ES2142273B1 - Sensor de gases. - Google Patents

Sensor de gases.

Info

Publication number
ES2142273B1
ES2142273B1 ES9800552A ES9800552A ES2142273B1 ES 2142273 B1 ES2142273 B1 ES 2142273B1 ES 9800552 A ES9800552 A ES 9800552A ES 9800552 A ES9800552 A ES 9800552A ES 2142273 B1 ES2142273 B1 ES 2142273B1
Authority
ES
Spain
Prior art keywords
gas sensor
micro
metal oxide
silicon substrate
electrical contacts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
ES9800552A
Other languages
English (en)
Other versions
ES2142273A1 (es
Inventor
Gaudo Francisco J Gracia
Carmona Enrique Castano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gas De Euskadi S A Soc D
Original Assignee
Gas De Euskadi S A Soc D
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gas De Euskadi S A Soc D filed Critical Gas De Euskadi S A Soc D
Priority to ES9800552A priority Critical patent/ES2142273B1/es
Publication of ES2142273A1 publication Critical patent/ES2142273A1/es
Application granted granted Critical
Publication of ES2142273B1 publication Critical patent/ES2142273B1/es
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

Abstract

Sensor de gases, constituido por un sustrato (1) de silicio que presenta al menos una zona (2) micromecanizada de reducido espesor sobre la que se dispone, en posición centrada una resistencia calefactora (4) y un óxido metálico semiconductor (5) dotado de contactos eléctricos (6).
ES9800552A 1998-03-13 1998-03-13 Sensor de gases. Expired - Fee Related ES2142273B1 (es)

Priority Applications (1)

Application Number Priority Date Filing Date Title
ES9800552A ES2142273B1 (es) 1998-03-13 1998-03-13 Sensor de gases.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
ES9800552A ES2142273B1 (es) 1998-03-13 1998-03-13 Sensor de gases.

Publications (2)

Publication Number Publication Date
ES2142273A1 ES2142273A1 (es) 2000-04-01
ES2142273B1 true ES2142273B1 (es) 2000-12-01

Family

ID=8303118

Family Applications (1)

Application Number Title Priority Date Filing Date
ES9800552A Expired - Fee Related ES2142273B1 (es) 1998-03-13 1998-03-13 Sensor de gases.

Country Status (1)

Country Link
ES (1) ES2142273B1 (es)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3932880A1 (de) * 1989-10-02 1991-04-11 Fraunhofer Ges Forschung Katalytischer gassensor und verfahren zum herstellen desselben
US5250170A (en) * 1990-03-15 1993-10-05 Ricoh Company, Ltd. Gas sensor having metal-oxide semiconductor layer
DE4400838A1 (de) * 1994-01-14 1995-07-20 Smt & Hybrid Gmbh Gassensorchip und Verfahren zu dessen Herstellung
KR100426939B1 (ko) * 1995-06-19 2004-07-19 피가로 기켄 가부시키가이샤 가스센서

Also Published As

Publication number Publication date
ES2142273A1 (es) 2000-04-01

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