FI860120A0 - FOERFARANDE FOER FRAMSTAELLNING AV ETT PIEZORESISTIVT MOTSTAONDSELEMENT SAMT EN ANORDNING SOM TILLAEMPAR FOERFARANDET OCH EN MED FOERFARANDET FRAMSTAELLD GIVARE SPECIELLT EN TRYCKGIVARE ELLER MOTSVARANDE. - Google Patents

FOERFARANDE FOER FRAMSTAELLNING AV ETT PIEZORESISTIVT MOTSTAONDSELEMENT SAMT EN ANORDNING SOM TILLAEMPAR FOERFARANDET OCH EN MED FOERFARANDET FRAMSTAELLD GIVARE SPECIELLT EN TRYCKGIVARE ELLER MOTSVARANDE.

Info

Publication number
FI860120A0
FI860120A0 FI860120A FI860120A FI860120A0 FI 860120 A0 FI860120 A0 FI 860120A0 FI 860120 A FI860120 A FI 860120A FI 860120 A FI860120 A FI 860120A FI 860120 A0 FI860120 A0 FI 860120A0
Authority
FI
Finland
Prior art keywords
foerfarandet
tryckgivare
tillaempar
piezoresistivt
motstaondselement
Prior art date
Application number
FI860120A
Other languages
Finnish (fi)
Other versions
FI78782C (en
FI78782B (en
FI860120A (en
Inventor
Markus Turunen
Ilkka Karaila
Original Assignee
Valmet Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valmet Oy filed Critical Valmet Oy
Priority to FI860120A priority Critical patent/FI78782C/en
Publication of FI860120A0 publication Critical patent/FI860120A0/en
Priority to PCT/FI1987/000003 priority patent/WO1987004300A1/en
Priority to EP19870900813 priority patent/EP0253860A1/en
Priority to JP50072287A priority patent/JPS63502710A/en
Publication of FI860120A publication Critical patent/FI860120A/en
Application granted granted Critical
Publication of FI78782B publication Critical patent/FI78782B/en
Publication of FI78782C publication Critical patent/FI78782C/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C10/00—Adjustable resistors
    • H01C10/10—Adjustable resistors adjustable by mechanical pressure or force
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
    • G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
    • G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
    • G01L1/2293—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges of the semi-conductor type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Pressure Sensors (AREA)
FI860120A 1986-01-10 1986-01-10 A method for producing a piezoresistive resistance element with a device applying the method and a sensor produced by the method, in particular a pressure sensor or equivalent. FI78782C (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FI860120A FI78782C (en) 1986-01-10 1986-01-10 A method for producing a piezoresistive resistance element with a device applying the method and a sensor produced by the method, in particular a pressure sensor or equivalent.
PCT/FI1987/000003 WO1987004300A1 (en) 1986-01-10 1987-01-09 Procedure for manufacturing a piezoresistive resistance element and apparatus applying said procedure, and pick-up manufactured by the procedure, in particular a pressure pick-up or equivalent
EP19870900813 EP0253860A1 (en) 1986-01-10 1987-01-09 Procedure for manufacturing a piezoresistive resistance element and apparatus applying said procedure, and pick-up manufactured by the procedure, in particular a pressure pick-up or equivalent
JP50072287A JPS63502710A (en) 1986-01-10 1987-01-09 A method for producing a piezoresistive resistance element, an apparatus for carrying out said method, and a pick-up, in particular a pressure pick-up or equivalent, produced by said method.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI860120A FI78782C (en) 1986-01-10 1986-01-10 A method for producing a piezoresistive resistance element with a device applying the method and a sensor produced by the method, in particular a pressure sensor or equivalent.
FI860120 1986-01-10

Publications (4)

Publication Number Publication Date
FI860120A0 true FI860120A0 (en) 1986-01-10
FI860120A FI860120A (en) 1987-07-11
FI78782B FI78782B (en) 1989-05-31
FI78782C FI78782C (en) 1989-09-11

Family

ID=8521945

Family Applications (1)

Application Number Title Priority Date Filing Date
FI860120A FI78782C (en) 1986-01-10 1986-01-10 A method for producing a piezoresistive resistance element with a device applying the method and a sensor produced by the method, in particular a pressure sensor or equivalent.

Country Status (4)

Country Link
EP (1) EP0253860A1 (en)
JP (1) JPS63502710A (en)
FI (1) FI78782C (en)
WO (1) WO1987004300A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2827041B1 (en) * 2001-07-03 2003-12-12 Commissariat Energie Atomique PIEZORESISTIVE DEVICE AND METHODS OF MAKING THE DEVICE
FI127245B (en) * 2016-07-11 2018-02-15 Forciot Oy Force and / or pressure sensor

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3699649A (en) * 1969-11-05 1972-10-24 Donald A Mcwilliams Method of and apparatus for regulating the resistance of film resistors
US4042006A (en) * 1973-01-05 1977-08-16 Siemens Aktiengesellschaft Pyrolytic process for producing a band-shaped metal layer on a substrate
US4021898A (en) * 1976-05-20 1977-05-10 Timex Corporation Method of adjusting the frequency of vibration of piezoelectric resonators
US4127840A (en) * 1977-02-22 1978-11-28 Conrac Corporation Solid state force transducer
US4340617A (en) * 1980-05-19 1982-07-20 Massachusetts Institute Of Technology Method and apparatus for depositing a material on a surface
US4373399A (en) * 1981-02-05 1983-02-15 Beloglazov Alexei V Semiconductor strain gauge transducer
WO1984000081A1 (en) * 1982-06-14 1984-01-05 Gte Prod Corp Apparatus for trimming of piezoelectric components

Also Published As

Publication number Publication date
WO1987004300A1 (en) 1987-07-16
JPS63502710A (en) 1988-10-06
FI78782C (en) 1989-09-11
FI78782B (en) 1989-05-31
EP0253860A1 (en) 1988-01-27
FI860120A (en) 1987-07-11

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Legal Events

Date Code Title Description
MM Patent lapsed

Owner name: VALMET OY