ES2164681T3 - Dispositivo para la medicion de parametros en gases, con por lo menos un sensor de semiconductor para gas. - Google Patents

Dispositivo para la medicion de parametros en gases, con por lo menos un sensor de semiconductor para gas.

Info

Publication number
ES2164681T3
ES2164681T3 ES94118637T ES94118637T ES2164681T3 ES 2164681 T3 ES2164681 T3 ES 2164681T3 ES 94118637 T ES94118637 T ES 94118637T ES 94118637 T ES94118637 T ES 94118637T ES 2164681 T3 ES2164681 T3 ES 2164681T3
Authority
ES
Spain
Prior art keywords
layer
electrodes
semi
semiconductor sensor
field electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
ES94118637T
Other languages
English (en)
Inventor
Jorg Dipl Phys Kelleter
Claus-Dieter Prof Kohl
Heinz Dipl-Ing Petig
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RWE Power AG
Original Assignee
RWE Rheinbraun AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RWE Rheinbraun AG filed Critical RWE Rheinbraun AG
Application granted granted Critical
Publication of ES2164681T3 publication Critical patent/ES2164681T3/es
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
    • G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid
    • G01N27/122—Circuits particularly adapted therefor, e.g. linearising circuits
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/007—Arrangements to check the analyser

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Biochemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Medicinal Chemistry (AREA)
  • Food Science & Technology (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)

Abstract

EQUIPO PARA LA MEDICION DE MAGNITUDES DE ESTADO EN GASES CON AL MENOS UN SENSOR SEMICONDUCTOR EN UNA DISPOSICION DE CIRCUITO. EL SENSOR SEMICONDUCTOR MUESTRA UNA CAPA AISLANTE Y SOBRE LA CAPA AISLANTE UN ELECTRODO DE CAMPO ENTRE DOS ELECTRODOS DISPUESTOS A UNA DISTANCIA UNO DE OTRO. AMBOS ELECTRODOS ESTAN INCRUSTADOS EN UNA CAPA SEMICONDUCTORA ACTIVA. EL ELECTRODO DE CAMPO ESTA AISLADO CONTRA LA CAPA SEMICONDUCTORA. UN GENERADOR DE TENSION DE IMPULSOS ESTA CONECTADO POR UNA PARTE AL ELECTRODO DE CAMPO Y POR OTRA PARTE EN LOS ELECTRODOS INCRUSTADOS EN LA CAPA SEMICONDUCTORA. PARA LA MEDICION DE LA MAGNITUD DE ESTADO SE MIDE EL VALOR DE CONDUCCION DE LA CAPA SEMICONDUCTORA ACTIVA POR MEDIO DE LOS ELECTRODOS. PARA EL CONTROL DE FUNCIONAMIENTO AUTOGENO SE APLICA A UNA DISTANCIA TEMPORAL UN IMPULSO DEL GENERADOR DE TENSION DE IMPULSOS ENTRE EL ELECTRODO DE CAMPO Y UN ELECTRODO INCRUSTADO EN LA CAPA SEMICONDUCTORA ACTIVA.
ES94118637T 1994-01-20 1994-11-26 Dispositivo para la medicion de parametros en gases, con por lo menos un sensor de semiconductor para gas. Expired - Lifetime ES2164681T3 (es)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE4401570A DE4401570A1 (de) 1994-01-20 1994-01-20 Einrichtung für die Messung von Zustandsgrößen in Gasen mit zumindest einem Halbleiter-Gassensor

Publications (1)

Publication Number Publication Date
ES2164681T3 true ES2164681T3 (es) 2002-03-01

Family

ID=6508310

Family Applications (1)

Application Number Title Priority Date Filing Date
ES94118637T Expired - Lifetime ES2164681T3 (es) 1994-01-20 1994-11-26 Dispositivo para la medicion de parametros en gases, con por lo menos un sensor de semiconductor para gas.

Country Status (5)

Country Link
US (1) US5668304A (es)
EP (1) EP0665428B1 (es)
DE (2) DE4401570A1 (es)
ES (1) ES2164681T3 (es)
PT (1) PT665428E (es)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1026501B1 (en) * 1999-02-03 2010-10-06 Denso Corporation Gas concentration measuring apparatus compensating for error component of output signal
DE10133384A1 (de) * 2001-07-10 2003-01-30 Bosch Gmbh Robert Sensor zur Detektion von Teilchen und Verfahren zu dessen Funktionskontrolle
FI116550B (fi) * 2004-01-29 2005-12-15 Abb Oy Ympäristösulake
CN101464467A (zh) * 2007-12-21 2009-06-24 深圳富泰宏精密工业有限公司 多功能便携式电子装置
TWI425810B (zh) * 2007-12-31 2014-02-01 Chi Mei Comm Systems Inc 多功能攜帶式電子裝置
US8560010B2 (en) * 2008-06-25 2013-10-15 Wade Koehn Cell phone with breath analyzer
DE102009038277A1 (de) * 2009-08-20 2011-03-03 Airbus Operations Gmbh Selbstkontrolle von Halbleitergassensoren zur Erkennung von Vergiftungserscheinungen durch organische Silikonverbindungen
DE102009054435A1 (de) 2009-11-25 2011-05-26 Kechter, Andreas, Dipl.-Ing. Heizbarer Gassensor und Verfahren zu dessen Herstellung

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3695848A (en) * 1970-04-07 1972-10-03 Naoyoshi Taguchi Gas detecting device
US4103227A (en) * 1977-03-25 1978-07-25 University Of Pennsylvania Ion-controlled diode
US4198851A (en) * 1978-05-22 1980-04-22 University Of Utah Method and structure for detecting the concentration of oxygen in a substance
JPS55108961U (es) * 1979-01-25 1980-07-30
US4234542A (en) * 1979-01-29 1980-11-18 Bendix Autolite Corporation Thin coat temperature compensated resistance oxide gas sensor
US4399684A (en) * 1981-11-27 1983-08-23 Sierra Monitor Corporation Gas measurement method
JPS59153159A (ja) * 1983-02-21 1984-09-01 Hitachi Ltd ガス検出装置
DE3519410A1 (de) * 1985-05-30 1986-12-04 Siemens AG, 1000 Berlin und 8000 München Betriebsverfahren und sensor fuer gasanalyse
DE3809107A1 (de) * 1988-03-18 1989-09-28 Licentia Gmbh Verfahren zur automatischen ueberpruefung der kennwerte eines im messbetrieb befindlichen, auf der basis einer widerstandsaenderung arbeitenden sensors
GB8907564D0 (en) * 1989-04-04 1989-05-17 Neotronics Technology Plc Fault detection in electrochemical gas sensing equipment
US5071770A (en) * 1989-09-05 1991-12-10 The United States Of America As Represented By The Secretary Of The Air Force Method for gaseous component indentification with #3 polymeric film
EP0426989B1 (de) * 1989-11-04 1994-02-02 Dornier Gmbh Selektiver Gassensor
WO1991016624A1 (de) * 1990-04-26 1991-10-31 Hartmann & Braun Aktiengesellschaft Verfahren zur bestimmung von gaskonzentrationen und gassensor mit festem elektrolyten
FR2672158B1 (fr) * 1991-01-24 1993-04-09 Commissariat Energie Atomique Capteur pour la detection d'especes chimiques ou de photons utilisant un transistor a effet de champ.
EP0527258B1 (de) * 1991-08-14 1995-10-25 Siemens Aktiengesellschaft Gassensor-Array zur Detektion einzelner Gaskomponenten in einem Gasgemisch
DE9113607U1 (es) * 1991-10-31 1992-01-16 Rwe Energie Ag, 4300 Essen, De
DE4217893A1 (de) * 1992-05-29 1993-12-02 Msi Elektronik Gmbh Verfahren zur Kalibrierung von Gassensoren in Meßgeräten für die Gasanalyse, Rauchgasanalyse und/oder die Wirkungsgradermittlung an Feuerungen sowie Meßgerät zur Durchführung dieses Verfahrens
GB9226937D0 (en) * 1992-12-24 1993-02-17 City Tech Electrochemical gas sensor
DE4321736B4 (de) * 1993-06-30 2004-07-29 Kiesewetter, Olaf, Dr.Ing. Sensoreinrichtung für oxidierbare Gase und Betriebsverfahren für die Sensoreinrichtung
DE9309638U1 (de) * 1993-06-30 1993-11-11 Rwe Energie Ag Gefahrenzustands- und Brandmeldesystem mit in Meldelinien angeordneten Meldeeinheiten
DE9309640U1 (de) * 1993-06-30 1993-09-23 Rwe Energie Ag Gefahrenzustands- und brandmeldesystem mit an meldeleitungen angeordneten meldeeinheiten
US5403748A (en) * 1993-10-04 1995-04-04 Dow Corning Corporation Detection of reactive gases
US5448905A (en) * 1993-11-26 1995-09-12 Transducer Research, Inc. Solid-state chemical sensor apparatus and methods

Also Published As

Publication number Publication date
EP0665428A2 (de) 1995-08-02
DE4401570A1 (de) 1995-07-27
EP0665428A3 (de) 1997-01-29
EP0665428B1 (de) 2001-11-28
US5668304A (en) 1997-09-16
PT665428E (pt) 2002-05-31
DE59409980D1 (de) 2002-01-10

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