FI893826A0 - MOLEKYLVAKUUMPUMP. - Google Patents

MOLEKYLVAKUUMPUMP.

Info

Publication number
FI893826A0
FI893826A0 FI893826A FI893826A FI893826A0 FI 893826 A0 FI893826 A0 FI 893826A0 FI 893826 A FI893826 A FI 893826A FI 893826 A FI893826 A FI 893826A FI 893826 A0 FI893826 A0 FI 893826A0
Authority
FI
Finland
Prior art keywords
molekylvakuumpump
Prior art date
Application number
FI893826A
Other languages
Finnish (fi)
Inventor
Valery Borisovich Sholokhov
Konstantin Evgenievic Demikhov
Vladimir Pavlovich Sergeev
Vladimir Iliich Vikhrev
Sergei Nikolaevich
Original Assignee
Sholokhov Valery B
Demikhov Konstantin E
Sergeev Vladimir P
Vikhrev Vladimir I
Sergei Nikolaevich
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sholokhov Valery B, Demikhov Konstantin E, Sergeev Vladimir P, Vikhrev Vladimir I, Sergei Nikolaevich filed Critical Sholokhov Valery B
Publication of FI893826A0 publication Critical patent/FI893826A0/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/044—Holweck-type pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Furnace Details (AREA)
FI893826A 1987-12-25 1989-08-14 MOLEKYLVAKUUMPUMP. FI893826A0 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/SU1987/000155 WO1989006319A1 (en) 1987-12-25 1987-12-25 Molecular vacuum pump

Publications (1)

Publication Number Publication Date
FI893826A0 true FI893826A0 (en) 1989-08-14

Family

ID=21617166

Family Applications (1)

Application Number Title Priority Date Filing Date
FI893826A FI893826A0 (en) 1987-12-25 1989-08-14 MOLEKYLVAKUUMPUMP.

Country Status (6)

Country Link
JP (1) JPH02502743A (en)
DE (1) DE3791053T1 (en)
FI (1) FI893826A0 (en)
FR (1) FR2629877B1 (en)
GB (1) GB2232205B (en)
WO (1) WO1989006319A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE58907244D1 (en) * 1989-07-20 1994-04-21 Leybold Ag Friction pump with bell-shaped rotor.
DE4438812A1 (en) * 1994-10-31 1996-05-02 Leybold Ag Friction vacuum pump with cooling
US6019581A (en) * 1995-08-08 2000-02-01 Leybold Aktiengesellschaft Friction vacuum pump with cooling arrangement
DE19632874A1 (en) * 1996-08-16 1998-02-19 Leybold Vakuum Gmbh Friction vacuum pump
DE29717079U1 (en) * 1997-09-24 1997-11-06 Leybold Vakuum GmbH, 50968 Köln Compound pump
DE19806507B4 (en) * 1998-02-17 2010-08-19 Wobben, Aloys, Dipl.-Ing. Sogpumpe
JP4104098B2 (en) * 1999-03-31 2008-06-18 エドワーズ株式会社 Vacuum pump
JP2001248587A (en) * 1999-12-28 2001-09-14 Kashiyama Kogyo Kk Composite vacuum pump
DE10046766A1 (en) * 2000-09-21 2002-04-11 Leybold Vakuum Gmbh Compound-friction vacuum pump
DE10111525A1 (en) * 2001-03-09 2002-09-12 Leybold Vakuum Gmbh Screw vacuum pump with rotor inlet and rotor outlet
DE10224604B4 (en) 2002-06-04 2014-01-30 Oerlikon Leybold Vacuum Gmbh evacuation device
DE102013203421A1 (en) * 2013-02-28 2014-08-28 Pfeiffer Vacuum Gmbh vacuum pump

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE790969A (en) * 1971-11-16 1973-05-07 Cit Alcatel PIVOT FOR ROTARY MOLECULAR PUMPS
FR2224009A5 (en) * 1973-03-30 1974-10-25 Cit Alcatel
FR2244370A5 (en) * 1973-09-14 1975-04-11 Cit Alcatel
NL8105614A (en) * 1981-12-14 1983-07-01 Ultra Centrifuge Nederland Nv HIGH VACUUM MOLECULAR PUMP.
NL8303927A (en) * 1983-11-16 1985-06-17 Ultra Centrifuge Nederland Nv HIGH VACUUM MOLECULAR PUMP.
DE3613344A1 (en) * 1986-04-19 1987-10-22 Pfeiffer Vakuumtechnik TURBOMOLECULAR VACUUM PUMP FOR HIGHER PRESSURE

Also Published As

Publication number Publication date
FR2629877A1 (en) 1989-10-13
DE3791053T1 (en) 1989-12-21
GB2232205A (en) 1990-12-05
FR2629877B1 (en) 1992-04-17
GB2232205B (en) 1991-11-13
JPH02502743A (en) 1990-08-30
GB8917441D0 (en) 1990-08-22
WO1989006319A1 (en) 1989-07-13

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Legal Events

Date Code Title Description
FA Application withdrawn

Owner name: DEMIKHOV, KONSTANTIN EVGENIEVICH

Owner name: SHARSHIN, SERGEI NIKOLAEVICH

Owner name: SERGEEV, VLADIMIR PAVLOVICH

Owner name: VIKHREV, VLADIMIR ILIICH

Owner name: SHOLOKHOV, VALERY BORISOVICH