ES418155A1 - Suspension device for workpieces to be treated in an electrical glow discharge - Google Patents

Suspension device for workpieces to be treated in an electrical glow discharge

Info

Publication number
ES418155A1
ES418155A1 ES418155A ES418155A ES418155A1 ES 418155 A1 ES418155 A1 ES 418155A1 ES 418155 A ES418155 A ES 418155A ES 418155 A ES418155 A ES 418155A ES 418155 A1 ES418155 A1 ES 418155A1
Authority
ES
Spain
Prior art keywords
workpieces
treated
suspension device
glow discharge
electrical glow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES418155A
Other languages
Spanish (es)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Elektrophysikalische Anstalt Bernhard Berghaus
Original Assignee
Elektrophysikalische Anstalt Bernhard Berghaus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Elektrophysikalische Anstalt Bernhard Berghaus filed Critical Elektrophysikalische Anstalt Bernhard Berghaus
Publication of ES418155A1 publication Critical patent/ES418155A1/en
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67017Apparatus for fluid treatment
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T403/00Joints and connections
    • Y10T403/32Articulated members
    • Y10T403/32008Plural distinct articulation axes
    • Y10T403/32041Universal
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T403/00Joints and connections
    • Y10T403/32Articulated members
    • Y10T403/32606Pivoted
    • Y10T403/32631Universal ball and socket
    • Y10T403/32786Divided socket-type coupling

Abstract

The present invention relates to a suspension device for workpieces to be treated by an electrical glow discharge in a gas atmosphere in a metal container and connected, via an insulated current lead-in, with a pole of the source of current.
ES418155A 1972-08-25 1973-08-24 Suspension device for workpieces to be treated in an electrical glow discharge Expired ES418155A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1259472A CH542024A (en) 1972-08-25 1972-08-25 Suspension device for workpieces when they are treated by means of an electric glow discharge

Publications (1)

Publication Number Publication Date
ES418155A1 true ES418155A1 (en) 1976-03-16

Family

ID=4384529

Family Applications (1)

Application Number Title Priority Date Filing Date
ES418155A Expired ES418155A1 (en) 1972-08-25 1973-08-24 Suspension device for workpieces to be treated in an electrical glow discharge

Country Status (18)

Country Link
US (1) US3865451A (en)
JP (1) JPS517624B2 (en)
AT (1) AT323500B (en)
BE (1) BE804018A (en)
CA (1) CA1010405A (en)
CH (1) CH542024A (en)
CS (1) CS172873B2 (en)
DD (1) DD110520A5 (en)
DE (1) DE2339711C2 (en)
ES (1) ES418155A1 (en)
FR (1) FR2196956B1 (en)
GB (1) GB1435546A (en)
HU (1) HU169517B (en)
IT (1) IT998416B (en)
LU (1) LU68292A1 (en)
NL (1) NL7311678A (en)
PL (1) PL92566B1 (en)
SE (1) SE384043B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2619814C2 (en) * 1976-05-05 1978-02-16 Ionit Anstalt Bernhard Berghaus, Vaduz Frame and recipient for carrying workpieces to be treated
DE3101351C2 (en) * 1981-01-17 1982-10-14 Klöckner Ionon GmbH, 5090 Leverkusen Device for hardening metallic workpieces with an evacuable chamber
JPS58213868A (en) * 1982-06-04 1983-12-12 Toyota Central Res & Dev Lab Inc Method and device for ionic nitridation of aluminum or aluminum alloy

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR545514A (en) * 1921-10-20 1922-10-13 Electric socket with ball joint
US2576563A (en) * 1950-05-09 1951-11-27 Kirby A Blewett Swivel joint
US3187079A (en) * 1962-11-08 1965-06-01 Crucible Steel Co America Electrode clamp

Also Published As

Publication number Publication date
FR2196956B1 (en) 1976-06-18
US3865451A (en) 1975-02-11
JPS5018327A (en) 1975-02-26
DE2339711A1 (en) 1974-03-07
FR2196956A1 (en) 1974-03-22
HU169517B (en) 1976-12-28
CS172873B2 (en) 1977-01-28
GB1435546A (en) 1976-05-12
CA1010405A (en) 1977-05-17
BE804018A (en) 1973-12-17
DD110520A5 (en) 1974-12-20
IT998416B (en) 1976-01-20
SE384043B (en) 1976-04-12
NL7311678A (en) 1974-02-27
CH542024A (en) 1973-09-30
DE2339711C2 (en) 1982-03-11
LU68292A1 (en) 1973-10-24
AT323500B (en) 1975-07-10
PL92566B1 (en) 1977-04-30
JPS517624B2 (en) 1976-03-09

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