FI870178A0 - Pao jonstraolar baserat jonimplantationssystem. - Google Patents

Pao jonstraolar baserat jonimplantationssystem.

Info

Publication number
FI870178A0
FI870178A0 FI870178A FI870178A FI870178A0 FI 870178 A0 FI870178 A0 FI 870178A0 FI 870178 A FI870178 A FI 870178A FI 870178 A FI870178 A FI 870178A FI 870178 A0 FI870178 A0 FI 870178A0
Authority
FI
Finland
Prior art keywords
jonstraolar
jonimplantationssystem
baserat
pao
pao jonstraolar
Prior art date
Application number
FI870178A
Other languages
English (en)
Finnish (fi)
Inventor
Andre Lagendijk
Shantia Riahi
Original Assignee
Schumacher Co J C
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schumacher Co J C filed Critical Schumacher Co J C
Publication of FI870178A0 publication Critical patent/FI870178A0/fi

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08—Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
FI870178A 1985-05-17 1987-01-16 Pao jonstraolar baserat jonimplantationssystem. FI870178A0 (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US1985/000929 WO1986006874A1 (en) 1985-05-17 1985-05-17 Ion beam implant system

Publications (1)

Publication Number Publication Date
FI870178A0 true FI870178A0 (fi) 1987-01-16

Family

ID=22188682

Family Applications (1)

Application Number Title Priority Date Filing Date
FI870178A FI870178A0 (fi) 1985-05-17 1987-01-16 Pao jonstraolar baserat jonimplantationssystem.

Country Status (7)

Country Link
US (1) US4855604A (da)
EP (1) EP0221056A4 (da)
JP (1) JPS62503059A (da)
DK (1) DK24187D0 (da)
FI (1) FI870178A0 (da)
NO (1) NO870191L (da)
WO (1) WO1986006874A1 (da)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1987006389A1 (en) * 1986-04-09 1987-10-22 J.C. Schumacher Company Semiconductor dopant vaporizer
JP3485104B2 (ja) * 2001-04-24 2004-01-13 日新電機株式会社 イオン源用オーブン
US6864633B2 (en) * 2003-04-03 2005-03-08 Varian Medical Systems, Inc. X-ray source employing a compact electron beam accelerator
KR100675891B1 (ko) * 2005-05-04 2007-02-02 주식회사 하이닉스반도체 불균일 이온주입장치 및 불균일 이온주입방법
US10125052B2 (en) 2008-05-06 2018-11-13 Massachusetts Institute Of Technology Method of fabricating electrically conductive aerogels
US8785881B2 (en) 2008-05-06 2014-07-22 Massachusetts Institute Of Technology Method and apparatus for a porous electrospray emitter
DE102010027278B4 (de) * 2010-07-15 2020-07-02 Metismotion Gmbh Thermisch volumenneutraler Hubübertrager sowie Dosierventil mit einem solchen Hubübertrager und Verwendung des Dosierventils
US10308377B2 (en) * 2011-05-03 2019-06-04 Massachusetts Institute Of Technology Propellant tank and loading for electrospray thruster
US9669416B2 (en) 2013-05-28 2017-06-06 Massachusetts Institute Of Technology Electrospraying systems and associated methods
WO2016164004A1 (en) * 2015-04-08 2016-10-13 Massachusetts Institute Of Technology Propellant tank and loading for electrospray thruster
US10141855B2 (en) 2017-04-12 2018-11-27 Accion Systems, Inc. System and method for power conversion
EP3973182A4 (en) 2019-05-21 2023-06-28 Accion Systems, Inc. Apparatus for electrospray emission
US12104583B2 (en) 2020-08-24 2024-10-01 Accion Systems, Inc. Propellant apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1826809A (en) * 1929-11-08 1931-10-13 H A Metz Lab Inc Receptacle for packing ampules
US2882410A (en) * 1946-06-14 1959-04-14 William M Brobeck Ion source
CH581992A5 (da) * 1975-08-15 1976-11-30 Laib Jakob C
US4134514A (en) * 1976-12-02 1979-01-16 J C Schumacher Co. Liquid source material container and method of use for semiconductor device manufacturing
US4298037A (en) * 1976-12-02 1981-11-03 J. C. Schumacher Co. Method of shipping and using semiconductor liquid source materials
JPS6054150A (ja) * 1983-09-01 1985-03-28 Hitachi Ltd イオン源
JPH0654150A (ja) * 1992-07-31 1994-02-25 Ricoh Co Ltd ジターレス画像形成装置

Also Published As

Publication number Publication date
JPS62503059A (ja) 1987-12-03
US4855604A (en) 1989-08-08
NO870191L (no) 1987-03-10
NO870191D0 (no) 1987-01-16
EP0221056A4 (en) 1987-09-08
WO1986006874A1 (en) 1986-11-20
DK24187A (da) 1987-01-16
DK24187D0 (da) 1987-01-16
EP0221056A1 (en) 1987-05-13

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Legal Events

Date Code Title Description
FA Application withdrawn

Owner name: J.C. SCHUMACHER COMPANY