ES2107010T3 - Sensor micromecanico. - Google Patents
Sensor micromecanico.Info
- Publication number
- ES2107010T3 ES2107010T3 ES93906671T ES93906671T ES2107010T3 ES 2107010 T3 ES2107010 T3 ES 2107010T3 ES 93906671 T ES93906671 T ES 93906671T ES 93906671 T ES93906671 T ES 93906671T ES 2107010 T3 ES2107010 T3 ES 2107010T3
- Authority
- ES
- Spain
- Prior art keywords
- sensing elements
- sensing
- outgoing
- supported
- substantially similar
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
- B81B3/0067—Mechanical properties
- B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
- Micromachines (AREA)
- Pressure Sensors (AREA)
- Force Measurement Appropriate To Specific Purposes (AREA)
Abstract
UN SENSOR MICROMECANICO TIENE UNA PLURALIDAD DE ELEMENTOS SENSORES (14A-14D) QUE ESTAN SOPORTADOS EN REGIONES DE SOPORTE RESPECTIVAS (12A-12D). UN PRIMER CONJUNTO DE ELEMENTOS SENSORES DEFINE UN HUECO SENSOR. EN UNA DISPOSICION ESTE ESTA DEFINIDO POR ELEMENTOS SENSORES SOPORTADOS POR REGIONES DE SOPORTE ADYACENTES. EN OTRA CONFORMACION EL HUECO SENSOR ESTA DEFINIDO ENTRE UN ELEMENTO SENSOR Y UN HAZ DE REFERENCIA FORMADO MEDIANTE LA CONEXION DE PATILLAS DE RETORNO DE DOS ELEMENTOS SENSORES DIAMETRALMENTE OPUESTOS. LOS ELEMENTOS SENSORES SON SUBSTANCIALMENTE SIMILARES ENTRE SI Y CADA UNO DE ELLOS COMPRENDE UNA PATILLA ALARGADA EXTERIOR QUE SE EXTIENDE DESDE SU REGION DE SOPORTE ASOCIADA Y UNA PATILLA DE RETORNO SUBSTANCIALMENTE PARALELA A LA PATILLA DE SALIDA QUE SE EXTIENDE HACIA LA REGION DE SOPORTE. DISPONIENDO ELEMENTOS SENSORES QUE SEAN SUBSTANCIALMENTE SIMILARES EN FORMA Y DISPOSICION, DE ESTA MANERA, SE MINIMIZAN LOS EFECTOS DE LA TENSION DE LA PELICULA FINA.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB929205711A GB9205711D0 (en) | 1992-03-16 | 1992-03-16 | Micromechanical sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
ES2107010T3 true ES2107010T3 (es) | 1997-11-16 |
Family
ID=10712234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES93906671T Expired - Lifetime ES2107010T3 (es) | 1992-03-16 | 1993-03-15 | Sensor micromecanico. |
Country Status (7)
Country | Link |
---|---|
EP (1) | EP0632880B1 (es) |
JP (1) | JPH08504266A (es) |
AT (1) | ATE156907T1 (es) |
DE (1) | DE69313104T2 (es) |
ES (1) | ES2107010T3 (es) |
GB (2) | GB9205711D0 (es) |
WO (1) | WO1993019343A1 (es) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5658698A (en) * | 1994-01-31 | 1997-08-19 | Canon Kabushiki Kaisha | Microstructure, process for manufacturing thereof and devices incorporating the same |
DE4439238A1 (de) * | 1994-11-03 | 1996-05-09 | Telefunken Microelectron | Kapazitiver Beschleunigungssensor |
US5880369A (en) | 1996-03-15 | 1999-03-09 | Analog Devices, Inc. | Micromachined device with enhanced dimensional control |
US6088463A (en) | 1998-10-30 | 2000-07-11 | Microtronic A/S | Solid state silicon-based condenser microphone |
US6829131B1 (en) | 1999-09-13 | 2004-12-07 | Carnegie Mellon University | MEMS digital-to-acoustic transducer with error cancellation |
AU2002331624A1 (en) | 2001-08-17 | 2003-03-03 | Carnegie Mellon University | Method and apparatus for reconstruction of soundwaves from digital signals |
US7142682B2 (en) | 2002-12-20 | 2006-11-28 | Sonion Mems A/S | Silicon-based transducer for use in hearing instruments and listening devices |
US7049051B2 (en) | 2003-01-23 | 2006-05-23 | Akustica, Inc. | Process for forming and acoustically connecting structures on a substrate |
US6936524B2 (en) | 2003-11-05 | 2005-08-30 | Akustica, Inc. | Ultrathin form factor MEMS microphones and microspeakers |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4783237A (en) * | 1983-12-01 | 1988-11-08 | Harry E. Aine | Solid state transducer and method of making same |
FR2558263B1 (fr) * | 1984-01-12 | 1986-04-25 | Commissariat Energie Atomique | Accelerometre directif et son procede de fabrication par microlithographie |
US4953387A (en) * | 1989-07-31 | 1990-09-04 | The Regents Of The University Of Michigan | Ultrathin-film gas detector |
DE69113632T2 (de) * | 1990-08-17 | 1996-03-21 | Analog Devices Inc | Monolithischer beschleunigungsmesser. |
-
1992
- 1992-03-16 GB GB929205711A patent/GB9205711D0/en active Pending
-
1993
- 1993-03-15 WO PCT/GB1993/000532 patent/WO1993019343A1/en active IP Right Grant
- 1993-03-15 JP JP5516352A patent/JPH08504266A/ja active Pending
- 1993-03-15 DE DE69313104T patent/DE69313104T2/de not_active Expired - Fee Related
- 1993-03-15 EP EP93906671A patent/EP0632880B1/en not_active Expired - Lifetime
- 1993-03-15 GB GB9418784A patent/GB2280038B/en not_active Expired - Fee Related
- 1993-03-15 AT AT93906671T patent/ATE156907T1/de not_active IP Right Cessation
- 1993-03-15 ES ES93906671T patent/ES2107010T3/es not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69313104D1 (de) | 1997-09-18 |
JPH08504266A (ja) | 1996-05-07 |
DE69313104T2 (de) | 1997-12-11 |
GB2280038B (en) | 1995-11-22 |
ATE156907T1 (de) | 1997-08-15 |
GB2280038A (en) | 1995-01-18 |
WO1993019343A1 (en) | 1993-09-30 |
EP0632880A1 (en) | 1995-01-11 |
GB9205711D0 (en) | 1992-04-29 |
GB9418784D0 (en) | 1994-11-02 |
EP0632880B1 (en) | 1997-08-13 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FG2A | Definitive protection |
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