FI862763A - Plasmaprocessenhet med cellstruktur. - Google Patents

Plasmaprocessenhet med cellstruktur. Download PDF

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Publication number
FI862763A
FI862763A FI862763A FI862763A FI862763A FI 862763 A FI862763 A FI 862763A FI 862763 A FI862763 A FI 862763A FI 862763 A FI862763 A FI 862763A FI 862763 A FI862763 A FI 862763A
Authority
FI
Finland
Prior art keywords
plasmaprocessenhet
cellstruktur
med
plasmaprocessenhet med
med cellstruktur
Prior art date
Application number
FI862763A
Other languages
English (en)
Other versions
FI75968C (fi
FI75968B (fi
FI862763A0 (fi
Inventor
Pentti Salmelin
Original Assignee
Imatran Voima Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imatran Voima Oy filed Critical Imatran Voima Oy
Priority to FI862763A priority Critical patent/FI75968C/fi
Publication of FI862763A0 publication Critical patent/FI862763A0/fi
Priority to PCT/FI1987/000088 priority patent/WO1988000088A1/en
Publication of FI862763A publication Critical patent/FI862763A/fi
Application granted granted Critical
Publication of FI75968B publication Critical patent/FI75968B/fi
Publication of FI75968C publication Critical patent/FI75968C/fi

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J12/00—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor
    • B01J12/002—Chemical processes in general for reacting gaseous media with gaseous media; Apparatus specially adapted therefor carried out in the plasma state
FI862763A 1986-06-30 1986-06-30 Plasmaprocessenhet med cellstruktur. FI75968C (fi)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FI862763A FI75968C (fi) 1986-06-30 1986-06-30 Plasmaprocessenhet med cellstruktur.
PCT/FI1987/000088 WO1988000088A1 (en) 1986-06-30 1987-06-30 Shell-structured plasma process unit

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI862763 1986-06-30
FI862763A FI75968C (fi) 1986-06-30 1986-06-30 Plasmaprocessenhet med cellstruktur.

Publications (4)

Publication Number Publication Date
FI862763A0 FI862763A0 (fi) 1986-06-30
FI862763A true FI862763A (fi) 1987-12-31
FI75968B FI75968B (fi) 1988-04-29
FI75968C FI75968C (fi) 1988-08-08

Family

ID=8522853

Family Applications (1)

Application Number Title Priority Date Filing Date
FI862763A FI75968C (fi) 1986-06-30 1986-06-30 Plasmaprocessenhet med cellstruktur.

Country Status (2)

Country Link
FI (1) FI75968C (fi)
WO (1) WO1988000088A1 (fi)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8906045D0 (en) * 1989-03-16 1989-04-26 Davy Mckee London Apparatus
WO1993025121A1 (en) * 1992-06-15 1993-12-23 Herman Miller, Inc. Office chair
US7160521B2 (en) 2001-07-11 2007-01-09 Applied Materials, Inc. Treatment of effluent from a substrate processing chamber
WO2004064983A1 (en) * 2003-01-13 2004-08-05 Applied Materials, Inc. Treatment of effluent from a substrate processing chamber

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3780675A (en) * 1972-04-18 1973-12-25 Boardman Co Plasma arc refuse disintegrator
CA1225441A (en) * 1984-01-23 1987-08-11 Edward S. Fox Plasma pyrolysis waste destruction

Also Published As

Publication number Publication date
FI75968C (fi) 1988-08-08
FI75968B (fi) 1988-04-29
FI862763A0 (fi) 1986-06-30
WO1988000088A1 (en) 1988-01-14

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Legal Events

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MM Patent lapsed
MM Patent lapsed

Owner name: IMATRAN VOIMA OY