FI20086180A0 - Menetelmä pintojen interferometriseksi havaitsemiseksi - Google Patents

Menetelmä pintojen interferometriseksi havaitsemiseksi

Info

Publication number
FI20086180A0
FI20086180A0 FI20086180A FI20086180A FI20086180A0 FI 20086180 A0 FI20086180 A0 FI 20086180A0 FI 20086180 A FI20086180 A FI 20086180A FI 20086180 A FI20086180 A FI 20086180A FI 20086180 A0 FI20086180 A0 FI 20086180A0
Authority
FI
Finland
Prior art keywords
interferometric detection
interferometric
detection
Prior art date
Application number
FI20086180A
Other languages
English (en)
Swedish (sv)
Inventor
Ivan Kassamakov
Juha Aaltonen
Heimo Saarikko
Edward Haeggstroem
Kalle Hanhijaervi
Original Assignee
Helsingin Yliopisto
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Helsingin Yliopisto filed Critical Helsingin Yliopisto
Priority to FI20086180A priority Critical patent/FI20086180A0/fi
Publication of FI20086180A0 publication Critical patent/FI20086180A0/fi
Priority to US13/133,659 priority patent/US20110261347A1/en
Priority to PCT/FI2009/050993 priority patent/WO2010066949A1/en
Priority to EP09801724A priority patent/EP2373952A1/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02012—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation
    • G01B9/02014—Interferometers characterised by controlling or generating intrinsic radiation properties using temporal intensity variation by using pulsed light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02062—Active error reduction, i.e. varying with time
    • G01B9/02067—Active error reduction, i.e. varying with time by electronic control systems, i.e. using feedback acting on optics or light
    • G01B9/02069—Synchronization of light source or manipulator and detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
FI20086180A 2008-12-09 2008-12-09 Menetelmä pintojen interferometriseksi havaitsemiseksi FI20086180A0 (fi)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FI20086180A FI20086180A0 (fi) 2008-12-09 2008-12-09 Menetelmä pintojen interferometriseksi havaitsemiseksi
US13/133,659 US20110261347A1 (en) 2008-12-09 2009-12-09 Method for interferometric detection of surfaces
PCT/FI2009/050993 WO2010066949A1 (en) 2008-12-09 2009-12-09 Method for interferometric detection of surfaces
EP09801724A EP2373952A1 (en) 2008-12-09 2009-12-09 Method for interferometric detection of surfaces

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20086180A FI20086180A0 (fi) 2008-12-09 2008-12-09 Menetelmä pintojen interferometriseksi havaitsemiseksi

Publications (1)

Publication Number Publication Date
FI20086180A0 true FI20086180A0 (fi) 2008-12-09

Family

ID=40240578

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20086180A FI20086180A0 (fi) 2008-12-09 2008-12-09 Menetelmä pintojen interferometriseksi havaitsemiseksi

Country Status (4)

Country Link
US (1) US20110261347A1 (fi)
EP (1) EP2373952A1 (fi)
FI (1) FI20086180A0 (fi)
WO (1) WO2010066949A1 (fi)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8949069B2 (en) * 2009-12-16 2015-02-03 Intel Corporation Position determination based on propagation delay differences of multiple signals received at multiple sensors
US8411258B2 (en) * 2010-12-22 2013-04-02 Intel Corporation Systems and methods for determining position using light sources
US9753137B2 (en) 2013-05-26 2017-09-05 Intel Corporation Apparatus, system and method of communicating positioning information
WO2015005912A1 (en) 2013-07-10 2015-01-15 Intel Corporation Apparatus, system and method of communicating positioning transmissions
JP6349156B2 (ja) * 2014-06-03 2018-06-27 株式会社トプコン 干渉計装置
FI126062B (fi) 2014-11-24 2016-06-15 Åbo Akademi Åbo Akademi University Menetelmä 3D kuvantamisen kalibroimiseksi ja järjestelmä 3D kuvantamiseksi
JP6566737B2 (ja) 2015-06-18 2019-08-28 キヤノン株式会社 情報処理装置、情報処理方法、プログラム
US10345093B2 (en) * 2015-12-11 2019-07-09 University Of Helsinki Arrangement and method of determining properties of a surface and subsurface structures
JP6333351B1 (ja) * 2016-12-27 2018-05-30 Ntn株式会社 測定装置、塗布装置、および膜厚測定方法
CN110260816A (zh) * 2019-06-26 2019-09-20 湖南省鹰眼在线电子科技有限公司 一种基于白光干涉的背钻孔深度测量装置和方法
CN117870573B (zh) * 2024-03-12 2024-05-28 板石智能科技(深圳)有限公司 一种白光干涉三维形貌解算方法、装置、设备及存储介质

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10148442C2 (de) * 2001-10-01 2003-07-24 Siemens Ag Übertragungsverfahren für ein Magnetresonanzsignal und hiermit korrespondierende Spulenanordnung, Erfassungsschaltung und Magnetresonanzsignalübertragungseinrichtung
US7177029B2 (en) * 2003-07-10 2007-02-13 Zygo Corporation Stroboscopic interferometry with frequency domain analysis

Also Published As

Publication number Publication date
EP2373952A1 (en) 2011-10-12
US20110261347A1 (en) 2011-10-27
WO2010066949A1 (en) 2010-06-17

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Legal Events

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