laser deposition using raman spectroscopy
US6453264B1 (en) 1997-04-30 2002-09-17 Southwest Research Institute Surface flaw detection using spatial raman-based imaging
US6075640A (en) * 1997-11-26 2000-06-13 Massachusetts Institute Of Technology Signal processing by optically manipulating polaritons
US6356349B1 (en) 1998-07-10 2002-03-12 Massachusetts Institute Of Technology Polariton wave imaging
GB9929752D0 (en) * 1999-12-17 2000-02-09 Secr Defence Textured surface
US6421128B1 (en) 2000-05-17 2002-07-16 The Arizona Board Of Regents On Behalf Of The University Of Arizona Coupled plasmon-waveguide resonance spectroscopic device and method for measuring film properties in the ultraviolet and infrared special ranges
DE10146826B4 (de) * 2001-09-19 2004-11-25 Deutsches Zentrum für Luft- und Raumfahrt e.V. Verfahren zur Analyse von Silizium-Germanium-Legierungen und Vorrichtung zur Herstellung von Halbleiterschichtstrukturen mit Silizium-Germanium-Legierungsschichten
DE10207163A1 (de) * 2002-02-20 2003-08-28 Applied Films Gmbh & Co Kg Vorrichtung und Verfahren für die indirekte Bestimmung der physikalischen Eigenschaften dünner Schichten auf einem nicht-metallischen Substrat mittels Ellipsometrie
GB0215876D0 (en) * 2002-07-10 2002-08-14 Marconi Applied Techn Ltd Spectroscopy methods and devices
JP2005532563A (ja) * 2002-07-10 2005-10-27 イー２ヴイ テクノロジーズ （ユーケイ） リミテッド 分子検出器装置
GB2400908A (en) * 2003-04-25 2004-10-27 E2V Tech Uk Ltd Molecular detector arrangement
DE10335533A1 (de) * 2003-07-31 2005-02-17 "Stiftung Caesar" (Center Of Advanced European Studies And Research) Berührungsloser Dehnungssensor
US20070202515A1 (en) * 2005-10-12 2007-08-30 Pathologica, Llc. Promac signature application
FR2908186B1 (fr) * 2006-11-03 2012-08-03 Commissariat Energie Atomique Structure amelioree de detection optique pour capteur par resonance plasmon
EP2174957B1 (en) 2007-06-15 2016-03-16 Xiamen University Monoclonal antibodies binding to avian influenza virus subtype h5 haemagglutinin and uses thereof
JP2015055482A (ja) * 2013-09-10 2015-03-23 セイコーエプソン株式会社 分析装置、分析方法、これらに用いる光学素子及び電子機器
CN105628673B (zh) * 2015-12-18 2018-05-25 中国科学院半导体研究所 测试复合硅衬底上过渡金属硫族化合物样品层数的方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4785336A (en) * 1986-12-04 1988-11-15 Libbey-Owens-Ford Co. Device for monitoring characteristics of a film on a substrate
WO1988006725A1 (en) * 1987-02-25 1988-09-07 Scientific Generics Limited Clinical gas monitoring
DE3720387C1 (en) * 1987-06-19 1988-11-24 Benno Rothenhaeusler Method and device for examining the physical properties of thin layers by means of polarised light
DE3914631A1 (de) * 1989-05-03 1990-11-08 Basf Ag Verfahren zur untersuchung der physikalischen eigenschaften duenner schichten

Also Published As

Publication number Publication date
DE4004088A1 (de) 1991-08-14
AU636005B2 (en) 1993-04-08
CA2035686A1 (en) 1991-08-11
KR910015849A (ko) 1991-09-30
AU7084991A (en) 1991-08-15
FI910568A0 (fi) 1991-02-06
JPH0560692A (ja) 1993-03-12
EP0445520A1 (de) 1991-09-11
US5116121A (en) 1992-05-26
FI910568A7 (fi) 1991-08-11

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