FI20155151A - Mirror plate for Fabry-Perot interferometer and Fabry-Perot interferometer - Google Patents
Mirror plate for Fabry-Perot interferometer and Fabry-Perot interferometer Download PDFInfo
- Publication number
- FI20155151A FI20155151A FI20155151A FI20155151A FI20155151A FI 20155151 A FI20155151 A FI 20155151A FI 20155151 A FI20155151 A FI 20155151A FI 20155151 A FI20155151 A FI 20155151A FI 20155151 A FI20155151 A FI 20155151A
- Authority
- FI
- Finland
- Prior art keywords
- fabry
- perot interferometer
- mirror plate
- perot
- interferometer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/26—Generating the spectrum; Monochromators using multiple reflection, e.g. Fabry-Perot interferometer, variable interference filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
- G01B9/02017—Interferometers characterised by the beam path configuration with multiple interactions between the target object and light beams, e.g. beam reflections occurring from different locations
- G01B9/02018—Multipass interferometers, e.g. double-pass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/04—Optical or mechanical part supplementary adjustable parts
- G01J1/0407—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings
- G01J1/0414—Optical elements not provided otherwise, e.g. manifolds, windows, holograms, gratings using plane or convex mirrors, parallel phase plates, or plane beam-splitters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0278—Control or determination of height or angle information for sensors or receivers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/08—Mirrors
- G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02019—Chemical etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
- H01L21/2003—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy characterised by the substrate
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
- G01B2290/25—Fabry-Perot in interferometer, e.g. etalon, cavity
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J2003/2866—Markers; Calibrating of scan
- G01J2003/2879—Calibrating scan, e.g. Fabry Perot interferometer
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/20—Filters
- G02B5/28—Interference filters
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Chemical & Material Sciences (AREA)
- Spectrometry And Color Measurement (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Micromachines (AREA)
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20155151A FI127159B (en) | 2015-03-09 | 2015-03-09 | Mirror disk for Fabry-Perot interferometer and Fabry-Perot interferometer |
CN201680014528.1A CN107430032B (en) | 2015-03-09 | 2016-03-08 | Runner plate and Fabry-Perot interferometer for Fabry-Perot interferometer |
PCT/FI2016/050139 WO2016142583A1 (en) | 2015-03-09 | 2016-03-08 | A mirror plate for a fabry-perot interferometer and a fabry-perot interferometer |
US15/556,662 US10495514B2 (en) | 2015-03-09 | 2016-03-08 | Mirror plate for a fabry-perot interferometer and a fabry-perot interferometer |
JP2017547156A JP6730300B2 (en) | 2015-03-09 | 2016-03-08 | Mirror plate for Fabry-Perot interferometer, and Fabry-Perot interferometer |
EP16761146.6A EP3268708B1 (en) | 2015-03-09 | 2016-03-08 | A mirror plate for a fabry-perot interferometer and a fabry-perot interferometer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20155151A FI127159B (en) | 2015-03-09 | 2015-03-09 | Mirror disk for Fabry-Perot interferometer and Fabry-Perot interferometer |
Publications (2)
Publication Number | Publication Date |
---|---|
FI20155151A true FI20155151A (en) | 2016-09-10 |
FI127159B FI127159B (en) | 2017-12-15 |
Family
ID=56879977
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20155151A FI127159B (en) | 2015-03-09 | 2015-03-09 | Mirror disk for Fabry-Perot interferometer and Fabry-Perot interferometer |
Country Status (6)
Country | Link |
---|---|
US (1) | US10495514B2 (en) |
EP (1) | EP3268708B1 (en) |
JP (1) | JP6730300B2 (en) |
CN (1) | CN107430032B (en) |
FI (1) | FI127159B (en) |
WO (1) | WO2016142583A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6958131B2 (en) * | 2017-08-31 | 2021-11-02 | セイコーエプソン株式会社 | Optical modules, electronic devices, and control methods for optical modules |
CN109870449B (en) * | 2019-02-25 | 2021-11-26 | 京东方科技集团股份有限公司 | Gas monitoring device, system and method and cabinet |
CN114502929B (en) * | 2019-10-09 | 2024-04-26 | 浜松光子学株式会社 | Light detection device |
CN116324351A (en) * | 2020-10-30 | 2023-06-23 | 松下知识产权经营株式会社 | Light detection device, method for manufacturing structure, and method for manufacturing light detection device |
CN114647076A (en) * | 2022-03-23 | 2022-06-21 | 优尼科(青岛)微电子有限公司 | Leveling system and leveling method for electrostatic MEMS Fabry-Perot cavity chip |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5525828A (en) | 1991-10-31 | 1996-06-11 | International Business Machines Corporation | High speed silicon-based lateral junction photodetectors having recessed electrodes and thick oxide to reduce fringing fields |
US6381022B1 (en) * | 1992-01-22 | 2002-04-30 | Northeastern University | Light modulating device |
US5799028A (en) * | 1996-07-18 | 1998-08-25 | Sdl, Inc. | Passivation and protection of a semiconductor surface |
US6399405B1 (en) | 1998-12-21 | 2002-06-04 | Xerox Corporation | Process for constructing a spectrophotometer |
US20050032357A1 (en) * | 2002-01-17 | 2005-02-10 | Rantala Juha T. | Dielectric materials and methods for integrated circuit applications |
CN1619295A (en) * | 2004-12-10 | 2005-05-25 | 南京农业大学 | Pork colour grading instrument |
CN100538432C (en) * | 2006-01-19 | 2009-09-09 | 精工爱普生株式会社 | Wave length variable filter, wave length variable filter module and optical spectrum analyser |
JP4379457B2 (en) * | 2006-01-19 | 2009-12-09 | セイコーエプソン株式会社 | Optical device, wavelength tunable filter, wavelength tunable filter module, and optical spectrum analyzer |
JP2010127739A (en) * | 2008-11-27 | 2010-06-10 | Toppan Printing Co Ltd | Spectral sensitivity characteristic measurement apparatus and spectral sensitivity characteristic measurement method |
JP2011027780A (en) * | 2009-07-21 | 2011-02-10 | Denso Corp | Fabry-perot interferometer and manufacturing method of the same |
IL201742A0 (en) * | 2009-10-25 | 2010-06-16 | Elbit Sys Electro Optics Elop | Tunable spectral filter |
JP5716412B2 (en) | 2011-01-24 | 2015-05-13 | セイコーエプソン株式会社 | Wavelength variable interference filter, optical module, and optical analyzer |
FI125612B (en) * | 2012-05-08 | 2015-12-15 | Teknologian Tutkimuskeskus Vtt Oy | Fabry-Perot interferometer |
JP6182918B2 (en) * | 2013-03-18 | 2017-08-23 | セイコーエプソン株式会社 | Interference filter, optical filter device, optical module, and electronic apparatus |
FI125690B (en) | 2013-06-18 | 2016-01-15 | Teknologian Tutkimuskeskus Vtt Oy | Mirror for a Fabry-Perot interferometer and method of manufacturing the same |
-
2015
- 2015-03-09 FI FI20155151A patent/FI127159B/en active IP Right Grant
-
2016
- 2016-03-08 US US15/556,662 patent/US10495514B2/en active Active
- 2016-03-08 CN CN201680014528.1A patent/CN107430032B/en active Active
- 2016-03-08 EP EP16761146.6A patent/EP3268708B1/en active Active
- 2016-03-08 WO PCT/FI2016/050139 patent/WO2016142583A1/en active Application Filing
- 2016-03-08 JP JP2017547156A patent/JP6730300B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN107430032A (en) | 2017-12-01 |
CN107430032B (en) | 2019-04-16 |
US20180052049A1 (en) | 2018-02-22 |
EP3268708A4 (en) | 2018-08-29 |
JP2018511822A (en) | 2018-04-26 |
US10495514B2 (en) | 2019-12-03 |
EP3268708B1 (en) | 2020-04-29 |
JP6730300B2 (en) | 2020-07-29 |
WO2016142583A1 (en) | 2016-09-15 |
EP3268708A1 (en) | 2018-01-17 |
FI127159B (en) | 2017-12-15 |
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