ES2142273B1 - Sensor de gases. - Google Patents
Sensor de gases.Info
- Publication number
- ES2142273B1 ES2142273B1 ES9800552A ES9800552A ES2142273B1 ES 2142273 B1 ES2142273 B1 ES 2142273B1 ES 9800552 A ES9800552 A ES 9800552A ES 9800552 A ES9800552 A ES 9800552A ES 2142273 B1 ES2142273 B1 ES 2142273B1
- Authority
- ES
- Spain
- Prior art keywords
- gas sensor
- micro
- metal oxide
- silicon substrate
- electrical contacts
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
Abstract
Sensor de gases, constituido por un sustrato (1) de silicio que presenta al menos una zona (2) micromecanizada de reducido espesor sobre la que se dispone, en posición centrada una resistencia calefactora (4) y un óxido metálico semiconductor (5) dotado de contactos eléctricos (6).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES9800552A ES2142273B1 (es) | 1998-03-13 | 1998-03-13 | Sensor de gases. |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
ES9800552A ES2142273B1 (es) | 1998-03-13 | 1998-03-13 | Sensor de gases. |
Publications (2)
Publication Number | Publication Date |
---|---|
ES2142273A1 ES2142273A1 (es) | 2000-04-01 |
ES2142273B1 true ES2142273B1 (es) | 2000-12-01 |
Family
ID=8303118
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES9800552A Expired - Fee Related ES2142273B1 (es) | 1998-03-13 | 1998-03-13 | Sensor de gases. |
Country Status (1)
Country | Link |
---|---|
ES (1) | ES2142273B1 (es) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE3932880A1 (de) * | 1989-10-02 | 1991-04-11 | Fraunhofer Ges Forschung | Katalytischer gassensor und verfahren zum herstellen desselben |
US5250170A (en) * | 1990-03-15 | 1993-10-05 | Ricoh Company, Ltd. | Gas sensor having metal-oxide semiconductor layer |
DE4400838A1 (de) * | 1994-01-14 | 1995-07-20 | Smt & Hybrid Gmbh | Gassensorchip und Verfahren zu dessen Herstellung |
KR100426939B1 (ko) * | 1995-06-19 | 2004-07-19 | 피가로 기켄 가부시키가이샤 | 가스센서 |
-
1998
- 1998-03-13 ES ES9800552A patent/ES2142273B1/es not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
ES2142273A1 (es) | 2000-04-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EC2A | Search report published |
Date of ref document: 20000401 Kind code of ref document: A1 Effective date: 20000401 |
|
PC2A | Transfer of patent | ||
FD2A | Announcement of lapse in spain |
Effective date: 20180626 |