ES418155A1 - Suspension device for workpieces to be treated in an electrical glow discharge - Google Patents
Suspension device for workpieces to be treated in an electrical glow dischargeInfo
- Publication number
- ES418155A1 ES418155A1 ES418155A ES418155A ES418155A1 ES 418155 A1 ES418155 A1 ES 418155A1 ES 418155 A ES418155 A ES 418155A ES 418155 A ES418155 A ES 418155A ES 418155 A1 ES418155 A1 ES 418155A1
- Authority
- ES
- Spain
- Prior art keywords
- workpieces
- treated
- suspension device
- glow discharge
- electrical glow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C8/00—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
- C23C8/06—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
- C23C8/36—Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T403/00—Joints and connections
- Y10T403/32—Articulated members
- Y10T403/32008—Plural distinct articulation axes
- Y10T403/32041—Universal
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T403/00—Joints and connections
- Y10T403/32—Articulated members
- Y10T403/32606—Pivoted
- Y10T403/32631—Universal ball and socket
- Y10T403/32786—Divided socket-type coupling
Abstract
The present invention relates to a suspension device for workpieces to be treated by an electrical glow discharge in a gas atmosphere in a metal container and connected, via an insulated current lead-in, with a pole of the source of current.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH1259472A CH542024A (en) | 1972-08-25 | 1972-08-25 | Suspension device for workpieces when they are treated by means of an electric glow discharge |
Publications (1)
Publication Number | Publication Date |
---|---|
ES418155A1 true ES418155A1 (en) | 1976-03-16 |
Family
ID=4384529
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES418155A Expired ES418155A1 (en) | 1972-08-25 | 1973-08-24 | Suspension device for workpieces to be treated in an electrical glow discharge |
Country Status (18)
Country | Link |
---|---|
US (1) | US3865451A (en) |
JP (1) | JPS517624B2 (en) |
AT (1) | AT323500B (en) |
BE (1) | BE804018A (en) |
CA (1) | CA1010405A (en) |
CH (1) | CH542024A (en) |
CS (1) | CS172873B2 (en) |
DD (1) | DD110520A5 (en) |
DE (1) | DE2339711C2 (en) |
ES (1) | ES418155A1 (en) |
FR (1) | FR2196956B1 (en) |
GB (1) | GB1435546A (en) |
HU (1) | HU169517B (en) |
IT (1) | IT998416B (en) |
LU (1) | LU68292A1 (en) |
NL (1) | NL7311678A (en) |
PL (1) | PL92566B1 (en) |
SE (1) | SE384043B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2619814C2 (en) * | 1976-05-05 | 1978-02-16 | Ionit Anstalt Bernhard Berghaus, Vaduz | Frame and recipient for carrying workpieces to be treated |
DE3101351C2 (en) * | 1981-01-17 | 1982-10-14 | Klöckner Ionon GmbH, 5090 Leverkusen | Device for hardening metallic workpieces with an evacuable chamber |
JPS58213868A (en) * | 1982-06-04 | 1983-12-12 | Toyota Central Res & Dev Lab Inc | Method and device for ionic nitridation of aluminum or aluminum alloy |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR545514A (en) * | 1921-10-20 | 1922-10-13 | Electric socket with ball joint | |
US2576563A (en) * | 1950-05-09 | 1951-11-27 | Kirby A Blewett | Swivel joint |
US3187079A (en) * | 1962-11-08 | 1965-06-01 | Crucible Steel Co America | Electrode clamp |
-
1972
- 1972-08-25 CH CH1259472A patent/CH542024A/en not_active IP Right Cessation
-
1973
- 1973-07-04 JP JP48074918A patent/JPS517624B2/ja not_active Expired
- 1973-08-03 HU HUEE2168A patent/HU169517B/hu unknown
- 1973-08-06 DE DE2339711A patent/DE2339711C2/en not_active Expired
- 1973-08-08 US US386507A patent/US3865451A/en not_active Expired - Lifetime
- 1973-08-13 GB GB3826573A patent/GB1435546A/en not_active Expired
- 1973-08-21 IT IT28043/73A patent/IT998416B/en active
- 1973-08-21 SE SE7311343A patent/SE384043B/en unknown
- 1973-08-21 FR FR7330291A patent/FR2196956B1/fr not_active Expired
- 1973-08-22 CA CA179,408A patent/CA1010405A/en not_active Expired
- 1973-08-23 PL PL1973164812A patent/PL92566B1/pl unknown
- 1973-08-23 LU LU68292A patent/LU68292A1/xx unknown
- 1973-08-23 DD DD173044A patent/DD110520A5/xx unknown
- 1973-08-24 BE BE134931A patent/BE804018A/en unknown
- 1973-08-24 ES ES418155A patent/ES418155A1/en not_active Expired
- 1973-08-24 AT AT738973A patent/AT323500B/en not_active IP Right Cessation
- 1973-08-24 NL NL7311678A patent/NL7311678A/xx not_active Application Discontinuation
- 1973-08-24 CS CS5934A patent/CS172873B2/cs unknown
Also Published As
Publication number | Publication date |
---|---|
FR2196956B1 (en) | 1976-06-18 |
US3865451A (en) | 1975-02-11 |
JPS5018327A (en) | 1975-02-26 |
DE2339711A1 (en) | 1974-03-07 |
FR2196956A1 (en) | 1974-03-22 |
HU169517B (en) | 1976-12-28 |
CS172873B2 (en) | 1977-01-28 |
GB1435546A (en) | 1976-05-12 |
CA1010405A (en) | 1977-05-17 |
BE804018A (en) | 1973-12-17 |
DD110520A5 (en) | 1974-12-20 |
IT998416B (en) | 1976-01-20 |
SE384043B (en) | 1976-04-12 |
NL7311678A (en) | 1974-02-27 |
CH542024A (en) | 1973-09-30 |
DE2339711C2 (en) | 1982-03-11 |
LU68292A1 (en) | 1973-10-24 |
AT323500B (en) | 1975-07-10 |
PL92566B1 (en) | 1977-04-30 |
JPS517624B2 (en) | 1976-03-09 |
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