ES2185478B1 - MECHANICAL EXCITATION OF MICROMECHANIZED RESONATOR. - Google Patents
MECHANICAL EXCITATION OF MICROMECHANIZED RESONATOR.Info
- Publication number
- ES2185478B1 ES2185478B1 ES200100387A ES200100387A ES2185478B1 ES 2185478 B1 ES2185478 B1 ES 2185478B1 ES 200100387 A ES200100387 A ES 200100387A ES 200100387 A ES200100387 A ES 200100387A ES 2185478 B1 ES2185478 B1 ES 2185478B1
- Authority
- ES
- Spain
- Prior art keywords
- resonator
- mechanical excitation
- micromachined
- excitation
- resonators
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Abstract
Excitación mecánica de resonador micromecanizado. Consiste en la excitación mecánica de elementos resonadores micromecanizados utilizando cerámicas piezoeléctricas, el resonador micromecanizado se polariza con tensión constante. De esta manera se elimina el efecto indeseado del condensador que forman las dos placas del resonador en la corriente de salida del dispositivo. Las características de resonancia continúan fijadas por el elemento vibrante micromecanizado y la potencia necesaria para el funcionamiento se mantiene baja, comparable al caso de excitación electrostática y medida capacitiva. En estos resonadores se detectan picos de resonancia aún cuando el factor de calidad del resonador sea bajo al no quedar oculto bajo la corriente que atraviesa el condensador paralelo, como puede ocurrir en los resonadores excitados electrostáticamente. Esto permite simplificar el proceso de fabricación, utilizar maquinaria menos sofisticada, fundamentalmente en los pasos de litografía y ataque químicos. Pudiéndose fabricar dispositivos de menor coste.Mechanical excitation of micromachined resonator. It consists of the mechanical excitation of micromachined resonator elements using piezoelectric ceramics, the micromachined resonator is polarized with constant voltage. This eliminates the undesired effect of the condenser that forms the two plates of the resonator in the output current of the device. The resonance characteristics continue to be set by the micromachining vibrating element and the power required for operation remains low, comparable to the case of electrostatic excitation and capacitive measurement. In these resonators resonance peaks are detected even when the quality factor of the resonator is low as it is not hidden under the current flowing through the parallel capacitor, as can occur in electrostatically excited resonators. This makes it possible to simplify the manufacturing process, use less sophisticated machinery, mainly in the steps of lithography and chemical attack. Being able to manufacture devices of lower cost.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ES200100387A ES2185478B1 (en) | 2001-02-14 | 2001-02-14 | MECHANICAL EXCITATION OF MICROMECHANIZED RESONATOR. |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| ES200100387A ES2185478B1 (en) | 2001-02-14 | 2001-02-14 | MECHANICAL EXCITATION OF MICROMECHANIZED RESONATOR. |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| ES2185478A1 ES2185478A1 (en) | 2003-04-16 |
| ES2185478B1 true ES2185478B1 (en) | 2004-08-16 |
Family
ID=8496803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| ES200100387A Expired - Fee Related ES2185478B1 (en) | 2001-02-14 | 2001-02-14 | MECHANICAL EXCITATION OF MICROMECHANIZED RESONATOR. |
Country Status (1)
| Country | Link |
|---|---|
| ES (1) | ES2185478B1 (en) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| AU5307400A (en) * | 1999-06-04 | 2000-12-28 | Wisconsin Alumni Research Foundation | Method and apparatus for stress pulsed release and actuation of micromechanical structures |
-
2001
- 2001-02-14 ES ES200100387A patent/ES2185478B1/en not_active Expired - Fee Related
Non-Patent Citations (1)
| Title |
|---|
| BASE DE DATOS XPEP/ELSEVIER en EPOQUE, XP004192103, ISSN:0924-4247, MINH et al. "Microfabrication of miniature aperture at apex of SiO2 tip on silicon cantilever for near-field scanning optical microscopy", SENSORS AND ACTUATORS A: PHYSICAL, Vol. 80, nº 2, Marzo 2003, páginas 163-169. * |
Also Published As
| Publication number | Publication date |
|---|---|
| ES2185478A1 (en) | 2003-04-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EC2A | Search report published |
Date of ref document: 20030416 Kind code of ref document: A1 |
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| FG2A | Definitive protection |
Ref document number: 2185478B1 Country of ref document: ES |
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| FD2A | Announcement of lapse in spain |
Effective date: 20210526 |