FI20225231A1 - Substratprocessningsapparatur och -förfarande - Google Patents

Substratprocessningsapparatur och -förfarande Download PDF

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Publication number
FI20225231A1
FI20225231A1 FI20225231A FI20225231A FI20225231A1 FI 20225231 A1 FI20225231 A1 FI 20225231A1 FI 20225231 A FI20225231 A FI 20225231A FI 20225231 A FI20225231 A FI 20225231A FI 20225231 A1 FI20225231 A1 FI 20225231A1
Authority
FI
Finland
Prior art keywords
certain embodiments
plasma
inner chamber
chamber
lid
Prior art date
Application number
FI20225231A
Other languages
English (en)
Finnish (fi)
Other versions
FI20225231A (sv
Inventor
Väinö Kilpi
Original Assignee
Picosun Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Picosun Oy filed Critical Picosun Oy
Priority to FI20225231A priority Critical patent/FI20225231A/sv
Publication of FI20225231A1 publication Critical patent/FI20225231A1/sv
Publication of FI20225231A publication Critical patent/FI20225231A/sv

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  • Chemical Vapour Deposition (AREA)
  • Cleaning In General (AREA)
FI20225231A 2020-01-10 2020-01-10 Substratprocessningsapparatur och -förfarande FI20225231A (sv)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FI20225231A FI20225231A (sv) 2020-01-10 2020-01-10 Substratprocessningsapparatur och -förfarande

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20225231A FI20225231A (sv) 2020-01-10 2020-01-10 Substratprocessningsapparatur och -förfarande

Publications (2)

Publication Number Publication Date
FI20225231A1 true FI20225231A1 (sv) 2022-03-15
FI20225231A FI20225231A (sv) 2022-03-15

Family

ID=81306668

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20225231A FI20225231A (sv) 2020-01-10 2020-01-10 Substratprocessningsapparatur och -förfarande

Country Status (1)

Country Link
FI (1) FI20225231A (sv)

Also Published As

Publication number Publication date
FI20225231A (sv) 2022-03-15

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