FI20225231A1 - Substratprocessningsapparatur och -förfarande - Google Patents
Substratprocessningsapparatur och -förfarande Download PDFInfo
- Publication number
- FI20225231A1 FI20225231A1 FI20225231A FI20225231A FI20225231A1 FI 20225231 A1 FI20225231 A1 FI 20225231A1 FI 20225231 A FI20225231 A FI 20225231A FI 20225231 A FI20225231 A FI 20225231A FI 20225231 A1 FI20225231 A1 FI 20225231A1
- Authority
- FI
- Finland
- Prior art keywords
- certain embodiments
- plasma
- inner chamber
- chamber
- lid
- Prior art date
Links
Landscapes
- Chemical Vapour Deposition (AREA)
- Cleaning In General (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20225231A FI20225231A (sv) | 2020-01-10 | 2020-01-10 | Substratprocessningsapparatur och -förfarande |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20225231A FI20225231A (sv) | 2020-01-10 | 2020-01-10 | Substratprocessningsapparatur och -förfarande |
Publications (2)
Publication Number | Publication Date |
---|---|
FI20225231A1 true FI20225231A1 (sv) | 2022-03-15 |
FI20225231A FI20225231A (sv) | 2022-03-15 |
Family
ID=81306668
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20225231A FI20225231A (sv) | 2020-01-10 | 2020-01-10 | Substratprocessningsapparatur och -förfarande |
Country Status (1)
Country | Link |
---|---|
FI (1) | FI20225231A (sv) |
-
2020
- 2020-01-10 FI FI20225231A patent/FI20225231A/sv unknown
Also Published As
Publication number | Publication date |
---|---|
FI20225231A (sv) | 2022-03-15 |
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