FI20095125A0 - Sulkujärjestely, tuotantolinja ja menetelmä - Google Patents
Sulkujärjestely, tuotantolinja ja menetelmäInfo
- Publication number
- FI20095125A0 FI20095125A0 FI20095125A FI20095125A FI20095125A0 FI 20095125 A0 FI20095125 A0 FI 20095125A0 FI 20095125 A FI20095125 A FI 20095125A FI 20095125 A FI20095125 A FI 20095125A FI 20095125 A0 FI20095125 A0 FI 20095125A0
- Authority
- FI
- Finland
- Prior art keywords
- procedure
- production line
- locking arrangement
- locking
- arrangement
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4409—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber characterised by sealing means
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20095125A FI122880B (fi) | 2009-02-09 | 2009-02-09 | Sulkujärjestely, tuotantolinja ja menetelmä |
PCT/FI2010/050079 WO2010089460A1 (en) | 2009-02-09 | 2010-02-08 | Gate arrangement, production line and method |
CN2010800068038A CN102308023A (zh) | 2009-02-09 | 2010-02-08 | 闸装置、生产线和方法 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FI20095125A FI122880B (fi) | 2009-02-09 | 2009-02-09 | Sulkujärjestely, tuotantolinja ja menetelmä |
FI20095125 | 2009-02-09 |
Publications (3)
Publication Number | Publication Date |
---|---|
FI20095125A0 true FI20095125A0 (fi) | 2009-02-09 |
FI20095125A FI20095125A (fi) | 2010-08-10 |
FI122880B FI122880B (fi) | 2012-08-15 |
Family
ID=40404628
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FI20095125A FI122880B (fi) | 2009-02-09 | 2009-02-09 | Sulkujärjestely, tuotantolinja ja menetelmä |
Country Status (3)
Country | Link |
---|---|
CN (1) | CN102308023A (fi) |
FI (1) | FI122880B (fi) |
WO (1) | WO2010089460A1 (fi) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9938617B2 (en) * | 2010-10-22 | 2018-04-10 | Agc Glass Europe | Modular coater separation |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA1289512C (en) * | 1985-07-29 | 1991-09-24 | Vincent D. Cannella | Depositing an electrical insulator with unidirectional gas flow in series of chambers |
JP3673584B2 (ja) * | 1996-01-16 | 2005-07-20 | キヤノン株式会社 | ロール・ツー・ロール処理方法および装置 |
EP1582832B1 (de) * | 2004-03-15 | 2007-04-18 | Applied Materials GmbH & Co. KG | Vakuumbehandlungsanlage mit Umsetzbarem Wartungsventil |
-
2009
- 2009-02-09 FI FI20095125A patent/FI122880B/fi active IP Right Grant
-
2010
- 2010-02-08 CN CN2010800068038A patent/CN102308023A/zh active Pending
- 2010-02-08 WO PCT/FI2010/050079 patent/WO2010089460A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
FI20095125A (fi) | 2010-08-10 |
WO2010089460A1 (en) | 2010-08-12 |
CN102308023A (zh) | 2012-01-04 |
FI122880B (fi) | 2012-08-15 |
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Legal Events
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---|---|---|---|
FG | Patent granted |
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