FI121898B - Menetelmä ja laite impedanssin mittaamiseksi - Google Patents

Menetelmä ja laite impedanssin mittaamiseksi Download PDF

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Publication number
FI121898B
FI121898B FI20085682A FI20085682A FI121898B FI 121898 B FI121898 B FI 121898B FI 20085682 A FI20085682 A FI 20085682A FI 20085682 A FI20085682 A FI 20085682A FI 121898 B FI121898 B FI 121898B
Authority
FI
Finland
Prior art keywords
oscillator
adjustable
frequency
component
variable impedance
Prior art date
Application number
FI20085682A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI20085682A (fi
FI20085682A0 (fi
Inventor
Arto Rantala
Original Assignee
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valtion Teknillinen filed Critical Valtion Teknillinen
Priority to FI20085682A priority Critical patent/FI121898B/fi
Publication of FI20085682A0 publication Critical patent/FI20085682A0/fi
Priority to US12/495,267 priority patent/US8120434B2/en
Priority to EP09164118.3A priority patent/EP2141495B1/en
Priority to CN200910166921.4A priority patent/CN101685116B/zh
Publication of FI20085682A publication Critical patent/FI20085682A/fi
Application granted granted Critical
Publication of FI121898B publication Critical patent/FI121898B/fi

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R23/00—Arrangements for measuring frequencies; Arrangements for analysing frequency spectra
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/02—Analysing fluids
    • G01N29/028—Analysing fluids by measuring mechanical or acoustic impedance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2437—Piezoelectric probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/01—Indexing codes associated with the measuring variable
    • G01N2291/014—Resonance or resonant frequency
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/02—Indexing codes associated with the analysed material
    • G01N2291/025—Change of phase or condition
    • G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2291/00—Indexing codes associated with group G01N29/00
    • G01N2291/04—Wave modes and trajectories
    • G01N2291/042—Wave modes
    • G01N2291/0426—Bulk waves, e.g. quartz crystal microbalance, torsional waves

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Acoustics & Sound (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
FI20085682A 2008-07-01 2008-07-01 Menetelmä ja laite impedanssin mittaamiseksi FI121898B (fi)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FI20085682A FI121898B (fi) 2008-07-01 2008-07-01 Menetelmä ja laite impedanssin mittaamiseksi
US12/495,267 US8120434B2 (en) 2008-07-01 2009-06-30 Method and device for measuring impedance
EP09164118.3A EP2141495B1 (en) 2008-07-01 2009-06-30 Method and device for measuring impedance of a resonator by means of a tunable oscillator
CN200910166921.4A CN101685116B (zh) 2008-07-01 2009-07-01 测量阻抗的方法和设备

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20085682 2008-07-01
FI20085682A FI121898B (fi) 2008-07-01 2008-07-01 Menetelmä ja laite impedanssin mittaamiseksi

Publications (3)

Publication Number Publication Date
FI20085682A0 FI20085682A0 (fi) 2008-07-01
FI20085682A FI20085682A (fi) 2010-01-02
FI121898B true FI121898B (fi) 2011-05-31

Family

ID=39677567

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20085682A FI121898B (fi) 2008-07-01 2008-07-01 Menetelmä ja laite impedanssin mittaamiseksi

Country Status (4)

Country Link
US (1) US8120434B2 (zh)
EP (1) EP2141495B1 (zh)
CN (1) CN101685116B (zh)
FI (1) FI121898B (zh)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9140671B2 (en) 2011-06-28 2015-09-22 National Sun Yat-Sen University Quantitative sensor and manufacturing method thereof
CN102495290B (zh) * 2011-12-28 2014-06-11 上海海事大学 交流电力电子模块端口阻抗特性的获取装置及方法
US9660607B2 (en) * 2013-05-31 2017-05-23 Maury Microwave, Inc. Solid state impedance tuners
CN104764932B (zh) * 2014-01-07 2017-10-24 北大方正集团有限公司 一种mos管阱电阻的测量装置及测量方法
US10964649B2 (en) * 2018-08-03 2021-03-30 Arm Limited Tamper detection in integrated circuits
KR20210070709A (ko) * 2019-12-05 2021-06-15 에스케이하이닉스 주식회사 전원특성 측정장치, 그 전원특성 측정장치를 포함하는 이미지 시스템, 및 그 이미지 시스템의 동작 방법

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2846874A (en) * 1956-02-24 1958-08-12 Gen Dynamics Corp Ultrasonic testing device
US3906340A (en) * 1971-04-30 1975-09-16 Peter Mauri Wingfield Tuned circuit monitor for structural materials
US4624129A (en) * 1985-04-15 1986-11-25 Haynes Joel E Acoustical dry product density sensor
US5212988A (en) * 1988-02-29 1993-05-25 The Reagents Of The University Of California Plate-mode ultrasonic structure including a gel
US6593753B2 (en) * 1994-07-26 2003-07-15 Phase Dynamics, Inc. System and method for monitoring substances and reactions
US5895629A (en) * 1997-11-25 1999-04-20 Science & Technology Corp Ring oscillator based chemical sensor
TW526327B (en) * 1998-02-19 2003-04-01 Sumitomo Metal Ind Detection apparatus and method of physical variable
JP2004510145A (ja) * 2000-09-20 2004-04-02 モレキュラー・リフレクションズ 共鳴センサーとして使用するための微細加工された超音波アレイ
ITMI20030514A1 (it) 2003-03-18 2004-09-19 Uni Degli Studi Brescia Metodo e dispositivo per determinare la frequenza di
GB0312818D0 (en) * 2003-06-04 2003-07-09 Univ Cambridge Tech Acoustic sensor
KR100706520B1 (ko) 2003-10-31 2007-04-13 가부시키가이샤 무라타 세이사쿠쇼 탄성 표면파 센서 내장 발진회로 및 바이오센서 장치
US6948388B1 (en) * 2003-12-18 2005-09-27 The United States Of America As Represented By The Secretary Of The Navy Wireless remote sensor
JP4449978B2 (ja) * 2004-03-30 2010-04-14 株式会社村田製作所 力学量センサ
JP2006019935A (ja) * 2004-06-30 2006-01-19 Toshiba Corp 薄膜圧電共振器及びその製造方法
US7323944B2 (en) * 2005-04-11 2008-01-29 Qualcomm Incorporated PLL lock management system
US7489204B2 (en) * 2005-06-30 2009-02-10 International Business Machines Corporation Method and structure for chip-level testing of wire delay independent of silicon delay
US20070057772A1 (en) 2005-09-09 2007-03-15 Honeywell International Inc. Hybrid SAW/BAW sensor
CN1308694C (zh) * 2005-11-03 2007-04-04 北京科技大学 一种电阻的测量方法及测量装置
DE602006016813D1 (de) * 2006-10-13 2010-10-21 Univ Sabanci Biosensor- und chemische Sensorimplementierung unter Verwendung von Hochfrequenz und einer Mikrowellenvorrichtung, Schaltkreisen und Systemen

Also Published As

Publication number Publication date
CN101685116A (zh) 2010-03-31
FI20085682A (fi) 2010-01-02
EP2141495A2 (en) 2010-01-06
EP2141495A3 (en) 2013-03-06
EP2141495B1 (en) 2019-12-18
FI20085682A0 (fi) 2008-07-01
US20100001740A1 (en) 2010-01-07
CN101685116B (zh) 2017-10-27
US8120434B2 (en) 2012-02-21

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